[Scan]
initial_time=2015-12-18T19:52:21
final_time=2015-12-18T19:52:41
ip_count=19
run=1020
dataset=0
scan=96
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09688E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.15535E-1
ql1_imon=1.35289E-8
ql2_vset=
ql2_vmon=-7.97653E-1
ql2_imon=1.99986E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=2.72226E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-3.4678E-11
mult1=-9.54665E-9
mult2=-2.58999E-9
rf_tmon=-5.78956E-3
rf_agc=3.27841E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.68201E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62168E0
bslens_imon=2.52333E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20355E1
lens5a_imon=1.98055E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.04786E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54145E1
cs_ef1b_imon=2.81656E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=2.57392E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34612E0
lens1_imon=2.33588E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04093E1
cs_ea2_imon=1.54759E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84706E1
cs_ef1a_imon=2.91783E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.28879E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10961E1
os_restr1_imon=4.3122E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15342E1
os_ea1_imon=2.33455E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.06451E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=1.20044E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.932E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.91675E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.26493E-8
tplens_vset=1.4E-1
tplens_vmon=1.56633E0
tplens_imon=-4.61569E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2639E1
iondef3_imon=1.50469E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26484E1
iondef2_imon=1.55156E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.01391E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30076E0
ionrepsh_imon=1.77074E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33285E1
lens5b_imon=2.17197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74928E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45698E0
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5718E-1
os_ef2bup_imon=-5.41978E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10625E1
os_restr2_imon=3.41518E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.31731E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02043E1
cs_anode2_imon=2.25073E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7288E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67884E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.14227E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.75084E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-2.11855E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.43917E-6
window_vset=0.0E0
window_vmon=1.23039E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.38857E-4
mask2_vset=0.0E0
mask2_vmon=-1.86152E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.27466E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.74113E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.97185E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33841E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.4084E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07876E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62825E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30818E1
cs_fil1_imon=9.91194E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62204E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62356E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.14154E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22244E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50883E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.15678E-1	-7.98011E-1	-9.13117E0	-9.14145E0	5.14984E-3	9.34601E-2	2.7321E1	-3.26797E1	-3.26343E1	2.68123E1	2.37641E-9	2.52647E-3	2.52647E-3	6.28552E-3	2.16313E-2
2.0E0	5.0E0	0.0E0	3.16E2	1.6E2	-2.09696E0	-8.15392E-1	-7.97963E-1	-9.13126E0	-9.14161E0	5.34058E-3	9.35793E-2	2.72794E1	-3.26438E1	-3.26419E1	2.68756E1	2.37437E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.16621E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.15535E-1	-7.97892E-1	-9.13169E0	-9.14207E0	5.03063E-3	9.35316E-2	2.72941E1	-3.26306E1	-3.26527E1	2.67984E1	2.37749E-9	2.53257E-3	2.53257E-3	6.27399E-3	2.18494E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.15368E-1	-7.97868E-1	-9.13124E0	-9.14211E0	5.03063E-3	9.37223E-2	2.73063E1	-3.2653E1	-3.26032E1	2.6819E1	2.37538E-9	2.52765E-3	2.52765E-3	6.31269E-3	2.1856E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.15463E-1	-7.97892E-1	-9.13129E0	-9.14211E0	4.98295E-3	9.35316E-2	2.73472E1	-3.26783E1	-3.2632E1	2.6825E1	2.37538E-9	2.5225E-3	2.5225E-3	6.32418E-3	2.17337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.15225E-1	-7.97725E-1	-9.13136E0	-9.14221E0	4.91142E-3	9.33647E-2	2.73105E1	-3.26759E1	-3.26116E1	2.68046E1	2.37538E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.15883E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.15248E-1	-7.97963E-1	-9.13122E0	-9.14197E0	5.17368E-3	9.37223E-2	2.73315E1	-3.26386E1	-3.26128E1	2.67962E1	2.37745E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.18011E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.15368E-1	-7.98225E-1	-9.13141E0	-9.14237E0	5.36442E-3	9.3627E-2	2.73098E1	-3.26649E1	-3.26242E1	2.68347E1	2.37538E-9	2.52362E-3	2.52362E-3	6.33538E-3	2.16952E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.15487E-1	-7.98202E-1	-9.13131E0	-9.14235E0	5.26905E-3	9.34124E-2	2.72943E1	-3.26609E1	-3.26573E1	2.681E1	2.37538E-9	2.52236E-3	2.52236E-3	6.33388E-3	2.16736E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.15344E-1	-7.97939E-1	-9.13134E0	-9.14195E0	5.48363E-3	9.36508E-2	2.73009E1	-3.26236E1	-3.26362E1	2.68011E1	2.37538E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.17444E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.15511E-1	-7.9782E-1	-9.13155E0	-9.14218E0	5.14984E-3	9.35078E-2	2.73181E1	-3.26496E1	-3.26366E1	2.68265E1	2.37693E-9	2.51716E-3	2.51716E-3	6.31837E-3	2.18485E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.15749E-1	-7.97844E-1	-9.13143E0	-9.14226E0	5.17368E-3	9.35316E-2	2.7355E1	-3.26651E1	-3.2653E1	2.68244E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.15773E-1	-7.97844E-1	-9.13148E0	-9.14216E0	5.29289E-3	9.3627E-2	2.72849E1	-3.26989E1	-3.26358E1	2.68154E1	2.37745E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17255E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.15725E-1	-7.97725E-1	-9.13165E0	-9.14211E0	5.22137E-3	9.33409E-2	2.73219E1	-3.26723E1	-3.2623E1	2.6792E1	2.37641E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.17066E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.15892E-1	-7.97725E-1	-9.13134E0	-9.14192E0	5.43594E-3	9.31263E-2	2.72889E1	-3.26855E1	-3.26332E1	2.68244E1	2.37538E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.16878E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.15916E-1	-7.97844E-1	-9.13098E0	-9.14183E0	5.45979E-3	9.31501E-2	2.73189E1	-3.26801E1	-3.26098E1	2.68292E1	2.37538E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.17444E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.15892E-1	-7.97558E-1	-9.13086E0	-9.14195E0	5.19753E-3	9.33647E-2	2.72821E1	-3.26472E1	-3.26054E1	2.67992E1	2.37641E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.16878E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.15368E-1	-7.97915E-1	-9.13134E0	-9.14214E0	5.34058E-3	9.31501E-2	2.73192E1	-3.26609E1	-3.26462E1	2.67956E1	2.37641E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.15938E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.15463E-1	-7.97725E-1	-9.13141E0	-9.14214E0	5.43594E-3	9.34124E-2	2.72768E1	-3.26726E1	-3.26266E1	2.6834E1	2.37538E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.16501E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09688E0	-8.15535E-1	-7.97653E-1	-9.13117E0	-9.14185E0	5.07832E-3	9.34601E-2	2.7288E1	-3.26484E1	-3.2639E1	2.67884E1	2.37538E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.16806E-2