[Scan]
initial_time=2015-12-18T19:42:59
final_time=2015-12-18T19:43:19
ip_count=19
run=1020
dataset=0
scan=75
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.0885E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.36196E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.97805E-9
ql3_vset=
ql3_vmon=-9.13079E0
ql3_imon=5.08976E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=-9.14454E-11
mult1=-9.68019E-9
mult2=-2.67669E-9
rf_tmon=-5.66601E-3
rf_agc=3.2162E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=1.69779E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.43E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.97271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04976E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53644E1
cs_ef1b_imon=2.83169E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05136E1
cs_ea1_imon=2.58715E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36607E0
lens1_imon=2.61051E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6484E1
os_ef1alow_imon=2.98461E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03855E1
cs_ea2_imon=1.54267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84255E1
cs_ef1a_imon=2.92483E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.2613E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11338E1
os_restr1_imon=4.32466E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.3762E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63774E1
os_ef1bup_imon=3.07044E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=1.19368E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02E1
cs_anode1_imon=2.93039E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.23187E-8
tplens_vset=1.4E-1
tplens_vmon=1.59837E0
tplens_imon=-2.45796E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26669E1
iondef3_imon=1.48215E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98402E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=4.00554E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25741E0
ionrepsh_imon=1.74796E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.17622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.11145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44441E0
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00449E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.19104E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09163E0
os_ef2alow_imon=-2.83523E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71746E-1
os_ef2bup_imon=-5.5077E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.40685E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.23534E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72829E1
iondef1_imon=1.08078E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.0753E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.04869E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.64223E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10755E0
cs_ionaccel_imon=-1.82393E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.4716E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55977E1
einzel_imon=7.64614E-6
window_vset=0.0E0
window_vmon=1.80037E-1
window_imon=-1.01419E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39188E-4
mask2_vset=0.0E0
mask2_vmon=-1.86083E1
mask2_imon=-8.02203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.14803E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.29857E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.38163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32878E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.41279E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06628E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61288E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.96663E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62302E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62403E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.8082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79651E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.02756E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36893E-1
cs_fil2_imon=-2.50122E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.78641E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22005E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.16067E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.62478E-1
res40_imon=-2.67189E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16321E-1	-7.98488E-1	-9.13124E0	-9.14156E0	5.14984E-3	9.32932E-2	2.73184E1	-3.26915E1	-3.26712E1	2.68154E1					
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16202E-1	-7.98249E-1	-9.13143E0	-9.14195E0	5.43594E-3	9.34124E-2	2.73126E1	-3.26622E1	-3.26279E1	2.68142E1	2.37638E-9	2.52131E-3	2.52131E-3	6.33919E-3	2.17829E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16393E-1	-7.98321E-1	-9.13141E0	-9.14154E0	5.55515E-3	9.3317E-2	2.73468E1	-3.27019E1	-3.26254E1	2.6807E1	2.37538E-9	2.51952E-3	2.51952E-3	6.29035E-3	2.17618E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16536E-1	-7.98178E-1	-9.13134E0	-9.14147E0	5.24521E-3	9.32693E-2	2.72985E1	-3.26416E1	-3.26254E1	2.68146E1	2.37638E-9	2.52553E-3	2.52553E-3	6.31269E-3	2.16374E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16512E-1	-7.98464E-1	-9.13124E0	-9.14183E0	5.34058E-3	9.31978E-2	2.72408E1	-3.27053E1	-3.25894E1	2.68288E1	2.37641E-9	2.52977E-3	2.52977E-3	6.31837E-3	2.16689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16631E-1	-7.98512E-1	-9.13134E0	-9.1419E0	5.36442E-3	9.34601E-2	2.72871E1	-3.26639E1	-3.26446E1	2.67944E1	2.37538E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.15938E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16369E-1	-7.98321E-1	-9.13134E0	-9.1418E0	5.45979E-3	9.3317E-2	2.72986E1	-3.26826E1	-3.26101E1	2.68088E1	2.37641E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16178E-1	-7.98154E-1	-9.13136E0	-9.14178E0	5.55515E-3	9.34124E-2	2.73153E1	-3.26933E1	-3.26236E1	2.68082E1	2.37741E-9	2.52923E-3	2.52923E-3	6.32356E-3	2.18477E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16488E-1	-7.98202E-1	-9.13131E0	-9.14154E0	5.62668E-3	9.30309E-2	2.72979E1	-3.26603E1	-3.2635E1	2.68274E1	2.37538E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.1575E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16607E-1	-7.98035E-1	-9.131E0	-9.14164E0	5.48363E-3	9.34601E-2	2.73219E1	-3.26482E1	-3.26332E1	2.6789E1	2.37641E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.16689E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16703E-1	-7.98035E-1	-9.13119E0	-9.14168E0	5.07832E-3	9.31978E-2	2.73153E1	-3.26446E1	-3.26296E1	2.68262E1	2.37538E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.16501E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16846E-1	-7.98059E-1	-9.13117E0	-9.14164E0	5.05447E-3	9.32693E-2	2.72868E1	-3.26449E1	-3.26101E1	2.67992E1	2.37745E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.16689E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16798E-1	-7.98178E-1	-9.1311E0	-9.14171E0	5.57899E-3	9.36031E-2	2.73405E1	-3.26437E1	-3.26608E1	2.68036E1	2.37538E-9	2.52061E-3	2.52061E-3	6.29128E-3	2.16067E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16512E-1	-7.98202E-1	-9.13105E0	-9.14197E0	5.26905E-3	9.34362E-2	2.73189E1	-3.26771E1	-3.26176E1	2.68064E1	2.37741E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.18104E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16321E-1	-7.98273E-1	-9.13129E0	-9.14192E0	5.26905E-3	9.35555E-2	2.73207E1	-3.2641E1	-3.26669E1	2.67956E1	2.37641E-9	2.52867E-3	2.52867E-3	6.31837E-3	2.16501E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.1625E-1	-7.98059E-1	-9.13112E0	-9.14152E0	5.29289E-3	9.36508E-2	2.73284E1	-3.26926E1	-3.26163E1	2.67827E1	2.37538E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.16501E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16202E-1	-7.97915E-1	-9.13126E0	-9.14173E0	5.57899E-3	9.32932E-2	2.73238E1	-3.26572E1	-3.2636E1	2.67845E1	2.37734E-9	2.51679E-3	2.51679E-3	6.34385E-3	2.1667E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16035E-1	-7.97963E-1	-9.1311E0	-9.14166E0	5.45979E-3	9.377E-2	2.73502E1	-3.26927E1	-3.26116E1	2.67677E1	2.37645E-9	2.52521E-3	2.52521E-3	6.33592E-3	2.16639E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.15868E-1	-7.9813E-1	-9.13088E0	-9.14187E0	5.57899E-3	9.34839E-2	2.73204E1	-3.27015E1	-3.26319E1	2.6813E1	2.37641E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.16878E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16131E-1	-7.98082E-1	-9.13079E0	-9.14216E0	5.31673E-3	9.36508E-2	2.72829E1	-3.26482E1	-3.26669E1	2.6795E1	2.37538E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.16067E-2