[Scan]
initial_time=2015-12-18T19:43:26
final_time=2015-12-18T19:43:46
ip_count=19
run=1020
dataset=0
scan=76
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09665E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-8.15964E-1
ql1_imon=1.35921E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.99486E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=4.56834E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=-3.27945E-11
mult1=-8.27144E-9
mult2=-2.60683E-9
rf_tmon=-3.05843E-3
rf_agc=3.39705E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=1.66941E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63973E0
bslens_imon=2.62019E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19798E1
lens5a_imon=1.97142E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04894E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=2.84251E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.0218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0478E1
cs_ea1_imon=2.58334E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40745E0
lens1_imon=2.67161E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.96108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.55527E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.93188E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.28414E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.30824E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15367E1
os_ea1_imon=2.36626E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21047E0
cs_ionrep_imon=1.18834E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.9367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02067E1
cs_anode1_imon=2.93765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.2622E-8
tplens_vset=1.4E-1
tplens_vmon=1.59368E0
tplens_imon=-3.98992E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26543E1
iondef3_imon=1.49944E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.56703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98239E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.93906E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27597E0
ionrepsh_imon=1.74443E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33566E1
lens5b_imon=2.19547E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41616E0
os_ea2_imon=-7.18541E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71558E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.74564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.40076E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.31618E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.07815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.06972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.08297E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.69225E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47042E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=1.36253E-1
window_imon=-1.21756E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.86608E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.43546E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.58333E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.23711E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25646E0
defgridb_imon=6.02136E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33354E1
os_fil1_imon=9.41771E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07095E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62096E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30966E1
cs_fil1_imon=9.96468E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62684E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62583E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17372E-2
os_fil2_imon=-2.98432E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.70084E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.59842E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38845E-1
cs_fil2_imon=-2.91825E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22082E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.17066E-2
chamber_ion_pmon=2.37641E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.62295E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.16131E-1	-7.98345E-1	-9.13115E0	-9.14202E0	5.53131E-3	9.34124E-2	2.7321E1	-3.2698E1	-3.26354E1	2.67944E1	2.37745E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.1839E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09696E0	-8.16131E-1	-7.98392E-1	-9.13115E0	-9.14195E0	5.43594E-3	9.31263E-2	2.73155E1	-3.26664E1	-3.26242E1	2.68424E1	2.37641E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.15938E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16154E-1	-7.98202E-1	-9.13117E0	-9.14185E0	5.24521E-3	9.34362E-2	2.72929E1	-3.26625E1	-3.26405E1	2.67873E1	2.37538E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.16952E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16274E-1	-7.98726E-1	-9.13146E0	-9.14178E0	5.65052E-3	9.34839E-2	2.73246E1	-3.26555E1	-3.2626E1	2.68166E1	2.37538E-9	2.52448E-3	2.52448E-3	6.32328E-3	2.17829E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16083E-1	-7.98345E-1	-9.13112E0	-9.14204E0	5.72205E-3	9.36985E-2	2.73369E1	-3.26536E1	-3.2608E1	2.68142E1	2.37538E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.17361E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.16083E-1	-7.97939E-1	-9.13136E0	-9.14202E0	5.57899E-3	9.38654E-2	2.73216E1	-3.26649E1	-3.26313E1	2.6836E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.16501E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16298E-1	-7.97915E-1	-9.13131E0	-9.14187E0	5.79357E-3	9.40084E-2	2.73015E1	-3.26428E1	-3.26272E1	2.68106E1	2.37538E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.16252E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16274E-1	-7.9813E-1	-9.13122E0	-9.14176E0	5.53131E-3	9.37462E-2	2.73393E1	-3.26693E1	-3.2596E1	2.68286E1	2.37641E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.15563E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16059E-1	-7.98225E-1	-9.1311E0	-9.14207E0	5.55515E-3	9.37939E-2	2.72939E1	-3.26531E1	-3.26172E1	2.68214E1	2.37641E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.16313E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16131E-1	-7.98488E-1	-9.13107E0	-9.14202E0	5.57899E-3	9.39846E-2	2.73243E1	-3.27077E1	-3.26266E1	2.68094E1	2.37741E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.17918E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16107E-1	-7.98416E-1	-9.13112E0	-9.14218E0	5.67436E-3	9.35793E-2	2.73195E1	-3.26452E1	-3.26783E1	2.68182E1	2.37538E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.16878E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16274E-1	-7.9844E-1	-9.13136E0	-9.14199E0	5.4121E-3	9.39608E-2	2.73051E1	-3.26723E1	-3.26543E1	2.68064E1	2.37538E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.16313E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16083E-1	-7.98202E-1	-9.13124E0	-9.14168E0	5.76973E-3	9.3174E-2	2.73051E1	-3.26621E1	-3.26428E1	2.68146E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.16501E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16202E-1	-7.98273E-1	-9.13126E0	-9.14199E0	5.45979E-3	9.34124E-2	2.73287E1	-3.26797E1	-3.26455E1	2.68232E1	2.37741E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.15883E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.16131E-1	-7.98368E-1	-9.13112E0	-9.14178E0	5.8651E-3	9.36985E-2	2.73021E1	-3.26585E1	-3.2626E1	2.68274E1	2.37641E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.17066E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16369E-1	-7.98249E-1	-9.13105E0	-9.14195E0	5.84126E-3	9.35793E-2	2.73399E1	-3.27027E1	-3.25977E1	2.6822E1	2.37641E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16125E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16441E-1	-7.98011E-1	-9.13126E0	-9.1418E0	5.48363E-3	9.34124E-2	2.73131E1	-3.26836E1	-3.26425E1	2.68046E1	2.37538E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.17547E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.1625E-1	-7.97915E-1	-9.13119E0	-9.14185E0	5.36442E-3	9.35078E-2	2.73234E1	-3.26596E1	-3.26496E1	2.68267E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17066E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0968E0	-8.16131E-1	-7.98154E-1	-9.13122E0	-9.14202E0	5.43594E-3	9.34124E-2	2.7298E1	-3.26785E1	-3.26201E1	2.67908E1	2.3764E-9	2.52061E-3	2.52061E-3	6.34518E-3	2.16067E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09665E0	-8.15964E-1	-7.98154E-1	-9.13117E0	-9.14207E0	5.8651E-3	9.35316E-2	2.73189E1	-3.26554E1	-3.26543E1	2.67902E1	2.37641E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.17066E-2