[Scan]
initial_time=2015-12-18T19:50:34
final_time=2015-12-18T19:50:54
ip_count=19
run=1020
dataset=0
scan=92
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-8.15701E-1
ql1_imon=1.35165E-8
ql2_vset=
ql2_vmon=-7.97701E-1
ql2_imon=1.96128E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.25012E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=6.96182E-12
mult1=-9.48754E-9
mult2=-2.65074E-9
rf_tmon=-4.71671E-3
rf_agc=3.31954E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.66994E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=1.97483E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12455E2
lens4a_imon=2.04994E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=2.85823E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05177E1
cs_ea1_imon=2.56591E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37315E0
lens1_imon=2.66006E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.97429E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03513E1
cs_ea2_imon=1.5409E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84391E1
cs_ef1a_imon=2.94032E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.32207E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1133E1
os_restr1_imon=4.30121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15536E1
os_ea1_imon=2.35036E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63851E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=1.18767E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93247E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01898E1
cs_anode1_imon=2.96332E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.29723E-8
tplens_vset=1.4E-1
tplens_vmon=1.58008E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26506E1
iondef3_imon=1.4917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.99495E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=1.77132E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.17304E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74755E1
cs_ef2b_imon=3.11654E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45738E0
os_ea2_imon=-5.67882E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71305E1
cs_ef2a_imon=3.16997E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05249E0
os_ef2alow_imon=-2.71517E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95851E-1
os_ef2bup_imon=-5.40792E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11011E1
os_restr2_imon=3.42474E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.25033E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.08927E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68029E1
iondef4_imon=1.08335E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.19365E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.89143E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1325E0
cs_ionaccel_imon=-1.93672E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47124E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56323E1
einzel_imon=7.67369E-6
window_vset=0.0E0
window_vmon=1.51761E-1
window_imon=-1.05211E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.38964E-4
mask2_vset=0.0E0
mask2_vmon=-1.86149E1
mask2_imon=-7.58415E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.7108E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.74808E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.33208E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31106E0
defgridb_imon=5.93755E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.41482E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0714E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63253E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=9.93869E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61705E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63784E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83804E-2
os_fil2_imon=-2.72068E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91467E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.80252E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36834E-1
cs_fil2_imon=-2.13684E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1775E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22442E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.16501E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52757E-3
foreline_cvt_pmon=2.52757E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56005E-1
res40_imon=-2.60902E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=195
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.15725E-1	-7.98059E-1	-9.13174E0	-9.14185E0	5.29289E-3	9.33886E-2	2.73144E1	-3.26573E1	-3.26063E1	2.68035E1	2.37538E-9	2.52647E-3	2.52647E-3	6.29645E-3	2.17255E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.15654E-1	-7.97868E-1	-9.13155E0	-9.1419E0	4.673E-3	9.35316E-2	2.73071E1	-3.26585E1	-3.2628E1	2.68234E1	2.37638E-9	2.51498E-3	2.51498E-3	6.31798E-3	2.17829E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.15487E-1	-7.97629E-1	-9.13177E0	-9.14202E0	5.03063E-3	9.34839E-2	2.73224E1	-3.26558E1	-3.26298E1	2.67941E1	2.37538E-9	2.52259E-3	2.52259E-3	6.3074E-3	2.18166E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.15773E-1	-7.9751E-1	-9.13165E0	-9.14211E0	4.79221E-3	9.31025E-2	2.73366E1	-3.26693E1	-3.26558E1	2.68397E1	2.37538E-9	2.52581E-3	2.52581E-3	6.34202E-3	2.17671E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.15535E-1	-7.97749E-1	-9.13169E0	-9.14185E0	5.07832E-3	9.31978E-2	2.72968E1	-3.26425E1	-3.26685E1	2.68196E1	2.3784E-9	2.51777E-3	2.51777E-3	6.3074E-3	2.18149E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.15749E-1	-7.98011E-1	-9.13179E0	-9.14204E0	4.88758E-3	9.31025E-2	2.73171E1	-3.26729E1	-3.2617E1	2.68364E1	2.37538E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.17633E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.15654E-1	-7.97939E-1	-9.13146E0	-9.14197E0	4.95911E-3	9.34601E-2	2.73271E1	-3.26664E1	-3.2648E1	2.68232E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.17066E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.15678E-1	-7.97725E-1	-9.13177E0	-9.14178E0	5.07832E-3	9.34124E-2	2.73311E1	-3.26809E1	-3.26219E1	2.6786E1	2.37641E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.17255E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.15606E-1	-7.9751E-1	-9.1315E0	-9.14199E0	4.98295E-3	9.34362E-2	2.73099E1	-3.26825E1	-3.26254E1	2.68088E1	2.37538E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.17255E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.15439E-1	-7.97534E-1	-9.1315E0	-9.14199E0	4.91142E-3	9.33647E-2	2.72791E1	-3.26561E1	-3.26319E1	2.67896E1	2.37538E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.16689E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.15368E-1	-7.97534E-1	-9.1315E0	-9.14192E0	4.98295E-3	9.3174E-2	2.73189E1	-3.26777E1	-3.26446E1	2.67943E1	2.3764E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.17361E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.1563E-1	-7.98059E-1	-9.13112E0	-9.14202E0	5.10216E-3	9.35316E-2	2.73177E1	-3.26669E1	-3.26062E1	2.68269E1	2.37641E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.1575E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.15821E-1	-7.97987E-1	-9.13134E0	-9.14159E0	5.14984E-3	9.34124E-2	2.72919E1	-3.26747E1	-3.2641E1	2.68082E1	2.37538E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.16878E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.15558E-1	-7.9782E-1	-9.13122E0	-9.14183E0	5.34058E-3	9.34839E-2	2.73328E1	-3.26868E1	-3.26242E1	2.68178E1	2.37641E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17633E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.15463E-1	-7.9782E-1	-9.13131E0	-9.14197E0	5.34058E-3	9.32217E-2	2.73014E1	-3.26603E1	-3.26327E1	2.67944E1	2.3764E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.17176E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.15487E-1	-7.97582E-1	-9.13119E0	-9.14176E0	5.38826E-3	9.35555E-2	2.73117E1	-3.26663E1	-3.26482E1	2.68202E1	2.37848E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.17633E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.15654E-1	-7.97606E-1	-9.13117E0	-9.14183E0	5.4121E-3	9.33647E-2	2.73151E1	-3.26644E1	-3.26006E1	2.68262E1	2.37435E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.15654E-1	-7.97606E-1	-9.13115E0	-9.1418E0	5.26905E-3	9.36985E-2	2.73003E1	-3.26561E1	-3.2638E1	2.6795E1	2.37745E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.17255E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.15701E-1	-7.97629E-1	-9.1315E0	-9.14176E0	5.17368E-3	9.35316E-2	2.73358E1	-3.26856E1	-3.26313E1	2.68176E1	2.37538E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.15699E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.15701E-1	-7.97701E-1	-9.13141E0	-9.14166E0	5.26905E-3	9.33886E-2	2.73003E1	-3.26536E1	-3.26506E1	2.68029E1	2.37538E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.16501E-2