[Scan]
initial_time=2015-12-18T19:48:48
final_time=2015-12-18T19:49:07
ip_count=19
run=1020
dataset=0
scan=88
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=1.35065E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=1.97227E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=3.18563E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-1.99556E-11
mult1=-9.89692E-9
mult2=-2.7246E-9
rf_tmon=-5.4377E-3
rf_agc=3.28349E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.6907E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67953E0
bslens_imon=2.52837E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20245E1
lens5a_imon=2.00337E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=2.84611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02029E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05074E1
cs_ea1_imon=2.56828E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36644E0
lens1_imon=2.68263E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03739E1
cs_ea2_imon=1.51781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.93945E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.3132E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.30391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15557E1
os_ea1_imon=2.36222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25393E0
cs_ionrep_imon=1.19312E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.9335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.95747E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.28006E-8
tplens_vset=1.4E-1
tplens_vmon=1.58389E0
tplens_imon=-4.9449E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.48842E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26843E1
iondef2_imon=1.57143E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=4.01667E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30964E0
ionrepsh_imon=1.78336E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.1716E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46146E0
os_ea2_imon=-6.561E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00564E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.17804E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04855E0
os_ef2alow_imon=-2.75645E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.47384E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11039E1
os_restr2_imon=3.4213E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.28826E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73273E1
iondef1_imon=1.08991E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6818E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.15344E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.82641E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=1.55475E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.3898E-4
mask2_vset=0.0E0
mask2_vmon=-1.86296E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.69624E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.40335E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.09754E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37291E0
defgridb_imon=6.02503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.41627E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06572E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62796E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.95585E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62041E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63691E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.72694E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.09412E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.45787E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22465E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.18011E-2
chamber_ion_pmon=2.37848E-9
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.58691E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.15773E-1	-7.98082E-1	-9.13122E0	-9.14178E0	5.03063E-3	9.32932E-2	2.72991E1	-3.26843E1	-3.26422E1	2.68194E1	2.37641E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17066E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.15773E-1	-7.98178E-1	-9.13112E0	-9.14159E0	5.07832E-3	9.33647E-2	2.73117E1	-3.26404E1	-3.25978E1	2.68178E1	2.37538E-9	2.52921E-3	2.52921E-3	6.3074E-3	2.16569E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.15868E-1	-7.97939E-1	-9.13112E0	-9.1418E0	5.26905E-3	9.35793E-2	2.73312E1	-3.26793E1	-3.26457E1	2.6796E1	2.37641E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.16501E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.15773E-1	-7.98035E-1	-9.1311E0	-9.14176E0	5.29289E-3	9.32932E-2	2.73021E1	-3.26651E1	-3.2647E1	2.68128E1	2.3764E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.16252E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.15797E-1	-7.97772E-1	-9.13119E0	-9.14216E0	5.126E-3	9.32217E-2	2.73261E1	-3.26561E1	-3.2626E1	2.68352E1	2.37538E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.16067E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.15916E-1	-7.97558E-1	-9.13126E0	-9.14202E0	5.26905E-3	9.33886E-2	2.73086E1	-3.26632E1	-3.2649E1	2.67932E1	2.37538E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17633E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.15773E-1	-7.97653E-1	-9.13122E0	-9.14218E0	5.38826E-3	9.35555E-2	2.72967E1	-3.26524E1	-3.26242E1	2.68292E1	2.37538E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16621E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16107E-1	-7.97844E-1	-9.13143E0	-9.14223E0	5.48363E-3	9.36508E-2	2.72913E1	-3.26831E1	-3.2641E1	2.68088E1	2.37641E-9	2.51662E-3	2.51662E-3	6.34588E-3	2.17822E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16035E-1	-7.97939E-1	-9.13112E0	-9.14211E0	5.43594E-3	9.35555E-2	2.73015E1	-3.26386E1	-3.26122E1	2.67878E1	2.37641E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.17444E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.15749E-1	-7.97939E-1	-9.13155E0	-9.1418E0	5.17368E-3	9.35793E-2	2.73357E1	-3.26831E1	-3.26224E1	2.68322E1	2.37641E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.17255E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.15463E-1	-7.97963E-1	-9.1315E0	-9.14168E0	5.03063E-3	9.35316E-2	2.73069E1	-3.2659E1	-3.26897E1	2.6831E1	2.3764E-9	2.52492E-3	2.52492E-3	6.28592E-3	2.16806E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.15344E-1	-7.98082E-1	-9.13115E0	-9.14164E0	5.29289E-3	9.37939E-2	2.73027E1	-3.26969E1	-3.26567E1	2.68123E1	2.37538E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17822E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.15248E-1	-7.97725E-1	-9.13146E0	-9.14178E0	5.34058E-3	9.37462E-2	2.73153E1	-3.26452E1	-3.26224E1	2.6825E1	2.37538E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.17633E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.15153E-1	-7.97868E-1	-9.13134E0	-9.1419E0	5.36442E-3	9.36031E-2	2.73051E1	-3.26644E1	-3.26154E1	2.68166E1	2.37641E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.17633E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.15415E-1	-7.97534E-1	-9.13122E0	-9.1418E0	5.29289E-3	9.37462E-2	2.72953E1	-3.2656E1	-3.26676E1	2.68268E1	2.37741E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.17176E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.15463E-1	-7.97367E-1	-9.13177E0	-9.14209E0	5.126E-3	9.34362E-2	2.73267E1	-3.26765E1	-3.26278E1	2.6822E1	2.37749E-9	2.51693E-3	2.51693E-3	6.3074E-3	2.16377E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.15201E-1	-7.97796E-1	-9.13146E0	-9.14221E0	4.98295E-3	9.37462E-2	2.73033E1	-3.26714E1	-3.26384E1	2.68082E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17633E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.15606E-1	-7.98106E-1	-9.13129E0	-9.14226E0	5.38826E-3	9.36747E-2	2.72727E1	-3.26387E1	-3.2679E1	2.68009E1	2.37538E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.16991E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.15725E-1	-7.98154E-1	-9.13134E0	-9.14202E0	5.31673E-3	9.35316E-2	2.73153E1	-3.26675E1	-3.26506E1	2.67825E1	2.37538E-9	2.52864E-3	2.52864E-3	6.30366E-3	2.16914E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.16202E-1	-7.97915E-1	-9.13124E0	-9.1418E0	5.05447E-3	9.37939E-2	2.73273E1	-3.26843E1	-3.26164E1	2.6818E1	2.37848E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.18011E-2