[Scan]
initial_time=2015-12-18T19:41:11
final_time=2015-12-18T19:41:31
ip_count=19
run=1020
dataset=0
scan=71
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.37567E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.97369E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=6.60801E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-9.39727E-11
mult1=-8.92521E-9
mult2=-2.70318E-9
rf_tmon=-4.94648E-3
rf_agc=3.35354E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.69924E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.97023E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=2.818E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02057E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05336E1
cs_ea1_imon=2.6006E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36194E0
lens1_imon=2.36629E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0382E1
cs_ea2_imon=1.53347E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.91963E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.2499E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.32193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15482E1
os_ea1_imon=2.39708E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.06199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=1.17032E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93328E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=2.92251E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20594E0
olens4_imon=3.21224E-8
tplens_vset=1.4E-1
tplens_vmon=1.60486E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26593E1
iondef3_imon=1.46905E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26826E1
iondef2_imon=1.58479E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98218E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.02831E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23853E0
ionrepsh_imon=1.74229E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33935E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.10668E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39426E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.49547E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.39319E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.27946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.23596E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72845E1
iondef1_imon=1.1098E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.07332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.03488E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.48312E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-2.08251E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.50043E-6
window_vset=0.0E0
window_vmon=1.47065E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.86314E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.39579E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.29503E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.39933E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.20181E0
defgridb_imon=5.94817E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.40738E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06302E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61136E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30914E1
cs_fil1_imon=9.95164E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6224E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61535E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.81613E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.70684E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.1693E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38197E-1
cs_fil2_imon=-2.81013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21929E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.17918E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.82117E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.16679E-1	-7.98035E-1	-9.13119E0	-9.1419E0	5.53131E-3	9.33886E-2	2.72945E1	-3.26531E1	-3.26467E1	2.68202E1	2.37538E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.16436E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16584E-1	-7.98011E-1	-9.13081E0	-9.14185E0	5.26905E-3	9.35316E-2	2.73263E1	-3.26413E1	-3.26526E1	2.67885E1	2.3764E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.16252E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.17227E-1	-7.98082E-1	-9.13088E0	-9.14164E0	5.24521E-3	9.34839E-2	2.73116E1	-3.26655E1	-3.26036E1	2.68286E1	2.37538E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.16689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16631E-1	-7.98011E-1	-9.13048E0	-9.14156E0	5.07832E-3	9.36747E-2	2.73327E1	-3.26615E1	-3.26248E1	2.68076E1	2.37638E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.16374E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.16488E-1	-7.98059E-1	-9.1306E0	-9.14173E0	5.00679E-3	9.32932E-2	2.7308E1	-3.26724E1	-3.26446E1	2.68184E1	2.37538E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.15938E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.16607E-1	-7.98368E-1	-9.13084E0	-9.14159E0	5.03063E-3	9.32693E-2	2.73399E1	-3.26651E1	-3.26488E1	2.68334E1	2.3764E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.15699E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16536E-1	-7.9844E-1	-9.13098E0	-9.14185E0	5.19753E-3	9.33886E-2	2.7266E1	-3.26543E1	-3.26074E1	2.67746E1	2.3764E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.16806E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16464E-1	-7.9813E-1	-9.1311E0	-9.14187E0	5.36442E-3	9.37462E-2	2.73015E1	-3.26579E1	-3.26392E1	2.68496E1	2.37641E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.16501E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16607E-1	-7.98035E-1	-9.13122E0	-9.14197E0	5.126E-3	9.34124E-2	2.7321E1	-3.26738E1	-3.26058E1	2.67944E1	2.37643E-9	2.52809E-3	2.52809E-3	6.31858E-3	2.17145E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09665E0	-8.16607E-1	-7.98035E-1	-9.13095E0	-9.14152E0	5.10216E-3	9.33409E-2	2.73181E1	-3.26573E1	-3.26219E1	2.68418E1	2.37951E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.16878E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09711E0	-8.16512E-1	-7.98535E-1	-9.13098E0	-9.14187E0	5.17368E-3	9.33886E-2	2.73328E1	-3.26502E1	-3.26537E1	2.68041E1	2.37538E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.16436E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.1625E-1	-7.98249E-1	-9.13086E0	-9.14207E0	5.126E-3	9.34362E-2	2.73259E1	-3.26872E1	-3.2648E1	2.6825E1	2.37538E-9	2.52647E-3	2.52647E-3	6.28006E-3	2.15938E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.16441E-1	-7.98297E-1	-9.13086E0	-9.14164E0	5.48363E-3	9.36985E-2	2.72865E1	-3.26404E1	-3.26176E1	2.68334E1	2.37538E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.15563E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09688E0	-8.16488E-1	-7.98559E-1	-9.13155E0	-9.14161E0	4.98295E-3	9.37223E-2	2.72739E1	-3.26693E1	-3.26434E1	2.68178E1	2.37745E-9	2.51662E-3	2.51662E-3	6.3514E-3	2.1575E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16703E-1	-7.9844E-1	-9.13122E0	-9.1419E0	5.126E-3	9.36985E-2	2.73045E1	-3.26561E1	-3.26344E1	2.68034E1	2.37641E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.16125E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16774E-1	-7.98273E-1	-9.13115E0	-9.14173E0	5.22137E-3	9.32932E-2	2.7284E1	-3.26681E1	-3.26459E1	2.6778E1	2.37538E-9	2.51915E-3	2.51915E-3	6.34099E-3	2.16569E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.16965E-1	-7.98225E-1	-9.13119E0	-9.14176E0	5.19753E-3	9.36508E-2	2.73001E1	-3.26965E1	-3.26054E1	2.68007E1	2.37538E-9	2.52448E-3	2.52448E-3	6.33919E-3	2.17829E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16894E-1	-7.9844E-1	-9.13086E0	-9.14166E0	5.4121E-3	9.36985E-2	2.7275E1	-3.26006E1	-3.26065E1	2.67955E1	2.37538E-9	2.52362E-3	2.52362E-3	6.31299E-3	2.17915E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16751E-1	-7.98321E-1	-9.13126E0	-9.14192E0	5.4121E-3	9.38177E-2	2.73334E1	-3.26703E1	-3.26213E1	2.6792E1	2.37638E-9	2.51498E-3	2.51498E-3	6.31269E-3	2.18377E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16417E-1	-7.98082E-1	-9.13126E0	-9.14195E0	5.29289E-3	9.36031E-2	2.72845E1	-3.26826E1	-3.26593E1	2.68064E1	2.37538E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.17918E-2