[Scan]
initial_time=2015-12-18T20:11:01
final_time=2015-12-18T20:11:20
ip_count=19
run=1020
dataset=1
scan=99
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.0883E-4
ql1_vset=
ql1_vmon=-8.80075E-1
ql1_imon=1.40677E-8
ql2_vset=
ql2_vmon=-8.95739E-1
ql2_imon=1.87821E-9
ql3_vset=
ql3_vmon=-9.0457E0
ql3_imon=2.88922E-9
ql4_vset=
ql4_vmon=-9.04098E0
ql4_imon=-1.70863E-10
mult1=-9.33385E-9
mult2=-2.63703E-9
rf_tmon=-4.72184E-3
rf_agc=3.32678E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.61484E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6385E0
bslens_imon=2.59543E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.95964E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=2.88395E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04579E1
cs_ea1_imon=2.43766E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38157E0
lens1_imon=2.66753E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.55336E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.95891E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.38892E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10997E1
os_restr1_imon=4.29058E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15107E1
os_ea1_imon=2.30571E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6417E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2503E0
cs_ionrep_imon=1.20404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93279E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=3.04685E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.37966E-8
tplens_vset=1.4E-1
tplens_vmon=1.60058E0
tplens_imon=-4.29124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26508E1
iondef3_imon=1.48306E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26679E1
iondef2_imon=1.57427E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.97884E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=1.82698E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53689E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00735E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.16614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03954E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10709E1
os_restr2_imon=3.44401E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.31767E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.27272E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73145E1
iondef1_imon=1.09229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.25346E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=8.13048E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-1.73293E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.4696E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=1.6989E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39008E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.45851E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.60053E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.96824E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35946E0
defgridb_imon=5.93001E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33369E1
os_fil1_imon=9.46859E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07335E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64867E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=9.99507E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61663E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66201E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66099E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73688E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.00853E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.578E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2271E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.19048E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.80885E-1	-8.9612E-1	-9.04546E0	-9.04081E0	5.22137E-3	9.34124E-2	2.73051E1	-3.26747E1	-3.26422E1	2.6792E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02659E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.81171E-1	-8.96001E-1	-9.04555E0	-9.04074E0	5.03063E-3	9.32217E-2	2.73171E1	-3.26585E1	-3.26428E1	2.68022E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02659E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.811E-1	-8.96263E-1	-9.04548E0	-9.04052E0	5.126E-3	9.30786E-2	2.73236E1	-3.26764E1	-3.26214E1	2.68053E1	1.1929E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.9978E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.81004E-1	-8.96168E-1	-9.04517E0	-9.04117E0	5.126E-3	9.3317E-2	2.73204E1	-3.26878E1	-3.26585E1	2.68004E1	1.1929E-7	2.51755E-3	2.51755E-3	6.32644E-3	2.99732E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.8079E-1	-8.95548E-1	-9.04531E0	-9.0409E0	5.29289E-3	9.31501E-2	2.73345E1	-3.26843E1	-3.26338E1	2.68425E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.80814E-1	-8.95977E-1	-9.04536E0	-9.04126E0	5.38826E-3	9.30071E-2	2.72889E1	-3.26753E1	-3.26002E1	2.68153E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.80957E-1	-8.95929E-1	-9.04539E0	-9.04086E0	5.10216E-3	9.31978E-2	2.73346E1	-3.26278E1	-3.26319E1	2.6801E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.03449E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.80766E-1	-8.95953E-1	-9.04546E0	-9.04107E0	4.86374E-3	9.36508E-2	2.72943E1	-3.26609E1	-3.26398E1	2.68082E1	1.19239E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.80671E-1	-8.95715E-1	-9.04543E0	-9.04098E0	5.34058E-3	9.32932E-2	2.73712E1	-3.26297E1	-3.26309E1	2.68112E1	1.1929E-7	2.51552E-3	2.51552E-3	6.28552E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.80456E-1	-8.95977E-1	-9.04565E0	-9.04074E0	5.29289E-3	9.377E-2	2.73204E1	-3.27086E1	-3.26219E1	2.67794E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.80408E-1	-8.9581E-1	-9.04558E0	-9.04117E0	5.65052E-3	9.35555E-2	2.73302E1	-3.26634E1	-3.26542E1	2.68166E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.80551E-1	-8.95858E-1	-9.04536E0	-9.04098E0	5.55515E-3	9.34124E-2	2.73122E1	-3.26815E1	-3.26225E1	2.68142E1	1.1929E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.02813E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.80575E-1	-8.95953E-1	-9.04567E0	-9.04071E0	5.36442E-3	9.39131E-2	2.72961E1	-3.27041E1	-3.26104E1	2.6813E1	1.1929E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.00453E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.80527E-1	-8.95834E-1	-9.04551E0	-9.04062E0	5.31673E-3	9.37223E-2	2.72955E1	-3.26819E1	-3.26092E1	2.68316E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.03712E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.8048E-1	-8.95715E-1	-9.04503E0	-9.0409E0	5.24521E-3	9.35078E-2	2.73252E1	-3.26632E1	-3.26402E1	2.67812E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01609E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.80408E-1	-8.95572E-1	-9.04553E0	-9.04098E0	5.19753E-3	9.34362E-2	2.73021E1	-3.26783E1	-3.26398E1	2.68244E1	1.1929E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.01223E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.80432E-1	-8.95429E-1	-9.0457E0	-9.04074E0	5.36442E-3	9.37462E-2	2.7311E1	-3.26885E1	-3.26136E1	2.6818E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.80289E-1	-8.95643E-1	-9.04551E0	-9.0409E0	5.126E-3	9.34124E-2	2.73033E1	-3.26735E1	-3.26597E1	2.68214E1	1.1929E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.80146E-1	-8.95524E-1	-9.04558E0	-9.04083E0	5.26905E-3	9.34839E-2	2.72985E1	-3.26885E1	-3.2647E1	2.6819E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.80075E-1	-8.95739E-1	-9.0457E0	-9.04098E0	5.45979E-3	9.35555E-2	2.73145E1	-3.26679E1	-3.26508E1	2.68142E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00824E-1