[Scan]
initial_time=2015-12-18T19:42:32
final_time=2015-12-18T19:42:52
ip_count=19
run=1020
dataset=0
scan=74
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=1.37319E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.96639E-9
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=5.40185E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-7.30276E-11
mult1=-9.463E-9
mult2=-2.69549E-9
rf_tmon=-4.8889E-3
rf_agc=3.30223E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.70993E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.48663E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=1.97165E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=2.80791E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05077E1
cs_ea1_imon=2.58963E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38023E0
lens1_imon=2.70253E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03566E1
cs_ea2_imon=1.51542E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.93549E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.25671E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=4.32265E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.38576E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64008E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25151E0
cs_ionrep_imon=1.18094E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93197E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=2.92071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.23417E-8
tplens_vset=1.4E-1
tplens_vmon=1.58657E0
tplens_imon=-4.58161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.50763E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.01073E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27628E0
ionrepsh_imon=1.75327E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43792E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00375E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61384E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=3.39571E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.25326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72941E1
iondef1_imon=1.08821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.07045E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.54943E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.90592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.48602E-6
window_vset=0.0E0
window_vmon=1.59078E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.38947E-4
mask2_vset=0.0E0
mask2_vmon=-1.8611E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.927E3
multa_neg_imon=7.75681E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.59588E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.13387E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36717E0
defgridb_imon=6.05081E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.39177E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.062E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61349E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30955E1
cs_fil1_imon=9.95975E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6248E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61984E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.86419E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.96555E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21914E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.17176E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.24764E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16512E-1	-7.9813E-1	-9.13155E0	-9.14204E0	4.88758E-3	9.3174E-2	2.73129E1	-3.26476E1	-3.26152E1	2.68105E1	2.37538E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.17732E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.1625E-1	-7.98225E-1	-9.13165E0	-9.14195E0	4.95911E-3	9.34124E-2	2.73057E1	-3.26494E1	-3.26554E1	2.68375E1	2.37641E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.17255E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16178E-1	-7.98178E-1	-9.13122E0	-9.14192E0	5.31673E-3	9.35078E-2	2.73228E1	-3.26461E1	-3.26478E1	2.68065E1	2.37641E-9	2.51334E-3	2.51334E-3	6.33486E-3	2.16313E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16369E-1	-7.98106E-1	-9.13138E0	-9.14221E0	5.17368E-3	9.33409E-2	2.72997E1	-3.26693E1	-3.26056E1	2.68226E1	2.37741E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.15699E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16154E-1	-7.98225E-1	-9.13136E0	-9.14218E0	5.03063E-3	9.35078E-2	2.73141E1	-3.2653E1	-3.262E1	2.67956E1	2.37538E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.17255E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.15964E-1	-7.98464E-1	-9.13124E0	-9.14218E0	4.91142E-3	9.3317E-2	2.7301E1	-3.26508E1	-3.26148E1	2.68364E1	2.37538E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.17822E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16298E-1	-7.98035E-1	-9.13126E0	-9.14207E0	4.98295E-3	9.32932E-2	2.72751E1	-3.26651E1	-3.26627E1	2.68082E1	2.3764E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.17918E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.16178E-1	-7.98154E-1	-9.13143E0	-9.14187E0	5.07832E-3	9.31978E-2	2.72793E1	-3.26837E1	-3.26302E1	2.68192E1	2.37538E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.1858E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.16393E-1	-7.98154E-1	-9.13122E0	-9.14202E0	5.19753E-3	9.32693E-2	2.72974E1	-3.26349E1	-3.26166E1	2.6819E1	2.37641E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.16313E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09734E0	-8.16417E-1	-7.98464E-1	-9.13148E0	-9.14185E0	5.24521E-3	9.33409E-2	2.72967E1	-3.26891E1	-3.26104E1	2.6789E1	2.37538E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.15699E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09704E0	-8.16536E-1	-7.97939E-1	-9.1315E0	-9.14202E0	5.03063E-3	9.35555E-2	2.73472E1	-3.26801E1	-3.26675E1	2.68166E1	2.37641E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.16501E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.16154E-1	-7.98154E-1	-9.13107E0	-9.14204E0	5.126E-3	9.34839E-2	2.7301E1	-3.26561E1	-3.26408E1	2.67949E1	2.37641E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.15376E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.16298E-1	-7.98202E-1	-9.13115E0	-9.14192E0	4.91142E-3	9.35316E-2	2.72769E1	-3.265E1	-3.26194E1	2.68381E1	2.3764E-9	2.51739E-3	2.51739E-3	6.34518E-3	2.16436E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09688E0	-8.16083E-1	-7.98082E-1	-9.1311E0	-9.14202E0	5.14984E-3	9.35078E-2	2.73303E1	-3.26729E1	-3.26146E1	2.6804E1	2.37538E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.16878E-2
1.8E1	6.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.15845E-1	-7.98249E-1	-9.13117E0	-9.14235E0	5.14984E-3	9.37939E-2	2.72769E1	-3.26452E1	-3.26549E1	2.68128E1	2.37641E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17255E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.15845E-1	-7.98273E-1	-9.13117E0	-9.14192E0	5.126E-3	9.33647E-2	2.73411E1	-3.2662E1	-3.26231E1	2.67854E1	2.37435E-9	2.52867E-3	2.52867E-3	6.32386E-3	2.16501E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09719E0	-8.15701E-1	-7.98512E-1	-9.13103E0	-9.14178E0	5.22137E-3	9.34839E-2	2.73345E1	-3.26404E1	-3.26236E1	2.68178E1	2.37538E-9	2.52923E-3	2.52923E-3	6.29665E-3	2.16067E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09673E0	-8.16059E-1	-7.98464E-1	-9.13157E0	-9.14171E0	5.19753E-3	9.3317E-2	2.73033E1	-3.26638E1	-3.26413E1	2.6822E1	2.37848E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.15563E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16083E-1	-7.98416E-1	-9.13119E0	-9.1418E0	5.34058E-3	9.35555E-2	2.73234E1	-3.26673E1	-3.26343E1	2.68088E1	2.3764E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.17918E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.15988E-1	-7.98249E-1	-9.131E0	-9.14204E0	5.29289E-3	9.35316E-2	2.72941E1	-3.26615E1	-3.26278E1	2.6789E1	2.37538E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.17176E-2