[Scan]
initial_time=2015-12-18T20:14:07
final_time=2015-12-18T20:14:26
ip_count=19
run=1020
dataset=1
scan=106
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.79049E-1
ql1_imon=1.32949E-8
ql2_vset=
ql2_vmon=-8.96239E-1
ql2_imon=1.92585E-9
ql3_vset=
ql3_vmon=-9.04627E0
ql3_imon=6.82521E-10
ql4_vset=
ql4_vmon=-9.0405E0
ql4_imon=3.68595E-11
mult1=-9.53661E-9
mult2=-2.64057E-9
rf_tmon=-5.52555E-3
rf_agc=3.25509E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.64797E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61135E0
bslens_imon=2.40522E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19836E1
lens5a_imon=1.97625E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53771E1
cs_ef1b_imon=2.87722E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.39213E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35309E0
lens1_imon=2.80871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64695E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04121E1
cs_ea2_imon=1.56461E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.95333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.39542E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.29686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.32842E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.07044E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26508E0
cs_ionrep_imon=1.22094E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93363E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0207E1
cs_anode1_imon=3.03986E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.39186E-8
tplens_vset=1.4E-1
tplens_vmon=1.59601E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2645E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2656E1
iondef2_imon=1.5901E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02986E2
lens6_imon=2.9841E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.01883E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.258E0
ionrepsh_imon=1.81768E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.19251E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74466E1
cs_ef2b_imon=3.11354E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54056E0
os_ea2_imon=-7.34234E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06037E2
lens4b_imon=2.00265E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71124E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.70317E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91439E-1
os_ef2bup_imon=-5.40344E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=3.44577E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.26488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73718E1
iondef1_imon=1.07405E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.08156E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.28809E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=8.18115E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1174E0
cs_ionaccel_imon=-1.93166E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47049E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=1.42968E-1
window_imon=-1.23661E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.39147E-4
mask2_vset=0.0E0
mask2_vmon=-1.86442E1
mask2_imon=-8.05679E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.64001E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.38706E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=6.8401E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=5.99064E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33375E1
os_fil1_imon=9.44268E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06814E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6488E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.96634E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62632E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65875E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7494E-2
os_fil2_imon=-2.78503E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84864E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96853E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3914E-1
cs_fil2_imon=-2.37379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13042E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22451E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.6384E-1
res40_imon=-2.60586E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.79192E-1	-8.96239E-1	-9.04586E0	-9.04098E0	5.38826E-3	9.34601E-2	2.73198E1	-3.26655E1	-3.2639E1	2.68262E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.03027E-1
2.0E0	2.2E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.79288E-1	-8.95977E-1	-9.04596E0	-9.04078E0	5.50747E-3	9.36985E-2	2.73151E1	-3.26335E1	-3.26684E1	2.67708E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.79169E-1	-8.96072E-1	-9.0457E0	-9.04095E0	5.43594E-3	9.35078E-2	2.72762E1	-3.26443E1	-3.26001E1	2.68175E1	1.19236E-7	2.51611E-3	2.51611E-3	6.3131E-3	2.99981E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.79145E-1	-8.96025E-1	-9.04593E0	-9.04107E0	5.57899E-3	9.33886E-2	2.72432E1	-3.26349E1	-3.26272E1	2.67914E1	1.1924E-7	2.51393E-3	2.51393E-3	6.3074E-3	3.02368E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.78859E-1	-8.95977E-1	-9.04577E0	-9.04071E0	5.72205E-3	9.35078E-2	2.73051E1	-3.26296E1	-3.26555E1	2.67995E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.79049E-1	-8.96096E-1	-9.04582E0	-9.04112E0	5.38826E-3	9.36747E-2	2.72883E1	-3.26735E1	-3.26248E1	2.68292E1	1.1929E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.79025E-1	-8.96192E-1	-9.04574E0	-9.0409E0	5.48363E-3	9.37223E-2	2.73171E1	-3.26873E1	-3.262E1	2.67998E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.79264E-1	-8.9612E-1	-9.04572E0	-9.0409E0	5.4121E-3	9.38654E-2	2.72997E1	-3.26446E1	-3.26404E1	2.68136E1	1.1929E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.79169E-1	-8.96168E-1	-9.04605E0	-9.04083E0	5.43594E-3	9.3317E-2	2.73327E1	-3.26717E1	-3.26314E1	2.67956E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09673E0	-8.78906E-1	-8.96192E-1	-9.04586E0	-9.04086E0	5.53131E-3	9.32455E-2	2.72843E1	-3.26609E1	-3.26493E1	2.68107E1	1.1929E-7	2.51954E-3	2.51954E-3	6.28592E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.79264E-1	-8.95786E-1	-9.04596E0	-9.04112E0	5.55515E-3	9.34362E-2	2.73157E1	-3.26708E1	-3.26661E1	2.68024E1	1.1929E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.79097E-1	-8.95882E-1	-9.04591E0	-9.04114E0	5.36442E-3	9.32217E-2	2.72871E1	-3.26669E1	-3.25984E1	2.67896E1	1.1929E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.79073E-1	-8.9581E-1	-9.04598E0	-9.04124E0	5.50747E-3	9.36031E-2	2.72992E1	-3.26691E1	-3.26313E1	2.6813E1	1.1929E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.02511E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09657E0	-8.79073E-1	-8.9581E-1	-9.04613E0	-9.041E0	5.24521E-3	9.36508E-2	2.73249E1	-3.26524E1	-3.26302E1	2.68094E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02922E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09657E0	-8.79121E-1	-8.96096E-1	-9.04603E0	-9.04083E0	5.31673E-3	9.35316E-2	2.73297E1	-3.26657E1	-3.26482E1	2.68268E1	1.1929E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.79049E-1	-8.96072E-1	-9.04601E0	-9.04076E0	5.24521E-3	9.32932E-2	2.73285E1	-3.26705E1	-3.26314E1	2.6816E1	1.1929E-7	2.50898E-3	2.50898E-3	6.31288E-3	3.01871E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09665E0	-8.78954E-1	-8.96287E-1	-9.04613E0	-9.04105E0	5.53131E-3	9.3627E-2	2.73165E1	-3.26651E1	-3.26434E1	2.68046E1	1.1929E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.79335E-1	-8.96215E-1	-9.04603E0	-9.04083E0	5.67436E-3	9.3627E-2	2.73263E1	-3.2662E1	-3.26201E1	2.68047E1	1.1929E-7	2.52599E-3	2.52599E-3	6.31278E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.79145E-1	-8.9612E-1	-9.0462E0	-9.04086E0	5.57899E-3	9.3317E-2	2.73081E1	-3.26813E1	-3.26549E1	2.68142E1	1.1929E-7	2.51716E-3	2.51716E-3	6.3074E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.79049E-1	-8.96239E-1	-9.04627E0	-9.0405E0	5.50747E-3	9.34362E-2	2.73718E1	-3.2656E1	-3.2645E1	2.6801E1