[Scan]
initial_time=2015-12-18T20:14:34
final_time=2015-12-18T20:14:53
ip_count=19
run=1020
dataset=1
scan=107
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.79264E-1
ql1_imon=1.33182E-8
ql2_vset=
ql2_vmon=-8.95977E-1
ql2_imon=2.03544E-9
ql3_vset=
ql3_vmon=-9.04615E0
ql3_imon=5.79059E-10
ql4_vset=
ql4_vmon=-9.04093E0
ql4_imon=3.70264E-11
mult1=-9.13289E-9
mult2=-2.69778E-9
rf_tmon=-4.86931E-3
rf_agc=3.34389E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.66563E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.67114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19773E1
lens5a_imon=1.97947E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05172E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5334E1
cs_ef1b_imon=2.87566E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=2.41711E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36715E0
lens1_imon=2.59543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6456E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04363E1
cs_ea2_imon=1.53642E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.95135E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.39491E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.28589E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.32374E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.18602E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=3.05406E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20597E0
olens4_imon=3.38607E-8
tplens_vset=1.4E-1
tplens_vmon=1.58015E0
tplens_imon=-4.90409E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26331E1
iondef3_imon=1.50289E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26514E1
iondef2_imon=1.55985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.12241E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22266E0
ionrepsh_imon=1.8277E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.11821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53088E0
os_ea2_imon=-6.12977E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00255E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07034E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.44545E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.2529E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73257E1
iondef1_imon=1.0876E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.2972E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=8.18246E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.89712E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9258E3
multa_neg_imon=8.1759E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.43471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.03313E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49179E0
defgridb_imon=5.8507E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33379E1
os_fil1_imon=9.4436E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07023E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65211E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.98492E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62168E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66589E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66099E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74889E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8139E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.41892E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=3.00942E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9413E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.79192E-1	-8.95834E-1	-9.04615E0	-9.04109E0	5.26905E-3	9.36985E-2	2.72768E1	-3.27062E1	-3.2603E1	2.67986E1	1.1929E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00041E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.78978E-1	-8.95858E-1	-9.04603E0	-9.04069E0	5.07832E-3	9.34124E-2	2.73369E1	-3.2667E1	-3.25991E1	2.6828E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.78716E-1	-8.95858E-1	-9.04591E0	-9.04076E0	5.14984E-3	9.37462E-2	2.73116E1	-3.26461E1	-3.26036E1	2.67752E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.98481E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.78835E-1	-8.96001E-1	-9.04565E0	-9.0409E0	5.43594E-3	9.39846E-2	2.72833E1	-3.26354E1	-3.26691E1	2.68325E1	1.1929E-7	2.51096E-3	2.51096E-3	6.30202E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.79169E-1	-8.95882E-1	-9.04565E0	-9.04095E0	5.45979E-3	9.40084E-2	2.7324E1	-3.26602E1	-3.26349E1	2.67848E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.79025E-1	-8.96025E-1	-9.04596E0	-9.04059E0	5.53131E-3	9.377E-2	2.72528E1	-3.26621E1	-3.26296E1	2.68226E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.78835E-1	-8.95786E-1	-9.04603E0	-9.04095E0	5.57899E-3	9.37939E-2	2.73075E1	-3.26651E1	-3.26266E1	2.6801E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.78835E-1	-8.9581E-1	-9.04589E0	-9.04114E0	5.65052E-3	9.36985E-2	2.73237E1	-3.26759E1	-3.26326E1	2.68226E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.79312E-1	-8.95929E-1	-9.04574E0	-9.04083E0	5.60284E-3	9.37939E-2	2.73189E1	-3.26777E1	-3.26062E1	2.67972E1	1.1929E-7	2.51662E-3	2.51662E-3	6.28006E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.79169E-1	-8.95691E-1	-9.04589E0	-9.04086E0	5.62668E-3	9.377E-2	2.73141E1	-3.26921E1	-3.26374E1	2.6801E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00966E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.78835E-1	-8.96049E-1	-9.04601E0	-9.04088E0	5.29289E-3	9.36508E-2	2.7333E1	-3.26807E1	-3.26613E1	2.68157E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.79049E-1	-8.95977E-1	-9.04593E0	-9.041E0	5.74589E-3	9.36985E-2	2.72873E1	-3.26438E1	-3.26756E1	2.68114E1	1.1929E-7	2.51077E-3	2.51077E-3	6.31798E-3	3.01609E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.78978E-1	-8.95762E-1	-9.04582E0	-9.04131E0	5.36442E-3	9.36508E-2	2.73219E1	-3.26675E1	-3.26182E1	2.68018E1	1.1929E-7	2.51611E-3	2.51611E-3	6.30171E-3	3.02699E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.78882E-1	-8.96025E-1	-9.04622E0	-9.04121E0	5.36442E-3	9.37939E-2	2.7355E1	-3.26915E1	-3.2584E1	2.68082E1	1.19342E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00563E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.78882E-1	-8.96144E-1	-9.04615E0	-9.04093E0	5.65052E-3	9.35316E-2	2.73381E1	-3.26615E1	-3.2635E1	2.68088E1	1.1929E-7	2.51136E-3	2.51136E-3	6.31299E-3	3.00676E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.78954E-1	-8.96144E-1	-9.04624E0	-9.04117E0	5.45979E-3	9.36985E-2	2.73334E1	-3.26844E1	-3.25664E1	2.68508E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00197E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.79335E-1	-8.95977E-1	-9.04629E0	-9.04114E0	5.26905E-3	9.36508E-2	2.73003E1	-3.26699E1	-3.26074E1	2.6804E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.79049E-1	-8.95953E-1	-9.04627E0	-9.041E0	5.76973E-3	9.35078E-2	2.73116E1	-3.26644E1	-3.26201E1	2.68316E1	1.1929E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.79145E-1	-8.96144E-1	-9.04639E0	-9.04098E0	5.50747E-3	9.33409E-2	2.72898E1	-3.26805E1	-3.26523E1	2.68136E1	1.1929E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.79264E-1	-8.95977E-1	-9.04615E0	-9.04093E0	5.22137E-3	9.33886E-2	2.73257E1	-3.26514E1	-3.26331E1	2.68064E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.00942E-1