[Scan]
initial_time=2015-12-18T19:39:51
final_time=2015-12-18T19:40:10
ip_count=19
run=1020
dataset=0
scan=68
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.37336E-8
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=1.96209E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=7.85291E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-1.07157E-10
mult1=-8.88551E-9
mult2=-2.73059E-9
rf_tmon=-4.81885E-3
rf_agc=3.35078E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.67923E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68503E0
bslens_imon=2.62019E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19933E1
lens5a_imon=1.96554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05041E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53518E1
cs_ef1b_imon=2.81148E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.0207E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.053E1
cs_ea1_imon=2.59472E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36093E0
lens1_imon=2.60183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6449E1
os_ef1alow_imon=2.97092E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03874E1
cs_ea2_imon=1.52111E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84263E1
cs_ef1a_imon=2.93125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.25463E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11155E1
os_restr1_imon=4.31263E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=2.39234E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63442E1
os_ef1bup_imon=3.08432E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26924E0
cs_ionrep_imon=1.19569E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93556E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01853E1
cs_anode1_imon=2.91216E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20616E0
olens4_imon=3.2254E-8
tplens_vset=1.4E-1
tplens_vmon=1.61695E0
tplens_imon=-4.61433E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.48365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.57731E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98372E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.0133E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2974E0
ionrepsh_imon=1.73782E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33621E1
lens5b_imon=2.18702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74701E1
cs_ef2b_imon=3.12511E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38004E0
os_ea2_imon=-7.51598E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00615E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.17451E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05955E0
os_ef2alow_imon=-2.68659E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89523E-1
os_ef2bup_imon=-5.50101E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10899E1
os_restr2_imon=3.40393E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.29781E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01853E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73177E1
iondef1_imon=1.07962E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.95944E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.5407E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.75843E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47121E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.75146E-6
window_vset=0.0E0
window_vmon=1.93894E-1
window_imon=-1.13716E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39013E-4
mask2_vset=0.0E0
mask2_vmon=-1.85988E1
mask2_imon=-6.39401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.40975E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.48416E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=6.95062E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30243E0
defgridb_imon=5.91485E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.40661E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06231E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61214E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30876E1
cs_fil1_imon=9.9428E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63102E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61688E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.41026E-2
os_fil2_imon=-2.67498E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7475E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.33781E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37854E-1
