[Scan]
initial_time=2015-12-18T19:49:41
final_time=2015-12-18T19:50:01
ip_count=19
run=1020
dataset=0
scan=90
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.15868E-1
ql1_imon=1.35027E-8
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=1.95808E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=3.34811E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=8.69036E-12
mult1=-9.11428E-9
mult2=-2.67869E-9
rf_tmon=-5.70807E-3
rf_agc=3.27267E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.64888E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20193E1
lens5a_imon=1.97262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05021E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=2.85296E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05084E1
cs_ea1_imon=2.56743E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38037E0
lens1_imon=2.47647E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.95927E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.54255E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.93801E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.32313E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.3086E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.37241E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=1.20584E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93124E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.95351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.29998E-8
tplens_vset=1.4E-1
tplens_vmon=1.58916E0
tplens_imon=-4.25519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.51371E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.56706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98155E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.86417E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25871E0
ionrepsh_imon=1.77975E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4714E0
os_ea2_imon=-6.49026E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0603E2
lens4b_imon=2.005E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.1647E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.67717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05833E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.4213E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.2946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.24497E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73207E1
iondef1_imon=1.09373E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68119E1
iondef4_imon=1.07008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.18965E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.90271E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=1.74696E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86164E1
mask2_imon=-8.75184E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.41525E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.68345E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.35037E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=5.93722E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.42696E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06308E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63333E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.98786E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61627E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64654E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94473E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.89148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38586E-1
cs_fil2_imon=-2.95429E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.13641E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22479E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.18663E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52815E-3
foreline_cvt_pmon=2.52815E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.22361E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.15535E-1	-7.97462E-1	-9.13117E0	-9.14204E0	5.14984E-3	9.35078E-2	2.7324E1	-3.26691E1	-3.26172E1	2.67884E1	2.37538E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.17361E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.15988E-1	-7.97439E-1	-9.13122E0	-9.14192E0	5.31673E-3	9.3317E-2	2.73039E1	-3.26768E1	-3.26487E1	2.67982E1	2.37538E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.17255E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.15558E-1	-7.97415E-1	-9.13141E0	-9.14209E0	5.48363E-3	9.34839E-2	2.73222E1	-3.26708E1	-3.26065E1	2.68157E1	2.37538E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.16569E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.15701E-1	-7.97582E-1	-9.13136E0	-9.14145E0	5.43594E-3	9.33647E-2	2.73255E1	-3.26549E1	-3.2653E1	2.68046E1	2.37538E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.16806E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.15773E-1	-7.97486E-1	-9.13138E0	-9.14173E0	5.43594E-3	9.3174E-2	2.73205E1	-3.26546E1	-3.26134E1	2.68216E1	2.37842E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.18104E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.15868E-1	-7.98035E-1	-9.13138E0	-9.14178E0	5.34058E-3	9.34362E-2	2.73168E1	-3.26714E1	-3.26351E1	2.67764E1	2.37538E-9	2.51854E-3	2.51854E-3	6.35349E-3	2.18188E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16274E-1	-7.97963E-1	-9.13165E0	-9.14176E0	5.48363E-3	9.35555E-2	2.72883E1	-3.26615E1	-3.26458E1	2.68221E1	2.37538E-9	2.52029E-3	2.52029E-3	6.34897E-3	2.17602E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.15964E-1	-7.98059E-1	-9.13143E0	-9.14192E0	5.34058E-3	9.32693E-2	2.72855E1	-3.2645E1	-3.2631E1	2.68241E1	2.37745E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.17444E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.15964E-1	-7.98059E-1	-9.13131E0	-9.14192E0	5.4121E-3	9.33886E-2	2.72913E1	-3.26591E1	-3.26284E1	2.68113E1	2.37538E-9	2.51752E-3	2.51752E-3	6.3074E-3	2.18011E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16035E-1	-7.98178E-1	-9.13105E0	-9.14199E0	5.53131E-3	9.31978E-2	2.73363E1	-3.26921E1	-3.26398E1	2.67818E1	2.37538E-9	2.5188E-3	2.5188E-3	6.28552E-3	2.17822E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.15892E-1	-7.98082E-1	-9.13162E0	-9.14207E0	5.60284E-3	9.32932E-2	2.73261E1	-3.26753E1	-3.26615E1	2.68233E1	2.37641E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.18201E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.15868E-1	-7.98273E-1	-9.13155E0	-9.14216E0	5.55515E-3	9.33886E-2	2.73322E1	-3.26809E1	-3.26496E1	2.68268E1	2.37741E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.18104E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.15964E-1	-7.97892E-1	-9.13153E0	-9.14209E0	5.57899E-3	9.35316E-2	2.73129E1	-3.26446E1	-3.26434E1	2.67926E1	2.37848E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.17822E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.16011E-1	-7.97868E-1	-9.13134E0	-9.1419E0	5.67436E-3	9.34601E-2	2.73213E1	-3.26759E1	-3.26266E1	2.681E1	2.37641E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.17255E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.15821E-1	-7.97987E-1	-9.13138E0	-9.14221E0	5.55515E-3	9.38177E-2	2.73291E1	-3.26639E1	-3.26338E1	2.6843E1	2.37538E-9	2.52977E-3	2.52977E-3	6.31288E-3	2.18011E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.15701E-1	-7.97701E-1	-9.13141E0	-9.14207E0	5.36442E-3	9.33647E-2	2.73015E1	-3.26639E1	-3.26266E1	2.6807E1	2.37435E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.17822E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.15916E-1	-7.97844E-1	-9.13143E0	-9.14209E0	5.38826E-3	9.34124E-2	2.73442E1	-3.26747E1	-3.26116E1	2.6816E1	2.37538E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.17255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.16011E-1	-7.97939E-1	-9.13143E0	-9.14204E0	5.57899E-3	9.37223E-2	2.72927E1	-3.26649E1	-3.26726E1	2.6837E1	2.37538E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17255E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16178E-1	-7.97606E-1	-9.13136E0	-9.1423E0	5.53131E-3	9.32217E-2	2.73009E1	-3.26681E1	-3.26597E1	2.6807E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.17732E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.15868E-1	-7.97868E-1	-9.1311E0	-9.14187E0	5.45979E-3	9.3174E-2	2.73207E1	-3.26717E1	-3.26164E1	2.68119E1	2.37538E-9	2.52815E-3	2.52815E-3	6.32356E-3	2.18663E-2