[Scan]
initial_time=2015-12-18T20:13:14
final_time=2015-12-18T20:13:33
ip_count=19
run=1020
dataset=1
scan=104
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.79169E-1
ql1_imon=1.33233E-8
ql2_vset=
ql2_vmon=-8.95929E-1
ql2_imon=1.90425E-9
ql3_vset=
ql3_vmon=-9.04591E0
ql3_imon=9.02438E-10
ql4_vset=
ql4_vmon=-9.0409E0
ql4_imon=1.31488E-11
mult1=-9.65304E-9
mult2=-2.74873E-9
rf_tmon=-3.28248E-3
rf_agc=3.38341E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.66568E-9
bslens_vset=-6.2E0
bslens_vmon=-6.53715E0
bslens_imon=1.95261E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=2.0306E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12602E2
lens4a_imon=2.05168E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53713E1
cs_ef1b_imon=2.87791E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04554E2
lens23_imon=1.01438E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04544E1
cs_ea1_imon=2.44213E-5
lens1_vset=-5.0E0
lens1_vmon=-5.50063E0
lens1_imon=3.12745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64504E1
os_ef1alow_imon=2.97974E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0295E1
cs_ea2_imon=1.48143E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84191E1
cs_ef1a_imon=2.94638E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.39732E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11593E1
os_restr1_imon=4.29408E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14651E1
os_ea1_imon=2.33285E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6374E1
os_ef1bup_imon=3.0913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.31813E0
cs_ionrep_imon=1.27686E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.93157E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01914E1
cs_anode1_imon=3.02874E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.38781E-8
tplens_vset=1.4E-1
tplens_vmon=1.52076E0
tplens_imon=-9.6057E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26467E1
iondef3_imon=1.5371E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26732E1
iondef2_imon=1.59653E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.9781E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.06172E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20372E0
ionrepsh_imon=1.84618E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34562E1
lens5b_imon=2.21844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74768E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51279E0
os_ea2_imon=-1.29868E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.05993E2
lens4b_imon=2.00408E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71321E1
cs_ef2a_imon=3.1674E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06614E0
os_ef2alow_imon=-2.80395E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29087E-1
os_ef2bup_imon=-5.43819E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.4489E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23105E2
cs_ionfoca_imon=6.35358E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.24438E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.07024E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67896E1
iondef4_imon=1.08538E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.31542E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=8.18289E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14926E0
cs_ionaccel_imon=-1.86216E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.54535E-6
window_vset=0.0E0
window_vmon=1.7772E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39049E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=6.59389E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=7.2906E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50088E3
multb_neg_imon=6.84662E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.8804E0
defgridb_imon=5.89719E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33377E1
os_fil1_imon=9.44667E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06675E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65144E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30889E1
cs_fil1_imon=9.96686E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6236E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66501E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.587E-2
os_fil2_imon=-2.8024E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72122E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78893E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37642E-1
cs_fil2_imon=-3.09201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22528E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.99172E-1
res40_imon=-2.63714E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.79145E-1	-8.95953E-1	-9.04541E0	-9.04088E0	5.19753E-3	9.37462E-2	2.72871E1	-3.25137E1	-3.26476E1	2.67824E1	1.1929E-7	2.52871E-3	2.52871E-3	6.33388E-3	3.02368E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.7924E-1	-8.96192E-1	-9.04593E0	-9.0409E0	5.29289E-3	9.3627E-2	2.73141E1	-3.26597E1	-3.26356E1	2.68508E1	1.1929E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.79073E-1	-8.95786E-1	-9.0461E0	-9.04098E0	5.48363E-3	9.36031E-2	2.72968E1	-3.2675E1	-3.26602E1	2.68106E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.02659E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.79097E-1	-8.95691E-1	-9.04567E0	-9.04095E0	5.17368E-3	9.34839E-2	2.72919E1	-3.26645E1	-3.26176E1	2.68088E1	1.1929E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.79145E-1	-8.95953E-1	-9.04577E0	-9.04071E0	5.14984E-3	9.34124E-2	2.73175E1	-3.26697E1	-3.26337E1	2.6804E1	1.1929E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.02253E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.79145E-1	-8.96144E-1	-9.0457E0	-9.04093E0	5.19753E-3	9.38654E-2	2.7278E1	-3.26738E1	-3.26431E1	2.67926E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.79216E-1	-8.95882E-1	-9.04558E0	-9.04112E0	5.07832E-3	9.35793E-2	2.72898E1	-3.26797E1	-3.26213E1	2.6795E1	1.1929E-7	2.51077E-3	2.51077E-3	6.31798E-3	3.00348E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.79526E-1	-8.95953E-1	-9.04584E0	-9.04114E0	5.29289E-3	9.38416E-2	2.72871E1	-3.26615E1	-3.26134E1	2.68202E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.79407E-1	-8.95619E-1	-9.04551E0	-9.04107E0	5.45979E-3	9.37223E-2	2.72538E1	-3.2688E1	-3.26219E1	2.68142E1	1.1929E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.79335E-1	-8.95739E-1	-9.04555E0	-9.04112E0	5.24521E-3	9.33886E-2	2.73334E1	-3.2672E1	-3.26349E1	2.67763E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0071E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.79478E-1	-8.95667E-1	-9.04586E0	-9.04124E0	5.34058E-3	9.32932E-2	2.72793E1	-3.26849E1	-3.26356E1	2.68106E1	1.1929E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.02368E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.79622E-1	-8.95762E-1	-9.04582E0	-9.04109E0	5.126E-3	9.35316E-2	2.72913E1	-3.26567E1	-3.26026E1	2.68004E1	1.1929E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.98554E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09325E0	-8.79455E-1	-8.95858E-1	-9.04582E0	-9.0409E0	5.22137E-3	9.38177E-2	2.72624E1	-3.26933E1	-3.26272E1	2.68124E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.97901E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.79312E-1	-8.95834E-1	-9.04596E0	-9.04121E0	5.34058E-3	9.34839E-2	2.73163E1	-3.2659E1	-3.26349E1	2.6822E1	1.1929E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.01475E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.79145E-1	-8.95643E-1	-9.04601E0	-9.04133E0	5.43594E-3	9.36747E-2	2.73045E1	-3.26855E1	-3.26753E1	2.678E1	1.19239E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.79455E-1	-8.95667E-1	-9.04615E0	-9.04069E0	5.10216E-3	9.37939E-2	2.73309E1	-3.26771E1	-3.26524E1	2.68058E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.98481E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.79121E-1	-8.95691E-1	-9.04608E0	-9.04069E0	5.29289E-3	9.39131E-2	2.7346E1	-3.26633E1	-3.26344E1	2.67908E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.79407E-1	-8.95882E-1	-9.04574E0	-9.04093E0	5.45979E-3	9.35555E-2	2.72927E1	-3.26767E1	-3.26248E1	2.68022E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.79145E-1	-8.95834E-1	-9.04608E0	-9.041E0	5.17368E-3	9.40561E-2	2.72817E1	-3.26783E1	-3.26675E1	2.67998E1	1.1929E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.79169E-1	-8.95929E-1	-9.04591E0	-9.0409E0	5.36442E-3	9.34362E-2	2.73063E1	-3.26732E1	-3.26467E1	2.67896E1	1.1929E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.02133E-1