[Scan]
initial_time=2015-12-18T19:47:01
final_time=2015-12-18T19:47:20
ip_count=19
run=1020
dataset=0
scan=84
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08739E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=1.35711E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.94552E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=4.28128E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-1.23024E-11
mult1=-9.25877E-9
mult2=-2.70264E-9
rf_tmon=-5.97243E-3
rf_agc=3.35619E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.66261E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62137E0
bslens_imon=2.54673E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19933E1
lens5a_imon=1.9593E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05023E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53908E1
cs_ef1b_imon=2.8585E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02037E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04915E1
cs_ea1_imon=2.5793E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38848E0
lens1_imon=2.65692E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64593E1
os_ef1alow_imon=2.98078E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03721E1
cs_ea2_imon=1.52075E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84593E1
cs_ef1a_imon=2.92349E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.30194E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10848E1
os_restr1_imon=4.30232E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15281E1
os_ea1_imon=2.33725E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63981E1
os_ef1bup_imon=3.09351E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26618E0
cs_ionrep_imon=1.19679E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93361E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01742E1
cs_anode1_imon=2.93928E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.29041E-8
tplens_vset=1.4E-1
tplens_vmon=1.57042E0
tplens_imon=-2.44728E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.48989E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.55821E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98375E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=4.02344E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28271E0
ionrepsh_imon=1.79475E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33903E1
lens5b_imon=2.17454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74813E1
cs_ef2b_imon=3.12912E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4437E0
os_ea2_imon=-7.80981E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06041E2
lens4b_imon=2.00557E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.17576E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08852E0
os_ef2alow_imon=-2.56429E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.605E-1
os_ef2bup_imon=-5.51655E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10634E1
os_restr2_imon=3.41811E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.3125E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.2574E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.07742E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.10036E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.19612E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.82762E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14361E0
cs_ionaccel_imon=-2.13467E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47186E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.58502E-6
window_vset=0.0E0
window_vmon=1.51372E-1
window_imon=-9.70655E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39047E-4
mask2_vset=0.0E0
mask2_vmon=-1.85952E1
mask2_imon=-7.90728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.28119E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.52823E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36065E0
defgridb_imon=5.91485E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33381E1
os_fil1_imon=9.41796E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0668E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62963E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30924E1
cs_fil1_imon=9.96074E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62898E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63848E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93719E-2
os_fil2_imon=-2.79891E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87061E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.02189E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37897E-1
cs_fil2_imon=-2.15631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1913E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22215E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.18201E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.13499E-1
res40_imon=-2.71851E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.15392E-1	-7.97796E-1	-9.13138E0	-9.14207E0	5.22137E-3	9.36747E-2	2.73234E1	-3.26661E1	-3.26443E1	2.68218E1	2.37538E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.18201E-2
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.15535E-1	-7.98011E-1	-9.13138E0	-9.14214E0	5.31673E-3	9.34839E-2	2.73247E1	-3.26701E1	-3.26358E1	2.67976E1	2.37538E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.17822E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.15678E-1	-7.98035E-1	-9.13138E0	-9.14207E0	5.4121E-3	9.32932E-2	2.73155E1	-3.26782E1	-3.26011E1	2.6816E1	2.37538E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.17529E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.15463E-1	-7.98368E-1	-9.13143E0	-9.14173E0	5.22137E-3	9.30071E-2	2.72837E1	-3.26591E1	-3.26444E1	2.68126E1	2.37538E-9	2.52301E-3	2.52301E-3	6.33341E-3	2.17205E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.15558E-1	-7.98321E-1	-9.13165E0	-9.14185E0	5.17368E-3	9.32693E-2	2.72763E1	-3.26548E1	-3.26383E1	2.68046E1	2.37643E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.16569E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.15654E-1	-7.98368E-1	-9.13105E0	-9.14178E0	5.34058E-3	9.3174E-2	2.73257E1	-3.27021E1	-3.26343E1	2.6783E1	2.37749E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.16569E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.15582E-1	-7.98011E-1	-9.1311E0	-9.14214E0	4.95911E-3	9.33886E-2	2.73063E1	-3.2635E1	-3.26332E1	2.68076E1	2.3764E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.17732E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.15654E-1	-7.98202E-1	-9.13112E0	-9.14204E0	4.93526E-3	9.32455E-2	2.73098E1	-3.26526E1	-3.26266E1	2.68208E1	2.37538E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16313E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.15678E-1	-7.97844E-1	-9.13141E0	-9.14211E0	5.05447E-3	9.33886E-2	2.73243E1	-3.26627E1	-3.26488E1	2.6807E1	2.3764E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.16991E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.15654E-1	-7.98154E-1	-9.13172E0	-9.14192E0	4.79221E-3	9.31263E-2	2.73273E1	-3.26512E1	-3.26272E1	2.681E1	2.37538E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.16313E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.15845E-1	-7.98321E-1	-9.13146E0	-9.14211E0	5.07832E-3	9.31978E-2	2.72845E1	-3.26225E1	-3.26207E1	2.6819E1	2.37538E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.17633E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.15773E-1	-7.98059E-1	-9.13167E0	-9.14202E0	5.29289E-3	9.3317E-2	2.73015E1	-3.26543E1	-3.26524E1	2.67998E1	2.37641E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.17444E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16107E-1	-7.98178E-1	-9.13188E0	-9.1419E0	5.00679E-3	9.35555E-2	2.73189E1	-3.26873E1	-3.26488E1	2.68172E1	2.37538E-9	2.52815E-3	2.52815E-3	6.31817E-3	2.16436E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.15892E-1	-7.97844E-1	-9.13167E0	-9.14197E0	4.88758E-3	9.32455E-2	2.73027E1	-3.26791E1	-3.2659E1	2.67992E1	2.37538E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.16689E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.15701E-1	-7.97987E-1	-9.13126E0	-9.14178E0	5.10216E-3	9.33886E-2	2.72757E1	-3.26482E1	-3.2635E1	2.68024E1	2.37741E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.18104E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16131E-1	-7.97868E-1	-9.13131E0	-9.14192E0	5.31673E-3	9.35316E-2	2.73189E1	-3.26512E1	-3.26428E1	2.68182E1	2.37641E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.16878E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.15821E-1	-7.97963E-1	-9.13141E0	-9.14195E0	5.10216E-3	9.35555E-2	2.73016E1	-3.2675E1	-3.26543E1	2.6796E1	2.37643E-9	2.5225E-3	2.5225E-3	6.33538E-3	2.17915E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.1594E-1	-7.97629E-1	-9.13131E0	-9.14197E0	5.24521E-3	9.36985E-2	2.73281E1	-3.26803E1	-3.26284E1	2.68041E1	2.37638E-9	2.51603E-3	2.51603E-3	6.30212E-3	2.17646E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.15892E-1	-7.97915E-1	-9.13138E0	-9.14185E0	4.91142E-3	9.36747E-2	2.73574E1	-3.26561E1	-3.25966E1	2.68235E1	2.3764E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.18104E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16154E-1	-7.97963E-1	-9.13126E0	-9.1419E0	4.95911E-3	9.37462E-2	2.73159E1	-3.26536E1	-3.2629E1	2.67788E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.18201E-2