[Scan]
initial_time=2015-12-18T19:41:38
final_time=2015-12-18T19:41:58
ip_count=19
run=1020
dataset=0
scan=72
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.36878E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.97663E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=5.45919E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-9.33051E-11
mult1=-9.68019E-9
mult2=-2.70863E-9
rf_tmon=-4.14592E-3
rf_agc=3.40486E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.64027E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67455E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20073E1
lens5a_imon=1.97226E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53502E1
cs_ef1b_imon=2.8162E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02042E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=2.6006E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38518E0
lens1_imon=2.75405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.52993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.92828E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.252E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.31004E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15197E1
os_ea1_imon=2.36195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21365E0
cs_ionrep_imon=1.18241E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91855E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=2.90918E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=3.21777E-8
tplens_vset=1.4E-1
tplens_vmon=1.58556E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26573E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=4.07177E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28695E0
ionrepsh_imon=1.76822E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.16512E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35904E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03053E0
os_ef2alow_imon=-2.74564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70995E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.40509E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.30613E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.08796E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.03148E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.50858E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.51845E-6
window_vset=0.0E0
window_vmon=1.6088E-1
window_imon=-1.15269E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92679E3
multa_neg_imon=7.44409E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.3554E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.07639E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23314E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.41873E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06771E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61007E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.94654E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6248E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61581E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77892E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25651E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.40398E-1
cs_fil2_imon=-2.72003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21866E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.17547E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.74619E-1
res40_imon=-2.6159E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16393E-1	-7.98655E-1	-9.13095E0	-9.14176E0	5.38826E-3	9.35078E-2	2.73201E1	-3.26675E1	-3.2617E1	2.6795E1	2.37538E-9	2.52647E-3	2.52647E-3	6.33486E-3	2.16313E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.1656E-1	-7.98464E-1	-9.13103E0	-9.14185E0	5.4121E-3	9.37223E-2	2.72898E1	-3.26626E1	-3.26313E1	2.67992E1	2.37641E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.16689E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16822E-1	-7.98273E-1	-9.13117E0	-9.14192E0	5.45979E-3	9.3627E-2	2.73352E1	-3.26793E1	-3.26486E1	2.68198E1	2.37538E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.16252E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16679E-1	-7.9813E-1	-9.13117E0	-9.14185E0	5.19753E-3	9.35316E-2	2.72922E1	-3.26568E1	-3.26456E1	2.68272E1	2.37538E-9	2.52025E-3	2.52025E-3	6.3074E-3	2.16192E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16798E-1	-7.98082E-1	-9.13091E0	-9.14145E0	5.53131E-3	9.35316E-2	2.73153E1	-3.26674E1	-3.26254E1	2.68107E1	2.37734E-9	2.51369E-3	2.51369E-3	6.31779E-3	2.16848E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-8.16584E-1	-7.98416E-1	-9.131E0	-9.14159E0	5.36442E-3	9.37462E-2	2.73234E1	-3.26573E1	-3.26384E1	2.68151E1	2.37538E-9	2.52521E-3	2.52521E-3	6.30171E-3	2.15469E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16464E-1	-7.9844E-1	-9.13105E0	-9.14147E0	5.126E-3	9.39608E-2	2.72968E1	-3.26791E1	-3.2636E1	2.68106E1	2.3764E-9	2.51632E-3	2.51632E-3	6.36144E-3	2.16621E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16655E-1	-7.9875E-1	-9.13095E0	-9.14171E0	5.19753E-3	9.38416E-2	2.73187E1	-3.26467E1	-3.26343E1	2.681E1	2.3764E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.16252E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-8.16488E-1	-7.98464E-1	-9.13112E0	-9.14164E0	5.126E-3	9.35555E-2	2.73246E1	-3.26856E1	-3.2626E1	2.6796E1	2.37741E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.17732E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16822E-1	-7.98392E-1	-9.13126E0	-9.14187E0	5.45979E-3	9.37462E-2	2.73476E1	-3.26478E1	-3.26048E1	2.68314E1	2.3764E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.17361E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16941E-1	-7.98154E-1	-9.13136E0	-9.14176E0	5.14984E-3	9.35793E-2	2.73115E1	-3.26648E1	-3.26179E1	2.68058E1	2.37538E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.15148E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16846E-1	-7.98178E-1	-9.13105E0	-9.14185E0	4.91142E-3	9.38654E-2	2.73228E1	-3.26514E1	-3.26296E1	2.68105E1	2.37737E-9	2.52342E-3	2.52342E-3	6.32328E-3	2.16374E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16965E-1	-7.9844E-1	-9.13112E0	-9.14216E0	5.26905E-3	9.36985E-2	2.73257E1	-3.27157E1	-3.26644E1	2.68136E1	2.3764E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.16806E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16822E-1	-7.98297E-1	-9.13105E0	-9.14185E0	5.19753E-3	9.36747E-2	2.73279E1	-3.26879E1	-3.26056E1	2.6804E1	2.37538E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.18104E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16941E-1	-7.98082E-1	-9.1311E0	-9.14168E0	5.26905E-3	9.37223E-2	2.73327E1	-3.26543E1	-3.26236E1	2.6828E1	2.37641E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16501E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16727E-1	-7.98154E-1	-9.13138E0	-9.14171E0	5.19753E-3	9.36985E-2	2.73213E1	-3.26705E1	-3.2644E1	2.67914E1	2.37641E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.17255E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16703E-1	-7.98368E-1	-9.13105E0	-9.14202E0	5.17368E-3	9.36031E-2	2.74178E1	-3.26638E1	-3.26296E1	2.68238E1	2.37641E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.17066E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16798E-1	-7.98249E-1	-9.13107E0	-9.14218E0	5.26905E-3	9.38177E-2	2.73605E1	-3.26844E1	-3.26366E1	2.68034E1	2.37538E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.16436E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16846E-1	-7.98464E-1	-9.13107E0	-9.1418E0	5.29289E-3	9.41515E-2	2.73305E1	-3.27393E1	-3.26213E1	2.68082E1	2.37538E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.15883E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16631E-1	-7.98225E-1	-9.13112E0	-9.14176E0	5.36442E-3	9.39608E-2	2.72955E1	-3.26729E1	-3.26573E1	2.68118E1	2.37538E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.17547E-2