[Scan]
initial_time=2015-12-18T19:45:14
final_time=2015-12-18T19:45:33
ip_count=19
run=1020
dataset=0
scan=80
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.15558E-1
ql1_imon=1.35474E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.94831E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=4.18937E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-3.00407E-11
mult1=-9.02999E-9
mult2=-2.57888E-9
rf_tmon=-5.55185E-3
rf_agc=3.18796E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.69652E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67338E0
bslens_imon=2.68848E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=1.97584E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05021E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5434E1
cs_ef1b_imon=2.88643E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02066E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04785E1
cs_ea1_imon=2.56897E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37662E0
lens1_imon=2.57898E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65409E1
os_ef1alow_imon=2.96123E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03812E1
cs_ea2_imon=1.54635E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83654E1
cs_ef1a_imon=2.9065E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.29843E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11427E1
os_restr1_imon=4.33022E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15208E1
os_ea1_imon=2.36335E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6401E1
os_ef1bup_imon=3.06888E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25311E0
cs_ionrep_imon=1.17953E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91849E2
cs_nozzle_imon=1.93311E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.93326E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.2747E-8
tplens_vset=1.4E-1
tplens_vmon=1.60392E0
tplens_imon=-3.10611E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26338E1
iondef3_imon=1.50742E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.58955E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98242E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.04345E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27136E0
ionrepsh_imon=1.77083E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33378E1
lens5b_imon=2.17537E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74339E1
cs_ef2b_imon=3.13395E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39607E0
os_ea2_imon=-8.64197E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06207E2
lens4b_imon=2.00678E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71602E1
cs_ef2a_imon=3.19964E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-3.08284E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09249E-1
os_ef2bup_imon=-5.80135E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1089E1
os_restr2_imon=3.39547E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30172E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01764E1
cs_anode2_imon=2.20893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.08645E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67884E1
iondef4_imon=1.10389E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.14456E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.73272E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-2.03679E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02E2
cs_ionfocb_imon=1.46752E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.98584E-6
window_vset=0.0E0
window_vmon=9.51832E-2
window_imon=-9.36001E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82572E2
mask1_imon=2.38482E-4
mask2_vset=0.0E0
mask2_vmon=-1.85898E1
mask2_imon=-3.09586E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.22667E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.42975E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=6.98942E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30137E0
defgridb_imon=5.73625E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.41406E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07532E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62518E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30863E1
cs_fil1_imon=9.93101E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6146E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63102E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90927E-2
os_fil2_imon=-2.92838E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.37549E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37736E-1
cs_fil2_imon=-2.69525E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.32132E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22103E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.16313E-2
chamber_ion_pmon=2.37848E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40098E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.7583E-1
res40_imon=-2.91255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.16154E-1	-7.97844E-1	-9.13117E0	-9.14149E0	5.31673E-3	9.34362E-2	2.73183E1	-3.26146E1	-3.259E1	2.6828E1	2.37538E-9	2.52236E-3	2.52236E-3	6.29816E-3	2.17054E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16131E-1	-7.97939E-1	-9.13124E0	-9.14168E0	5.36442E-3	9.33409E-2	2.73112E1	-3.26909E1	-3.26138E1	2.68282E1	2.37741E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.17176E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16393E-1	-7.9782E-1	-9.13119E0	-9.14187E0	5.03063E-3	9.33647E-2	2.73154E1	-3.26379E1	-3.26585E1	2.68071E1	2.37749E-9	2.51248E-3	2.51248E-3	6.3074E-3	2.17145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16202E-1	-7.98011E-1	-9.13098E0	-9.14185E0	5.14984E-3	9.32932E-2	2.73225E1	-3.26758E1	-3.26324E1	2.68339E1	2.37538E-9	2.52826E-3	2.52826E-3	6.29738E-3	2.17578E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.15988E-1	-7.97844E-1	-9.13115E0	-9.14156E0	4.98295E-3	9.33647E-2	2.72921E1	-3.26572E1	-3.26306E1	2.67974E1	2.37636E-9	2.52301E-3	2.52301E-3	6.3074E-3	2.17921E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.15821E-1	-7.97915E-1	-9.13119E0	-9.14152E0	5.19753E-3	9.33409E-2	2.73181E1	-3.26573E1	-3.26183E1	2.68088E1	2.37652E-9	2.51588E-3	2.51588E-3	6.36199E-3	2.18325E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.15749E-1	-7.97677E-1	-9.13146E0	-9.14161E0	5.36442E-3	9.34839E-2	2.73213E1	-3.26633E1	-3.26158E1	2.68082E1	2.37538E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.16806E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16011E-1	-7.97772E-1	-9.13131E0	-9.14178E0	5.48363E-3	9.36508E-2	2.72998E1	-3.26549E1	-3.26172E1	2.68232E1	2.37538E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.16991E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16035E-1	-7.97939E-1	-9.13141E0	-9.14183E0	5.34058E-3	9.33647E-2	2.72843E1	-3.26585E1	-3.26205E1	2.67992E1	2.37538E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.17633E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.16202E-1	-7.97939E-1	-9.13148E0	-9.14166E0	5.22137E-3	9.3174E-2	2.72774E1	-3.26496E1	-3.26313E1	2.68058E1	2.37538E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.17066E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16202E-1	-7.9813E-1	-9.13134E0	-9.14185E0	5.19753E-3	9.33886E-2	2.73393E1	-3.26651E1	-3.26476E1	2.68027E1	2.37538E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.18104E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.1594E-1	-7.9813E-1	-9.13134E0	-9.14183E0	5.4121E-3	9.34362E-2	2.73326E1	-3.26787E1	-3.26591E1	2.6837E1	2.37538E-9	2.51581E-3	2.51581E-3	6.35223E-3	2.17529E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.15797E-1	-7.98011E-1	-9.13153E0	-9.14197E0	5.19753E-3	9.34839E-2	2.72952E1	-3.26735E1	-3.26492E1	2.67752E1	2.37538E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.17822E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16011E-1	-7.98011E-1	-9.13129E0	-9.14192E0	5.36442E-3	9.35555E-2	2.73201E1	-3.26392E1	-3.26368E1	2.68148E1	2.37538E-9	2.51814E-3	2.51814E-3	6.3074E-3	2.17282E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.15892E-1	-7.98082E-1	-9.13124E0	-9.14192E0	5.126E-3	9.3317E-2	2.73088E1	-3.2667E1	-3.26536E1	2.68232E1	2.37538E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.17915E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.15988E-1	-7.98297E-1	-9.13112E0	-9.14173E0	5.34058E-3	9.33886E-2	2.73033E1	-3.26488E1	-3.26164E1	2.67943E1	2.37641E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.18011E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16107E-1	-7.98178E-1	-9.13107E0	-9.14214E0	5.19753E-3	9.35555E-2	2.73271E1	-3.2644E1	-3.26277E1	2.68112E1	2.37641E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.1839E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.15988E-1	-7.98178E-1	-9.13105E0	-9.14183E0	5.57899E-3	9.33647E-2	2.72997E1	-3.26711E1	-3.26422E1	2.6819E1	2.37538E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.17361E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16083E-1	-7.98225E-1	-9.13136E0	-9.14195E0	5.38826E-3	9.32455E-2	2.73141E1	-3.26609E1	-3.26458E1	2.6801E1	2.37538E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.17633E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.15558E-1	-7.98154E-1	-9.13157E0	-9.14192E0	5.53131E-3	9.34124E-2	2.73237E1	-3.26723E1	-3.26338E1	2.67884E1	2.37848E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.16313E-2