[Scan]
initial_time=2015-12-18T19:40:45
final_time=2015-12-18T19:41:04
ip_count=19
run=1020
dataset=0
scan=70
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09696E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.36293E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=2.01932E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=6.51574E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=-8.90136E-11
mult1=-9.19199E-9
mult2=-2.60567E-9
rf_tmon=-3.7839E-3
rf_agc=3.37456E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.68219E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.44402E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04855E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53864E1
cs_ef1b_imon=2.8091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02427E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05234E1
cs_ea1_imon=2.60312E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41221E0
lens1_imon=2.61706E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.97696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03516E1
cs_ea2_imon=1.52632E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=2.92101E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.2494E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.30763E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15053E1
os_ea1_imon=2.36051E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26832E0
cs_ionrep_imon=1.1853E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93301E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02105E1
cs_anode1_imon=2.91058E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20604E0
olens4_imon=3.22063E-8
tplens_vset=1.4E-1
tplens_vmon=1.60178E0
tplens_imon=-3.02951E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26154E1
iondef3_imon=1.4827E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.01634E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28574E0
ionrepsh_imon=1.73685E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74652E1
cs_ef2b_imon=3.12952E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37887E0
os_ea2_imon=-7.752E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71368E1
cs_ef2a_imon=3.17262E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0227E0
os_ef2alow_imon=-2.76572E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72904E-1
os_ef2bup_imon=-5.49727E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10776E1
os_restr2_imon=3.40059E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.23534E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73122E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67716E1
iondef4_imon=1.08573E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.00313E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.50942E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12667E0
cs_ionaccel_imon=-1.86911E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47091E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.61833E-6
window_vset=0.0E0
window_vmon=1.36597E-1
window_imon=-1.19491E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39042E-4
mask2_vset=0.0E0
mask2_vmon=-1.86327E1
mask2_imon=-7.88302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.3756E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.36621E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.33955E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.16073E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.41453E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06901E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61091E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.94862E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62627E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61386E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.77344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89498E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3042E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.40264E-1
cs_fil2_imon=-2.59968E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.82899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21845E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.16689E-2
chamber_ion_pmon=2.37745E-9
chamber_cvt_pmon=2.52757E-3
foreline_cvt_pmon=2.52757E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.69053E-1
res40_imon=-2.55721E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16369E-1	-7.98273E-1	-9.13112E0	-9.14185E0	5.07832E-3	9.34839E-2	2.73358E1	-3.26655E1	-3.26396E1	2.67872E1	2.37538E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.1575E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16536E-1	-7.98011E-1	-9.13124E0	-9.1419E0	5.24521E-3	9.35316E-2	2.73082E1	-3.27009E1	-3.26497E1	2.68163E1	2.37538E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.15563E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.16536E-1	-7.98154E-1	-9.13134E0	-9.14185E0	5.126E-3	9.36031E-2	2.7279E1	-3.27118E1	-3.26202E1	2.68424E1	2.37643E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.16377E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.16298E-1	-7.98178E-1	-9.13129E0	-9.14185E0	5.03063E-3	9.36747E-2	2.73448E1	-3.26735E1	-3.26518E1	2.6819E1	2.37538E-9	2.52659E-3	2.52659E-3	6.31798E-3	2.17464E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16464E-1	-7.98225E-1	-9.13138E0	-9.14199E0	4.81606E-3	9.37462E-2	2.73351E1	-3.2638E1	-3.26278E1	2.6822E1	2.37641E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.16878E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0968E0	-8.16464E-1	-7.98059E-1	-9.13129E0	-9.14216E0	5.19753E-3	9.40084E-2	2.73311E1	-3.26396E1	-3.26632E1	2.68028E1	2.37538E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.1858E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.16369E-1	-7.98035E-1	-9.13146E0	-9.14187E0	5.00679E-3	9.37223E-2	2.73415E1	-3.26465E1	-3.26437E1	2.68412E1	2.37641E-9	2.5199E-3	2.5199E-3	6.34588E-3	2.1877E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16178E-1	-7.98178E-1	-9.13146E0	-9.14192E0	5.43594E-3	9.33409E-2	2.72905E1	-3.2654E1	-3.26362E1	2.68387E1	2.37634E-9	2.52466E-3	2.52466E-3	6.31761E-3	2.17483E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16321E-1	-7.98225E-1	-9.13129E0	-9.14209E0	5.29289E-3	9.31978E-2	2.73015E1	-3.2641E1	-3.2611E1	2.67656E1	2.37538E-9	2.52147E-3	2.52147E-3	6.3074E-3	2.17602E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.16464E-1	-7.98321E-1	-9.13117E0	-9.14211E0	5.45979E-3	9.35555E-2	2.73222E1	-3.26732E1	-3.26142E1	2.68111E1	2.37538E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.16436E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09734E0	-8.16464E-1	-7.98225E-1	-9.1311E0	-9.14202E0	5.29289E-3	9.35078E-2	2.73123E1	-3.26813E1	-3.26314E1	2.68244E1	2.37538E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.16689E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09696E0	-8.16417E-1	-7.98106E-1	-9.13126E0	-9.14185E0	5.19753E-3	9.35793E-2	2.73195E1	-3.26603E1	-3.26218E1	2.67986E1	2.3764E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.17547E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09665E0	-8.16488E-1	-7.98368E-1	-9.13105E0	-9.14147E0	5.29289E-3	9.36031E-2	2.73153E1	-3.26549E1	-3.26236E1	2.67644E1	2.37641E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.16125E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.16441E-1	-7.98082E-1	-9.131E0	-9.14185E0	5.31673E-3	9.33647E-2	2.73177E1	-3.26705E1	-3.26194E1	2.68052E1	2.37538E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.16689E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16536E-1	-7.97939E-1	-9.13122E0	-9.14195E0	5.03063E-3	9.38177E-2	2.73098E1	-3.26649E1	-3.26408E1	2.68184E1	2.37538E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.1575E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16369E-1	-7.97963E-1	-9.13141E0	-9.14187E0	5.10216E-3	9.34839E-2	2.72967E1	-3.26849E1	-3.26008E1	2.68004E1	2.37745E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.16689E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16464E-1	-7.98202E-1	-9.13126E0	-9.14211E0	4.95911E-3	9.37223E-2	2.73057E1	-3.26591E1	-3.26422E1	2.68046E1	2.37741E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.15883E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.16178E-1	-7.97939E-1	-9.13148E0	-9.1419E0	5.29289E-3	9.34124E-2	2.73051E1	-3.26683E1	-3.2677E1	2.68267E1	2.37745E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.17444E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.16631E-1	-7.97892E-1	-9.1311E0	-9.14209E0	5.07832E-3	9.3627E-2	2.73249E1	-3.26609E1	-3.2629E1	2.67902E1	2.37538E-9	2.51182E-3	2.51182E-3	6.30212E-3	2.16374E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09696E0	-8.16679E-1	-7.97987E-1	-9.13122E0	-9.14207E0	4.95911E-3	9.3627E-2	2.73122E1	-3.26915E1	-3.26154E1	2.67716E1	2.37745E-9	2.52757E-3	2.52757E-3	6.30192E-3	2.16689E-2