[Scan]
initial_time=2015-12-18T19:45:41
final_time=2015-12-18T19:46:00
ip_count=19
run=1020
dataset=0
scan=81
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.15868E-1
ql1_imon=1.34871E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=1.98691E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=3.33571E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=-5.2619E-11
mult1=-9.70814E-9
mult2=-2.74698E-9
rf_tmon=-4.06052E-3
rf_agc=3.41256E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.68617E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62921E0
bslens_imon=2.50685E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20042E1
lens5a_imon=1.97454E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54142E1
cs_ef1b_imon=2.86506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.01916E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0493E1
cs_ea1_imon=2.56445E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33142E0
lens1_imon=2.48252E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64695E1
os_ef1alow_imon=2.9509E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04252E1
cs_ea2_imon=1.55357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84145E1
cs_ef1a_imon=2.9429E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.30581E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11633E1
os_restr1_imon=4.31007E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15305E1
os_ea1_imon=2.36178E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6389E1
os_ef1bup_imon=3.0767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29092E0
cs_ionrep_imon=1.17987E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01589E1
cs_anode1_imon=2.93595E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=3.27828E-8
tplens_vset=1.4E-1
tplens_vmon=1.60783E0
tplens_imon=-5.80017E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26196E1
iondef3_imon=1.4969E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26556E1
iondef2_imon=1.55461E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.01778E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28396E0
ionrepsh_imon=1.77118E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.16781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74762E1
cs_ef2b_imon=3.1323E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42823E0
os_ea2_imon=-6.11303E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00272E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71756E1
cs_ef2a_imon=3.19034E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05282E0
os_ef2alow_imon=-2.89431E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09973E-1
os_ef2bup_imon=-5.58763E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10857E1
os_restr2_imon=3.42005E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.22596E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.08497E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.0972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.09684E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.7514E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-1.98726E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56695E1
einzel_imon=7.80252E-6
window_vset=0.0E0
window_vmon=1.11111E-1
window_imon=-1.29221E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.38893E-4
mask2_vset=0.0E0
mask2_vmon=-1.86309E1
mask2_imon=-6.49292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.34921E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.53577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.15454E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47901E0
defgridb_imon=6.05953E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33355E1
os_fil1_imon=9.41042E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0657E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62449E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=9.96043E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6353E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63424E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94658E-2
os_fil2_imon=-2.90087E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80231E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.30713E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38516E-1
cs_fil2_imon=-1.97414E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08409E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22291E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.16991E-2
chamber_ion_pmon=2.37741E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.35459E-1
res40_imon=-2.77962E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.15988E-1	-7.9782E-1	-9.13112E0	-9.14209E0	5.4121E-3	9.31025E-2	2.72991E1	-3.27083E1	-3.26332E1	2.67842E1	2.37638E-9	2.51603E-3	2.51603E-3	6.31269E-3	2.16555E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.15964E-1	-7.97987E-1	-9.13107E0	-9.14187E0	5.34058E-3	9.32932E-2	2.73201E1	-3.26452E1	-3.26332E1	2.6816E1	2.37538E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.15699E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.15988E-1	-7.97844E-1	-9.13088E0	-9.14159E0	5.26905E-3	9.31263E-2	2.73222E1	-3.26607E1	-3.26106E1	2.68009E1	2.37538E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.16125E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.15821E-1	-7.97963E-1	-9.13105E0	-9.14178E0	5.72205E-3	9.35793E-2	2.73086E1	-3.2652E1	-3.26579E1	2.68154E1	2.37636E-9	2.52717E-3	2.52717E-3	6.33341E-3	2.17742E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.15964E-1	-7.98178E-1	-9.131E0	-9.14173E0	5.31673E-3	9.35793E-2	2.72676E1	-3.26298E1	-3.26667E1	2.68011E1	2.37538E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.16991E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.15964E-1	-7.98464E-1	-9.13129E0	-9.14176E0	5.45979E-3	9.32932E-2	2.72964E1	-3.26671E1	-3.26287E1	2.68136E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.16178E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16107E-1	-7.98225E-1	-9.13107E0	-9.14168E0	5.29289E-3	9.3174E-2	2.73039E1	-3.26435E1	-3.26241E1	2.68213E1	2.37631E-9	2.52581E-3	2.52581E-3	6.32222E-3	2.17671E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16107E-1	-7.98249E-1	-9.13098E0	-9.14171E0	5.19753E-3	9.30786E-2	2.73435E1	-3.2641E1	-3.26218E1	2.67816E1	2.37643E-9	2.51915E-3	2.51915E-3	6.29624E-3	2.17145E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.1625E-1	-7.98011E-1	-9.13117E0	-9.14199E0	5.26905E-3	9.31501E-2	2.73027E1	-3.26455E1	-3.26166E1	2.67884E1	2.37641E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.1575E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16107E-1	-7.98202E-1	-9.13134E0	-9.14195E0	5.03063E-3	9.32217E-2	2.72841E1	-3.26549E1	-3.26134E1	2.67902E1	2.37538E-9	2.51662E-3	2.51662E-3	6.34588E-3	2.16125E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.15845E-1	-7.98082E-1	-9.131E0	-9.14187E0	4.93526E-3	9.33886E-2	2.73628E1	-3.26903E1	-3.2635E1	2.68052E1	2.37538E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.17732E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16154E-1	-7.98035E-1	-9.13103E0	-9.14187E0	5.03063E-3	9.38177E-2	2.73293E1	-3.26779E1	-3.26343E1	2.68202E1	2.37643E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.17145E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16107E-1	-7.98035E-1	-9.1311E0	-9.14197E0	4.86374E-3	9.34839E-2	2.73231E1	-3.26579E1	-3.26422E1	2.68244E1	2.37538E-9	2.52131E-3	2.52131E-3	6.31798E-3	2.17464E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.15988E-1	-7.98059E-1	-9.13115E0	-9.14185E0	5.4121E-3	9.3627E-2	2.73006E1	-3.26305E1	-3.26461E1	2.68012E1	2.37538E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.16878E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.15845E-1	-7.98059E-1	-9.13129E0	-9.14202E0	5.29289E-3	9.33886E-2	2.72873E1	-3.26903E1	-3.26368E1	2.68367E1	2.37634E-9	2.51752E-3	2.51752E-3	6.32273E-3	2.15382E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16059E-1	-7.9782E-1	-9.13064E0	-9.14204E0	5.24521E-3	9.32693E-2	2.73316E1	-3.26809E1	-3.26372E1	2.68214E1	2.37429E-9	2.52222E-3	2.52222E-3	6.32483E-3	2.16313E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.15868E-1	-7.97844E-1	-9.131E0	-9.14199E0	5.65052E-3	9.30309E-2	2.73075E1	-3.26632E1	-3.26254E1	2.67984E1	2.37538E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.15883E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16226E-1	-7.98035E-1	-9.13134E0	-9.14192E0	5.19753E-3	9.31025E-2	2.73255E1	-3.26254E1	-3.26146E1	2.68172E1	2.37538E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.15563E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.15964E-1	-7.97915E-1	-9.13105E0	-9.14192E0	5.43594E-3	9.31978E-2	2.73086E1	-3.26596E1	-3.26673E1	2.68018E1	2.37538E-9	2.52707E-3	2.52707E-3	6.32356E-3	2.16252E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.15868E-1	-7.98273E-1	-9.13126E0	-9.14223E0	5.17368E-3	9.33409E-2	2.73016E1	-3.26556E1	-3.26196E1	2.68262E1	2.37741E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.16991E-2