[Scan]
initial_time=2015-12-18T19:51:28
final_time=2015-12-18T19:51:47
ip_count=19
run=1020
dataset=0
scan=94
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.15916E-1
ql1_imon=1.34763E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.96062E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=2.90227E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=2.55942E-11
mult1=-9.6561E-9
mult2=-2.69466E-9
rf_tmon=-5.84025E-3
rf_agc=3.2883E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.70259E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66455E0
bslens_imon=2.53814E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20066E1
lens5a_imon=1.98114E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53823E1
cs_ef1b_imon=2.86506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02086E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05092E1
cs_ea1_imon=2.53594E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37546E0
lens1_imon=2.56595E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.96341E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04217E1
cs_ea2_imon=1.5202E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84423E1
cs_ef1a_imon=2.9502E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.33665E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1132E1
os_restr1_imon=4.30312E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1545E1
os_ea1_imon=2.35796E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63844E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25268E0
cs_ionrep_imon=1.18717E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.9333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=2.94951E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.30245E-8
tplens_vset=1.4E-1
tplens_vmon=1.58176E0
tplens_imon=-2.81064E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26512E1
iondef3_imon=1.49899E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.58311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98485E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.0071E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3054E0
ionrepsh_imon=1.77743E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33773E1
lens5b_imon=2.18728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7475E1
cs_ef2b_imon=3.1191E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48037E0
os_ea2_imon=-7.50351E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00494E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71368E1
cs_ef2a_imon=3.17296E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06614E0
os_ef2alow_imon=-2.68927E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03602E-1
os_ef2bup_imon=-5.40344E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1099E1
os_restr2_imon=3.42805E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28155E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.25445E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.07698E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.07356E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.19655E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.8993E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11566E0
cs_ionaccel_imon=-1.84478E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.54188E-6
window_vset=0.0E0
window_vmon=1.58027E-1
window_imon=-1.20881E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39063E-4
mask2_vset=0.0E0
mask2_vmon=-1.86217E1
mask2_imon=-6.90995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.65511E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.68525E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.19278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2673E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33375E1
os_fil1_imon=9.43799E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0576E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63362E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=9.94873E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62331E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64934E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83464E-2
os_fil2_imon=-2.76186E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.84476E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3964E-1
cs_fil2_imon=-2.65181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.90225E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2249E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.17633E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.74845E-1
res40_imon=-2.63366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.15535E-1	-7.97772E-1	-9.13143E0	-9.14202E0	5.65052E-3	9.36031E-2	2.73201E1	-3.26506E1	-3.26176E1	2.68076E1	2.37538E-9	2.51919E-3	2.51919E-3	6.29157E-3	2.17464E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.15845E-1	-7.98297E-1	-9.13117E0	-9.14152E0	5.48363E-3	9.33886E-2	2.73329E1	-3.26393E1	-3.26318E1	2.67818E1	2.37745E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.16501E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.15797E-1	-7.97868E-1	-9.13129E0	-9.1414E0	5.45979E-3	9.31978E-2	2.73117E1	-3.26645E1	-3.26344E1	2.68285E1	2.3764E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.16067E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.15916E-1	-7.98059E-1	-9.13148E0	-9.14159E0	5.17368E-3	9.3317E-2	2.73309E1	-3.26579E1	-3.2635E1	2.67944E1	2.37538E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.17361E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.15773E-1	-7.98202E-1	-9.13107E0	-9.14195E0	5.29289E-3	9.34124E-2	2.73187E1	-3.26809E1	-3.26307E1	2.68076E1	2.37538E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.1575E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.15582E-1	-7.97939E-1	-9.13126E0	-9.14185E0	5.126E-3	9.36031E-2	2.73201E1	-3.26338E1	-3.26188E1	2.6789E1	2.37538E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.18201E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.1563E-1	-7.97987E-1	-9.13124E0	-9.14183E0	5.19753E-3	9.3627E-2	2.73405E1	-3.26549E1	-3.26464E1	2.68274E1	2.37538E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.17918E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.15606E-1	-7.97915E-1	-9.13146E0	-9.14185E0	4.86374E-3	9.36747E-2	2.72991E1	-3.26681E1	-3.26002E1	2.67962E1	2.37538E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17822E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.15606E-1	-7.97796E-1	-9.13146E0	-9.14183E0	5.03063E-3	9.33886E-2	2.73063E1	-3.26543E1	-3.26372E1	2.68142E1	2.37641E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.16313E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.15487E-1	-7.97844E-1	-9.13165E0	-9.14166E0	5.26905E-3	9.35793E-2	2.73562E1	-3.26825E1	-3.26032E1	2.68292E1	2.37538E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.15189E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09673E0	-8.15415E-1	-7.98082E-1	-9.13134E0	-9.14171E0	5.07832E-3	9.35078E-2	2.73201E1	-3.26416E1	-3.26338E1	2.68047E1	2.37641E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.16313E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.1563E-1	-7.98106E-1	-9.13129E0	-9.14178E0	5.05447E-3	9.3627E-2	2.73496E1	-3.26657E1	-3.26434E1	2.68088E1	2.37538E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.17918E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.15582E-1	-7.97677E-1	-9.13136E0	-9.14178E0	5.00679E-3	9.36747E-2	2.72892E1	-3.26986E1	-3.26561E1	2.68106E1	2.37641E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.16878E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.15701E-1	-7.97868E-1	-9.13172E0	-9.14185E0	4.98295E-3	9.36031E-2	2.73135E1	-3.26609E1	-3.26344E1	2.68208E1	2.37538E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.17066E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.15511E-1	-7.97653E-1	-9.13186E0	-9.14221E0	4.88758E-3	9.33886E-2	2.73405E1	-3.26579E1	-3.2653E1	2.68058E1	2.3764E-9	2.52276E-3	2.52276E-3	6.36144E-3	2.15331E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.15368E-1	-7.97844E-1	-9.13143E0	-9.14214E0	5.03063E-3	9.34124E-2	2.72962E1	-3.2652E1	-3.26195E1	2.67833E1	2.37538E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16125E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.15535E-1	-7.97772E-1	-9.13126E0	-9.14207E0	5.34058E-3	9.3627E-2	2.73021E1	-3.26567E1	-3.26392E1	2.68026E1	2.37437E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.17547E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.15463E-1	-7.9782E-1	-9.13117E0	-9.14187E0	5.07832E-3	9.35078E-2	2.73345E1	-3.26855E1	-3.26128E1	2.68163E1	2.37749E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.16569E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.15797E-1	-7.98082E-1	-9.13136E0	-9.14168E0	5.24521E-3	9.3627E-2	2.72901E1	-3.27005E1	-3.26597E1	2.6813E1	2.3764E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.17918E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.15916E-1	-7.98035E-1	-9.13138E0	-9.14197E0	4.93526E-3	9.35316E-2	2.73315E1	-3.26567E1	-3.26512E1	2.6825E1	2.37538E-9	2.52428E-3	2.52428E-3	6.34588E-3	2.17633E-2