[Scan]
initial_time=2015-12-18T19:47:54
final_time=2015-12-18T19:48:14
ip_count=19
run=1020
dataset=0
scan=86
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.1594E-1
ql1_imon=1.35296E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.9976E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=4.06015E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=-1.14918E-11
mult1=-9.47571E-9
mult2=-2.85652E-9
rf_tmon=-5.02269E-3
rf_agc=3.31203E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.70376E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64911E0
bslens_imon=2.47955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1973E1
lens5a_imon=1.95749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=2.84755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02018E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=2.57193E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38023E0
lens1_imon=2.53264E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.52002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=2.94522E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.3148E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.29635E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15353E1
os_ea1_imon=2.33762E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63888E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26921E0
cs_ionrep_imon=1.19687E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93261E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.93693E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.28783E-8
tplens_vset=1.4E-1
tplens_vmon=1.57418E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26691E1
iondef3_imon=1.48392E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26797E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.95372E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.281E0
ionrepsh_imon=1.77875E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34071E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44441E0
os_ea2_imon=-4.82936E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00354E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.40689E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.28973E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.24317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.07972E-5
iondef4_vset=2.691E1
iondef4_vmon=2.678E1
iondef4_imon=1.07224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.21729E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.84094E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.59774E-6
window_vset=0.0E0
window_vmon=1.55475E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.24359E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.52155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.03477E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48233E0
defgridb_imon=6.0225E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33372E1
os_fil1_imon=9.44084E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06044E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6323E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.9645E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61831E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63592E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98999E-2
os_fil2_imon=-2.88221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.93034E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.77409E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22299E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.1858E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.46388E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=186
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16107E-1	-7.98202E-1	-9.13146E0	-9.14226E0	5.6982E-3	9.33409E-2	2.72949E1	-3.26404E1	-3.26044E1	2.68214E1	2.3764E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.1829E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.15988E-1	-7.97868E-1	-9.13148E0	-9.14195E0	5.34058E-3	9.36508E-2	2.72943E1	-3.26705E1	-3.26464E1	2.67974E1	2.37538E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.17822E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.1594E-1	-7.97892E-1	-9.1316E0	-9.14207E0	4.95911E-3	9.38416E-2	2.73464E1	-3.26703E1	-3.26431E1	2.68082E1	2.37538E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.16689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-8.15868E-1	-7.97987E-1	-9.13148E0	-9.14187E0	5.07832E-3	9.36031E-2	2.73098E1	-3.26537E1	-3.26172E1	2.6836E1	2.3764E-9	2.52815E-3	2.52815E-3	6.3074E-3	2.16252E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-8.15773E-1	-7.97915E-1	-9.13143E0	-9.1419E0	4.95911E-3	9.35793E-2	2.73706E1	-3.26493E1	-3.26432E1	2.68106E1	2.3764E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.16621E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09696E0	-8.16011E-1	-7.97844E-1	-9.13167E0	-9.14187E0	4.74453E-3	9.3627E-2	2.72823E1	-3.2644E1	-3.26554E1	2.68268E1	2.37643E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.17915E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09657E0	-8.15678E-1	-7.97534E-1	-9.13165E0	-9.14209E0	4.98295E-3	9.33647E-2	2.73163E1	-3.26526E1	-3.26567E1	2.6825E1	2.37641E-9	2.52757E-3	2.52757E-3	6.29645E-3	2.16878E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.15463E-1	-7.97844E-1	-9.13155E0	-9.14187E0	5.05447E-3	9.35078E-2	2.72919E1	-3.26903E1	-3.2632E1	2.68118E1	2.37741E-9	2.52599E-3	2.52599E-3	6.33436E-3	2.17732E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.15463E-1	-7.97892E-1	-9.13095E0	-9.14211E0	5.17368E-3	9.33409E-2	2.73375E1	-3.26779E1	-3.26254E1	2.6822E1	2.37641E-9	2.52538E-3	2.52538E-3	6.29645E-3	2.16878E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.15797E-1	-7.98106E-1	-9.13134E0	-9.14187E0	5.14984E-3	9.33647E-2	2.73075E1	-3.26711E1	-3.262E1	2.68024E1	2.3764E-9	2.52923E-3	2.52923E-3	6.3074E-3	2.17361E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.15892E-1	-7.98178E-1	-9.13155E0	-9.14176E0	5.00679E-3	9.32693E-2	2.73285E1	-3.27149E1	-3.26675E1	2.67806E1	2.37641E-9	2.52757E-3	2.52757E-3	6.30192E-3	2.16501E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.15678E-1	-7.97868E-1	-9.13167E0	-9.14178E0	4.95911E-3	9.32455E-2	2.73157E1	-3.26472E1	-3.26178E1	2.67914E1	2.37538E-9	2.52538E-3	2.52538E-3	6.29645E-3	2.15938E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.15511E-1	-7.97868E-1	-9.13162E0	-9.14221E0	5.34058E-3	9.35316E-2	2.73303E1	-3.26717E1	-3.26518E1	2.68052E1	2.3764E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.15883E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.15392E-1	-7.98059E-1	-9.13153E0	-9.14207E0	5.22137E-3	9.33409E-2	2.72913E1	-3.26711E1	-3.2626E1	2.68256E1	2.37538E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.16313E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.15606E-1	-7.98154E-1	-9.1316E0	-9.1419E0	5.22137E-3	9.35316E-2	2.73069E1	-3.26591E1	-3.2653E1	2.68118E1	2.37538E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.1575E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.15892E-1	-7.98106E-1	-9.13157E0	-9.14178E0	5.29289E-3	9.34124E-2	2.72898E1	-3.26773E1	-3.26213E1	2.68146E1	2.37641E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.16501E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.15988E-1	-7.97939E-1	-9.13162E0	-9.14214E0	5.24521E-3	9.35793E-2	2.7333E1	-3.26647E1	-3.2622E1	2.68151E1	2.3764E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.16436E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.15868E-1	-7.98202E-1	-9.13165E0	-9.14218E0	5.55515E-3	9.33409E-2	2.7335E1	-3.26572E1	-3.26341E1	2.68094E1	2.37734E-9	2.51265E-3	2.51265E-3	6.33341E-3	2.16491E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.15964E-1	-7.98059E-1	-9.13157E0	-9.14209E0	5.4121E-3	9.34839E-2	2.73099E1	-3.26741E1	-3.2614E1	2.68064E1	2.37538E-9	2.52293E-3	2.52293E-3	6.3245E-3	2.16639E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.1594E-1	-7.97963E-1	-9.13131E0	-9.14171E0	5.43594E-3	9.3627E-2	2.73069E1	-3.26797E1	-3.26691E1	2.678E1	2.37538E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.1858E-2