[Scan]
initial_time=2015-12-18T19:49:14
final_time=2015-12-18T19:49:34
ip_count=19
run=1020
dataset=0
scan=89
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.1563E-1
ql1_imon=1.35279E-8
ql2_vset=
ql2_vmon=-7.97439E-1
ql2_imon=1.97072E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=3.52299E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=-8.13007E-12
mult1=-9.87283E-9
mult2=-2.73059E-9
rf_tmon=-3.51505E-3
rf_agc=3.39164E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.68208E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65688E0
bslens_imon=2.71201E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20074E1
lens5a_imon=1.97289E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05166E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=2.84106E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05117E1
cs_ea1_imon=2.56424E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37746E0
lens1_imon=2.60183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.041E1
cs_ea2_imon=1.54352E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.93152E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.31677E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.29851E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1541E1
os_ea1_imon=2.36039E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.06703E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26189E0
cs_ionrep_imon=1.16594E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93203E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01599E1
cs_anode1_imon=2.94414E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.29854E-8
tplens_vset=1.4E-1
tplens_vmon=1.57471E0
tplens_imon=-3.80627E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26434E1
iondef3_imon=1.50018E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.56482E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98416E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.01747E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2876E0
ionrepsh_imon=1.78998E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33701E1
lens5b_imon=2.15727E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.10632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4535E0
os_ea2_imon=-4.61433E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.0041E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.17804E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93219E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.42743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.31287E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.25037E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.08366E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.0762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.15954E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.81313E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0965E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.52927E-6
window_vset=0.0E0
window_vmon=1.36854E-1
window_imon=-1.17071E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.38936E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.27384E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.22337E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.27752E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29017E0
defgridb_imon=5.9479E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33352E1
os_fil1_imon=9.41657E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05828E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63298E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.94858E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62774E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63468E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80578E-2
os_fil2_imon=-2.8762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.76317E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22466E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.17066E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16274E-1	-7.97749E-1	-9.13126E0	-9.14197E0	5.53131E-3	9.36508E-2	2.73181E1	-3.26915E1	-3.2626E1	2.6816E1	2.37538E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.1858E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16154E-1	-7.97844E-1	-9.13126E0	-9.14197E0	5.74589E-3	9.35793E-2	2.72727E1	-3.2648E1	-3.2645E1	2.68208E1	2.37848E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.18011E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16107E-1	-7.97892E-1	-9.13174E0	-9.1418E0	5.6982E-3	9.34839E-2	2.73114E1	-3.2663E1	-3.26408E1	2.68256E1	2.37538E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.17145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.15964E-1	-7.97939E-1	-9.1316E0	-9.14168E0	5.88894E-3	9.36031E-2	2.73284E1	-3.2686E1	-3.26487E1	2.68052E1	2.37538E-9	2.52093E-3	2.52093E-3	6.3126E-3	2.17742E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.15821E-1	-7.97963E-1	-9.13076E0	-9.14192E0	5.88894E-3	9.34124E-2	2.73187E1	-3.2639E1	-3.26124E1	2.68334E1	2.37538E-9	2.51804E-3	2.51804E-3	6.3074E-3	2.17915E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.15964E-1	-7.97987E-1	-9.13136E0	-9.14178E0	5.50747E-3	9.33886E-2	2.73051E1	-3.26548E1	-3.26309E1	2.6795E1	2.37538E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.17176E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.15701E-1	-7.97844E-1	-9.13155E0	-9.14168E0	5.57899E-3	9.37462E-2	2.73128E1	-3.2688E1	-3.26207E1	2.68106E1	2.37641E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.17633E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.15845E-1	-7.97653E-1	-9.13136E0	-9.14176E0	5.53131E-3	9.31025E-2	2.72839E1	-3.26514E1	-3.26107E1	2.67896E1	2.37745E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.1858E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.15725E-1	-7.97939E-1	-9.13103E0	-9.14195E0	5.31673E-3	9.3317E-2	2.73087E1	-3.26549E1	-3.26212E1	2.68406E1	2.3764E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.17547E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.15892E-1	-7.97701E-1	-9.13131E0	-9.14214E0	5.22137E-3	9.35555E-2	2.7288E1	-3.2662E1	-3.26195E1	2.67931E1	2.37538E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.17822E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.15964E-1	-7.97796E-1	-9.13155E0	-9.14199E0	5.03063E-3	9.32217E-2	2.73307E1	-3.26897E1	-3.2568E1	2.6802E1	2.3764E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.17361E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.15821E-1	-7.97772E-1	-9.13138E0	-9.14209E0	5.4121E-3	9.3174E-2	2.72967E1	-3.2638E1	-3.2623E1	2.68226E1	2.37538E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.17915E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.15892E-1	-7.97749E-1	-9.13124E0	-9.14187E0	5.38826E-3	9.34362E-2	2.73165E1	-3.27179E1	-3.26314E1	2.68286E1	2.37538E-9	2.52139E-3	2.52139E-3	6.30182E-3	2.16952E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.15749E-1	-7.97534E-1	-9.1315E0	-9.14204E0	5.4121E-3	9.34839E-2	2.72835E1	-3.26561E1	-3.26224E1	2.67854E1	2.37641E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.15938E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.15654E-1	-7.97153E-1	-9.13141E0	-9.14202E0	4.98295E-3	9.33409E-2	2.73165E1	-3.27017E1	-3.26236E1	2.68424E1	2.37538E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.16501E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.15606E-1	-7.9751E-1	-9.13119E0	-9.1423E0	5.05447E-3	9.33886E-2	2.72732E1	-3.2672E1	-3.26549E1	2.6792E1	2.37641E-9	2.52209E-3	2.52209E-3	6.28552E-3	2.18201E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.15725E-1	-7.97844E-1	-9.13129E0	-9.1419E0	5.05447E-3	9.33647E-2	2.73051E1	-3.26346E1	-3.26646E1	2.68106E1	2.37538E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.17732E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.15964E-1	-7.97749E-1	-9.13153E0	-9.1419E0	5.29289E-3	9.34362E-2	2.73145E1	-3.26555E1	-3.26248E1	2.68238E1	2.37749E-9	2.52473E-3	2.52473E-3	6.32418E-3	2.17529E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.15701E-1	-7.97772E-1	-9.13126E0	-9.14218E0	5.36442E-3	9.31263E-2	2.73261E1	-3.26699E1	-3.26434E1	2.6816E1	2.37538E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.16067E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.1563E-1	-7.97439E-1	-9.13153E0	-9.14216E0	5.26905E-3	9.3317E-2	2.73363E1	-3.26693E1	-3.26434E1	2.68124E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17066E-2