[Scan]
initial_time=2015-12-18T19:40:18
final_time=2015-12-18T19:40:37
ip_count=19
run=1020
dataset=0
scan=69
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.37061E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.98095E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=7.35688E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-1.08075E-10
mult1=-8.53633E-9
mult2=-2.73258E-9
rf_tmon=-4.62658E-3
rf_agc=3.32615E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.6781E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.25303E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=1.97731E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05259E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54038E1
cs_ef1b_imon=2.80285E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=2.59211E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41326E0
lens1_imon=2.56095E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64655E1
os_ef1alow_imon=2.95159E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.52851E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84446E1
cs_ef1a_imon=2.9297E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.25269E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11181E1
os_restr1_imon=4.30624E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.38116E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.09616E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=1.19652E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93363E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=2.9085E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20599E0
olens4_imon=3.22967E-8
tplens_vset=1.4E-1
tplens_vmon=1.61843E0
tplens_imon=-4.40464E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.46976E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26951E1
iondef2_imon=1.58727E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98204E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.0128E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24384E0
ionrepsh_imon=1.73486E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33852E1
lens5b_imon=2.18224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74756E1
cs_ef2b_imon=3.12014E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37775E0
os_ea2_imon=-8.33338E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71542E1
cs_ef2a_imon=3.17331E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03718E0
os_ef2alow_imon=-2.57458E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47419E-1
os_ef2bup_imon=-5.52507E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1077E1
os_restr2_imon=3.41276E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.31556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.23604E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.07912E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.02319E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.52497E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14288E0
cs_ionaccel_imon=-1.96641E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47108E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56631E1
einzel_imon=7.61833E-6
window_vset=0.0E0
window_vmon=1.60344E-1
window_imon=-1.16015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39244E-4
mask2_vset=0.0E0
mask2_vmon=-1.86008E1
mask2_imon=-8.30005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.68956E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.49324E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.0737E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38193E0
defgridb_imon=6.16053E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.40184E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06269E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61153E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30918E1
cs_fil1_imon=9.93674E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62835E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6169E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.95879E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84864E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28953E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.40389E-1
cs_fil2_imon=-2.53597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24047E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.218E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.16067E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.93583E-1
res40_imon=-2.77267E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.16655E-1	-7.98392E-1	-9.13112E0	-9.14204E0	5.19753E-3	9.31025E-2	2.73294E1	-3.26561E1	-3.26289E1	2.6781E1	2.37641E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.17066E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16631E-1	-7.98464E-1	-9.13122E0	-9.14185E0	5.55515E-3	9.33886E-2	2.73417E1	-3.26693E1	-3.26206E1	2.6789E1	2.37638E-9	2.52871E-3	2.52871E-3	6.3445E-3	2.16011E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16512E-1	-7.9813E-1	-9.13146E0	-9.1419E0	5.53131E-3	9.31978E-2	2.73165E1	-3.26518E1	-3.2638E1	2.68238E1	2.37538E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.15376E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.16607E-1	-7.9844E-1	-9.13105E0	-9.1418E0	5.50747E-3	9.33409E-2	2.72817E1	-3.26969E1	-3.25876E1	2.68196E1	2.37641E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.17066E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16607E-1	-7.98368E-1	-9.13138E0	-9.14171E0	5.26905E-3	9.32932E-2	2.73157E1	-3.26408E1	-3.26178E1	2.67926E1	2.3764E-9	2.51954E-3	2.51954E-3	6.34518E-3	2.17547E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16727E-1	-7.98368E-1	-9.13146E0	-9.14197E0	5.43594E-3	9.32932E-2	2.72727E1	-3.27035E1	-3.2596E1	2.68202E1	2.37538E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16878E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16584E-1	-7.98583E-1	-9.13117E0	-9.1419E0	5.43594E-3	9.3317E-2	2.73273E1	-3.26669E1	-3.2623E1	2.67974E1	2.37641E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.16313E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.16488E-1	-7.98583E-1	-9.131E0	-9.14197E0	5.34058E-3	9.35078E-2	2.7301E1	-3.26938E1	-3.26396E1	2.68146E1	2.37745E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.15563E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.1656E-1	-7.98392E-1	-9.13126E0	-9.14183E0	5.36442E-3	9.3317E-2	2.72931E1	-3.26765E1	-3.26302E1	2.68406E1	2.37538E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.16991E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.16798E-1	-7.98392E-1	-9.13129E0	-9.14204E0	5.43594E-3	9.3317E-2	2.73129E1	-3.26633E1	-3.26386E1	2.68214E1	2.37745E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.15563E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16846E-1	-7.98321E-1	-9.13129E0	-9.14207E0	5.43594E-3	9.35078E-2	2.73371E1	-3.27023E1	-3.26196E1	2.68017E1	2.37745E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.15938E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.16727E-1	-7.98202E-1	-9.13112E0	-9.1418E0	5.43594E-3	9.36985E-2	2.73159E1	-3.26579E1	-3.26675E1	2.67818E1	2.37627E-9	2.52271E-3	2.52271E-3	6.32386E-3	2.16716E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.16727E-1	-7.98583E-1	-9.13107E0	-9.14195E0	5.38826E-3	9.33647E-2	2.73311E1	-3.26682E1	-3.26309E1	2.68196E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16965E-1	-7.98392E-1	-9.13105E0	-9.14216E0	5.19753E-3	9.31978E-2	2.7291E1	-3.26548E1	-3.26248E1	2.6819E1	2.37681E-9	2.52141E-3	2.52141E-3	6.3074E-3	2.15275E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16631E-1	-7.98297E-1	-9.13095E0	-9.14185E0	5.17368E-3	9.32932E-2	2.72915E1	-3.26667E1	-3.26514E1	2.6825E1	2.37749E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.16186E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16631E-1	-7.98249E-1	-9.13117E0	-9.14187E0	5.29289E-3	9.34601E-2	2.73247E1	-3.26652E1	-3.26389E1	2.6798E1	2.37538E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.16436E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16488E-1	-7.98321E-1	-9.13069E0	-9.14195E0	5.29289E-3	9.32932E-2	2.73225E1	-3.26795E1	-3.2647E1	2.67932E1	2.37641E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.18201E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16703E-1	-7.98249E-1	-9.13086E0	-9.14192E0	5.38826E-3	9.31978E-2	2.7297E1	-3.26266E1	-3.26602E1	2.68366E1	2.37745E-9	2.52977E-3	2.52977E-3	6.31288E-3	2.17633E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16846E-1	-7.98631E-1	-9.13129E0	-9.14183E0	5.26905E-3	9.33886E-2	2.73189E1	-3.26999E1	-3.26272E1	2.68262E1	2.3764E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.17361E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.1687E-1	-7.98607E-1	-9.13122E0	-9.14168E0	5.29289E-3	9.33886E-2	2.73405E1	-3.26951E1	-3.2623E1	2.68412E1	2.37538E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16067E-2