[Scan]
initial_time=2015-12-18T19:44:20
final_time=2015-12-18T19:44:39
ip_count=19
run=1020
dataset=0
scan=78
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09673E0
qbias_imon=-1.08836E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.35946E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.97245E-9
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=4.776E-10
ql4_vset=
ql4_vmon=-9.14242E0
ql4_imon=-3.54171E-11
mult1=-8.94571E-9
mult2=-2.78049E-9
rf_tmon=-4.71671E-3
rf_agc=3.32615E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.67537E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67215E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19947E1
lens5a_imon=1.9719E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.04952E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53643E1
cs_ef1b_imon=2.83993E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.01941E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04838E1
cs_ea1_imon=2.57428E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37616E0
lens1_imon=2.68916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64633E1
os_ef1alow_imon=2.97354E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04237E1
cs_ea2_imon=1.52488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.93911E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.28448E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11217E1
os_restr1_imon=4.31151E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.3497E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63691E1
os_ef1bup_imon=3.08058E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=1.19611E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01796E1
cs_anode1_imon=2.94435E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=3.25017E-8
tplens_vset=1.4E-1
tplens_vmon=1.58255E0
tplens_imon=-3.9668E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.57283E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.03789E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=1.76317E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74751E1
cs_ef2b_imon=3.121E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45458E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00381E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71301E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0452E0
os_ef2alow_imon=-2.76144E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9077E-1
os_ef2bup_imon=-5.36628E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.41254E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.30072E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02021E1
cs_anode2_imon=2.24635E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7269E1
iondef1_imon=1.08291E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.06407E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.12667E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.71282E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.137E0
cs_ionaccel_imon=-1.76218E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47062E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56511E1
einzel_imon=7.61673E-6
window_vset=0.0E0
window_vmon=1.71438E-1
window_imon=-9.91204E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39017E-4
mask2_vset=0.0E0
mask2_vmon=-1.8597E1
mask2_imon=-7.03025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.1557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.51041E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.95022E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.43505E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07192E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6199E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.95403E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62721E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63227E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03502E-2
os_fil2_imon=-2.70617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0282E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.82083E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37316E-1
cs_fil2_imon=-2.63755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.11661E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22247E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.16991E-2
chamber_ion_pmon=2.3764E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40041E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.04493E-1
res40_imon=-2.52566E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0968E0	-8.15916E-1	-7.98249E-1	-9.13129E0	-9.14202E0	5.4121E-3	9.30071E-2	2.73145E1	-3.2675E1	-3.26408E1	2.68221E1	2.37538E-9	2.51915E-3	2.51915E-3	6.29624E-3	2.15803E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.15916E-1	-7.97915E-1	-9.13119E0	-9.14204E0	5.50747E-3	9.3174E-2	2.73068E1	-3.26886E1	-3.26324E1	2.68036E1	2.37538E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.16436E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16131E-1	-7.98106E-1	-9.13136E0	-9.14221E0	5.76973E-3	9.33409E-2	2.73541E1	-3.26383E1	-3.26187E1	2.68322E1	2.37538E-9	2.51886E-3	2.51886E-3	6.30221E-3	2.15957E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.15892E-1	-7.97868E-1	-9.13129E0	-9.14202E0	5.72205E-3	9.33409E-2	2.7308E1	-3.26828E1	-3.26318E1	2.68184E1	2.37645E-9	2.51271E-3	2.51271E-3	6.33021E-3	2.16443E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.15892E-1	-7.97987E-1	-9.13107E0	-9.14183E0	5.76973E-3	9.33647E-2	2.73219E1	-3.26671E1	-3.26202E1	2.67966E1	2.37538E-9	2.52553E-3	2.52553E-3	6.32328E-3	2.17646E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.15797E-1	-7.97677E-1	-9.13117E0	-9.14218E0	5.55515E-3	9.31263E-2	2.72979E1	-3.26633E1	-3.26344E1	2.6798E1	2.37439E-9	2.52342E-3	2.52342E-3	6.33388E-3	2.17829E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.15868E-1	-7.9782E-1	-9.13129E0	-9.14192E0	5.29289E-3	9.32693E-2	2.73021E1	-3.26753E1	-3.26182E1	2.68178E1	2.37538E-9	2.51826E-3	2.51826E-3	6.3074E-3	2.16878E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.15797E-1	-7.98249E-1	-9.13122E0	-9.14216E0	5.29289E-3	9.32217E-2	2.72985E1	-3.26831E1	-3.26026E1	2.68157E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16035E-1	-7.97987E-1	-9.13138E0	-9.14204E0	5.48363E-3	9.33886E-2	2.72696E1	-3.26627E1	-3.26248E1	2.6802E1	2.37741E-9	2.52276E-3	2.52276E-3	6.28592E-3	2.17361E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.15964E-1	-7.9782E-1	-9.13107E0	-9.14226E0	5.53131E-3	9.3317E-2	2.73451E1	-3.2655E1	-3.26596E1	2.67902E1	2.37749E-9	2.52585E-3	2.52585E-3	6.29624E-3	2.16952E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09688E0	-8.16154E-1	-7.97939E-1	-9.13093E0	-9.14199E0	5.74589E-3	9.34124E-2	2.72895E1	-3.26572E1	-3.26385E1	2.68076E1	2.37737E-9	2.51919E-3	2.51919E-3	6.3445E-3	2.17646E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.16035E-1	-7.98225E-1	-9.13105E0	-9.1423E0	5.60284E-3	9.32217E-2	2.73003E1	-3.26741E1	-3.2611E1	2.68209E1	2.37645E-9	2.51952E-3	2.51952E-3	6.3074E-3	2.16639E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.16107E-1	-7.98082E-1	-9.13105E0	-9.14216E0	5.57899E-3	9.33886E-2	2.73417E1	-3.26759E1	-3.26266E1	2.68101E1	2.37538E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.16436E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.16011E-1	-7.9813E-1	-9.13124E0	-9.14214E0	5.57899E-3	9.33886E-2	2.73755E1	-3.2678E1	-3.26487E1	2.67986E1	2.37643E-9	2.52585E-3	2.52585E-3	6.32418E-3	2.16952E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09665E0	-8.15916E-1	-7.97987E-1	-9.13124E0	-9.14183E0	5.60284E-3	9.32693E-2	2.74114E1	-3.2775E1	-3.2611E1	2.6792E1	2.37959E-9	2.52139E-3	2.52139E-3	6.29067E-3	2.17529E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.16035E-1	-7.98345E-1	-9.13107E0	-9.14204E0	5.53131E-3	9.30548E-2	2.73442E1	-3.26488E1	-3.26368E1	2.68232E1	2.37641E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.1839E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09665E0	-8.1625E-1	-7.9844E-1	-9.131E0	-9.14209E0	5.29289E-3	9.34839E-2	2.72962E1	-3.26685E1	-3.26685E1	2.68184E1	2.37538E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.17822E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16154E-1	-7.97963E-1	-9.13117E0	-9.14178E0	4.81606E-3	9.30786E-2	2.72672E1	-3.27107E1	-3.26554E1	2.68154E1	2.3764E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.17176E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09657E0	-8.15892E-1	-7.97844E-1	-9.13084E0	-9.14204E0	5.05447E-3	9.30071E-2	2.73281E1	-3.26938E1	-3.25983E1	2.68209E1	2.37538E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.17633E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09673E0	-8.16226E-1	-7.98082E-1	-9.13098E0	-9.14242E0	5.03063E-3	9.33886E-2	2.7269E1	-3.26518E1	-3.26176E1	2.6789E1	2.3764E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.16991E-2