cs_fil2_imon=-2.40676E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.05622E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21752E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.16689E-2
chamber_ion_pmon=2.37435E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.78721E-1
res40_imon=-2.50695E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16941E-1	-7.98297E-1	-9.13072E0	-9.14185E0	4.93526E-3	9.34601E-2	2.73553E1	-3.26572E1	-3.26217E1	2.68262E1	2.37643E-9	2.51693E-3	2.51693E-3	6.31858E-3	2.16569E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17084E-1	-7.98249E-1	-9.13064E0	-9.14161E0	5.34058E-3	9.377E-2	2.73051E1	-3.26626E1	-3.26431E1	2.67962E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.17066E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.17084E-1	-7.98488E-1	-9.13098E0	-9.14176E0	5.31673E-3	9.36508E-2	2.73242E1	-3.26596E1	-3.26225E1	2.6818E1	2.37538E-9	2.52318E-3	2.52318E-3	6.36797E-3	2.16125E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16727E-1	-7.98225E-1	-9.13112E0	-9.14168E0	5.14984E-3	9.33647E-2	2.73075E1	-3.26543E1	-3.26146E1	2.68184E1	2.37638E-9	2.52553E-3	2.52553E-3	6.35514E-3	2.16918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16965E-1	-7.98512E-1	-9.13105E0	-9.14199E0	5.29289E-3	9.34362E-2	2.73111E1	-3.26711E1	-3.2623E1	2.67716E1	2.37641E-9	2.52428E-3	2.52428E-3	6.3957E-3	2.16689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16655E-1	-7.98464E-1	-9.13086E0	-9.14214E0	5.31673E-3	9.32932E-2	2.73063E1	-3.26517E1	-3.26266E1	2.68118E1	2.37641E-9	2.5188E-3	2.5188E-3	6.36797E-3	2.1575E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16655E-1	-7.98202E-1	-9.13084E0	-9.14223E0	5.43594E-3	9.35793E-2	2.73201E1	-3.26705E1	-3.26122E1	2.67848E1	2.37749E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.17915E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16751E-1	-7.98059E-1	-9.13093E0	-9.14197E0	5.24521E-3	9.35078E-2	2.72907E1	-3.26579E1	-3.26302E1	2.68004E1	2.3764E-9	2.51954E-3	2.51954E-3	6.2752E-3	2.18104E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16607E-1	-7.98583E-1	-9.13086E0	-9.14237E0	5.34058E-3	9.3627E-2	2.72974E1	-3.26691E1	-3.25924E1	2.68148E1	2.37641E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.18201E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17013E-1	-7.98035E-1	-9.13103E0	-9.14226E0	5.34058E-3	9.36747E-2	2.73141E1	-3.26597E1	-3.2641E1	2.6798E1	2.37641E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.17444E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16727E-1	-7.98154E-1	-9.13081E0	-9.14207E0	5.38826E-3	9.33886E-2	2.73195E1	-3.26603E1	-3.26398E1	2.67812E1	2.37538E-9	2.51552E-3	2.51552E-3	6.29098E-3	2.15189E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16631E-1	-7.98082E-1	-9.13081E0	-9.14228E0	5.36442E-3	9.35078E-2	2.73216E1	-3.26693E1	-3.26402E1	2.68177E1	2.37538E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.17633E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16989E-1	-7.98392E-1	-9.13081E0	-9.14214E0	5.48363E-3	9.35078E-2	2.73395E1	-3.26792E1	-3.26442E1	2.68101E1	2.37538E-9	2.52405E-3	2.52405E-3	6.30221E-3	2.1864E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.17084E-1	-7.98059E-1	-9.13084E0	-9.1419E0	5.24521E-3	9.37223E-2	2.73016E1	-3.26496E1	-3.2626E1	2.68328E1	2.37648E-9	2.51874E-3	2.51874E-3	6.27268E-3	2.18513E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.16727E-1	-7.98011E-1	-9.13112E0	-9.14195E0	5.55515E-3	9.35793E-2	2.73207E1	-3.26999E1	-3.26188E1	2.67926E1	2.37641E-9	2.52209E-3	2.52209E-3	6.3514E-3	2.16313E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16822E-1	-7.98225E-1	-9.13105E0	-9.1418E0	5.19753E-3	9.33409E-2	2.72859E1	-3.26585E1	-3.26356E1	2.67848E1	2.37842E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.15883E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16774E-1	-7.97892E-1	-9.13098E0	-9.14187E0	5.45979E-3	9.35555E-2	2.73293E1	-3.2708E1	-3.26089E1	2.68319E1	2.37641E-9	2.5199E-3	2.5199E-3	6.28006E-3	2.17066E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16894E-1	-7.98249E-1	-9.13107E0	-9.14211E0	5.34058E-3	9.34601E-2	2.72909E1	-3.26744E1	-3.26526E1	2.67902E1	2.37745E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17255E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16727E-1	-7.98464E-1	-9.13136E0	-9.14197E0	5.17368E-3	9.33886E-2	2.73128E1	-3.26762E1	-3.26201E1	2.68256E1	2.37638E-9	2.52871E-3	2.52871E-3	6.32328E-3	2.17282E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16679E-1	-7.98368E-1	-9.13131E0	-9.14185E0	5.26905E-3	9.34601E-2	2.73177E1	-3.26777E1	-3.26272E1	2.68058E1	2.37435E-9	2.51334E-3	2.51334E-3	6.33486E-3	2.16689E-2