[Scan]
initial_time=2015-12-18T19:42:05
final_time=2015-12-18T19:42:25
ip_count=19
run=1020
dataset=0
scan=73
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=1.36844E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.95599E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=6.35505E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-1.00279E-10
mult1=-9.51118E-9
mult2=-2.62723E-9
rf_tmon=-4.63925E-3
rf_agc=3.34094E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.66662E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6355E0
bslens_imon=2.61346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=1.98019E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=2.81584E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05234E1
cs_ea1_imon=2.59051E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35694E0
lens1_imon=2.5738E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04099E1
cs_ea2_imon=1.5256E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=2.93297E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.25313E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11574E1
os_restr1_imon=4.31653E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14903E1
os_ea1_imon=2.39836E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63443E1
os_ef1bup_imon=3.05442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26532E0
cs_ionrep_imon=1.18962E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93265E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.89044E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20604E0
olens4_imon=3.21935E-8
tplens_vset=1.4E-1
tplens_vmon=1.58736E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26496E1
iondef3_imon=1.49604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.56706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.00463E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24369E0
ionrepsh_imon=1.75019E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.17341E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74357E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35965E0
os_ea2_imon=-7.5357E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71714E1
cs_ef2a_imon=3.19065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.32398E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61384E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.3968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.23199E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72992E1
iondef1_imon=1.08291E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.07728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.99495E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.53374E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47118E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.54008E-6
window_vset=0.0E0
window_vmon=1.66887E-1
window_imon=-1.27162E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=6.73031E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.1593E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.41189E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05852E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61089E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.96239E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62444E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61763E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.4846E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.21139E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.39233E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.25654E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21995E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.16501E-2
chamber_ion_pmon=2.37745E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.90526E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16131E-1	-7.98106E-1	-9.13088E0	-9.1419E0	5.26905E-3	9.34601E-2	2.73063E1	-3.26597E1	-3.26464E1	2.6849E1	2.37538E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.15883E-2
2.0E0	6.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16274E-1	-7.98368E-1	-9.13119E0	-9.14216E0	5.24521E-3	9.35316E-2	2.73192E1	-3.26493E1	-3.26572E1	2.68334E1	2.37641E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.16125E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16107E-1	-7.98154E-1	-9.13107E0	-9.14187E0	5.22137E-3	9.37223E-2	2.73263E1	-3.26844E1	-3.26307E1	2.67439E1	2.37749E-9	2.52473E-3	2.52473E-3	6.31858E-3	2.16569E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16154E-1	-7.98273E-1	-9.13115E0	-9.14166E0	4.76837E-3	9.35555E-2	2.73255E1	-3.26927E1	-3.26488E1	2.67787E1	2.37741E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.15331E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16131E-1	-7.98178E-1	-9.13076E0	-9.14192E0	5.22137E-3	9.35078E-2	2.73163E1	-3.26667E1	-3.26408E1	2.6819E1	2.37745E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.15189E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09665E0	-8.16441E-1	-7.98035E-1	-9.13081E0	-9.14192E0	5.24521E-3	9.34362E-2	2.72953E1	-3.26297E1	-3.26315E1	2.68176E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.16501E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16464E-1	-7.97868E-1	-9.13103E0	-9.1419E0	5.29289E-3	9.3627E-2	2.73129E1	-3.26675E1	-3.26362E1	2.68172E1	2.37848E-9	2.52977E-3	2.52977E-3	6.32936E-3	2.17255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0968E0	-8.16321E-1	-7.97749E-1	-9.13112E0	-9.14197E0	5.22137E-3	9.34124E-2	2.73468E1	-3.2681E1	-3.26335E1	2.68065E1	2.37641E-9	2.51771E-3	2.51771E-3	6.3514E-3	2.16313E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16369E-1	-7.98011E-1	-9.13072E0	-9.14192E0	5.05447E-3	9.35316E-2	2.72829E1	-3.26188E1	-3.26278E1	2.68235E1	2.37638E-9	2.52342E-3	2.52342E-3	6.32858E-3	2.15831E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0968E0	-8.16226E-1	-7.98607E-1	-9.13084E0	-9.14211E0	5.00679E-3	9.37223E-2	2.73099E1	-3.26849E1	-3.26591E1	2.68117E1	2.37538E-9	2.53196E-3	2.53196E-3	6.32386E-3	2.16878E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.16417E-1	-7.9844E-1	-9.13084E0	-9.1419E0	5.43594E-3	9.3627E-2	2.73271E1	-3.26695E1	-3.26451E1	2.67952E1	2.37538E-9	2.53087E-3	2.53087E-3	6.32386E-3	2.16689E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09665E0	-8.16393E-1	-7.98464E-1	-9.1305E0	-9.14183E0	5.26905E-3	9.35793E-2	2.72959E1	-3.26327E1	-3.26542E1	2.6816E1	2.37538E-9	2.51739E-3	2.51739E-3	6.34518E-3	2.16806E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0968E0	-8.16417E-1	-7.98368E-1	-9.13091E0	-9.14173E0	5.34058E-3	9.36031E-2	2.7311E1	-3.26874E1	-3.26549E1	2.67932E1	2.37538E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16313E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16512E-1	-7.98368E-1	-9.13086E0	-9.1418E0	5.43594E-3	9.36985E-2	2.72793E1	-3.26993E1	-3.2599E1	2.68256E1	2.37538E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.16991E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16321E-1	-7.98559E-1	-9.1311E0	-9.14207E0	5.22137E-3	9.34839E-2	2.72892E1	-3.26531E1	-3.26242E1	2.6816E1	2.37641E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.17444E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16298E-1	-7.98583E-1	-9.13119E0	-9.14187E0	5.36442E-3	9.34601E-2	2.73189E1	-3.26464E1	-3.26621E1	2.67956E1	2.37538E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.16621E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16226E-1	-7.98488E-1	-9.13122E0	-9.14185E0	5.72205E-3	9.36985E-2	2.73351E1	-3.26711E1	-3.26122E1	2.68352E1	2.37538E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.16313E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16417E-1	-7.98345E-1	-9.13136E0	-9.14197E0	5.62668E-3	9.34839E-2	2.73099E1	-3.26837E1	-3.2614E1	2.68124E1	2.37538E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.17066E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16441E-1	-7.98273E-1	-9.13119E0	-9.14173E0	5.57899E-3	9.34839E-2	2.73207E1	-3.26747E1	-3.26561E1	2.68004E1	2.37538E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.17066E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16393E-1	-7.98082E-1	-9.13103E0	-9.14187E0	5.43594E-3	9.33647E-2	2.72992E1	-3.2662E1	-3.26496E1	2.67788E1	2.37745E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.16501E-2