[Scan]
initial_time=2015-12-18T20:15:00
final_time=2015-12-18T20:15:20
ip_count=19
run=1020
dataset=1
scan=108
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.7893E-1
ql1_imon=1.32833E-8
ql2_vset=
ql2_vmon=-8.95977E-1
ql2_imon=1.89371E-9
ql3_vset=
ql3_vmon=-9.04608E0
ql3_imon=5.50473E-10
ql4_vset=
ql4_vmon=-9.04083E0
ql4_imon=8.13484E-11
mult1=-9.31021E-9
mult2=-2.68994E-9
rf_tmon=-5.50641E-3
rf_agc=3.30908E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.74644E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=2.87674E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02016E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.41278E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40741E0
lens1_imon=2.67114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03961E1
cs_ea2_imon=1.55985E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=2.95603E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.40219E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.28553E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.32302E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63894E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=1.21233E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.9329E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=3.04685E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.39489E-8
tplens_vset=1.4E-1
tplens_vmon=1.60719E0
tplens_imon=-3.28186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26543E1
iondef3_imon=1.47405E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26537E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98285E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.90701E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29476E0
ionrepsh_imon=1.82806E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.19432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5429E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00396E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70963E1
cs_ef2a_imon=3.17119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18447E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.44112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30036E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73252E1
iondef1_imon=1.11608E-5
iondef4_vset=2.691E1
iondef4_vmon=2.678E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.33768E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=8.18652E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47111E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.51125E-6
window_vset=0.0E0
window_vmon=1.50669E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-7.92292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.53422E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.3554E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.36478E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41961E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33379E1
os_fil1_imon=9.44504E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0453E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64874E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=9.9657E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66418E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76417E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.01755E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17866E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22719E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.50789E-3
foreline_cvt_pmon=2.50789E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.4819E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.79335E-1	-8.96144E-1	-9.04608E0	-9.04102E0	5.36442E-3	9.35078E-2	2.73517E1	-3.26832E1	-3.26325E1	2.68012E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.79407E-1	-8.9612E-1	-9.04617E0	-9.041E0	4.98295E-3	9.36508E-2	2.73663E1	-3.26695E1	-3.26585E1	2.67882E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.79383E-1	-8.96025E-1	-9.04617E0	-9.04117E0	5.38826E-3	9.38416E-2	2.73468E1	-3.26706E1	-3.26167E1	2.68308E1	1.1929E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.0201E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.79073E-1	-8.96049E-1	-9.04598E0	-9.04112E0	5.07832E-3	9.35078E-2	2.73216E1	-3.26691E1	-3.26136E1	2.67986E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.02769E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.79169E-1	-8.95762E-1	-9.04598E0	-9.04095E0	4.93526E-3	9.36031E-2	2.73177E1	-3.26524E1	-3.26278E1	2.68298E1	1.1929E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09665E0	-8.79049E-1	-8.95929E-1	-9.04613E0	-9.04105E0	5.05447E-3	9.3627E-2	2.72733E1	-3.26609E1	-3.26392E1	2.6801E1	1.1929E-7	2.51581E-3	2.51581E-3	6.34661E-3	3.00144E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.78811E-1	-8.95882E-1	-9.04601E0	-9.04102E0	5.36442E-3	9.35316E-2	2.73051E1	-3.26428E1	-3.26536E1	2.6798E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09665E0	-8.79002E-1	-8.96192E-1	-9.0462E0	-9.04107E0	5.74589E-3	9.3627E-2	2.73261E1	-3.26717E1	-3.26332E1	2.68325E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.79169E-1	-8.96025E-1	-9.04605E0	-9.04107E0	5.38826E-3	9.38416E-2	2.72931E1	-3.26741E1	-3.26152E1	2.68002E1	1.1929E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.79145E-1	-8.95882E-1	-9.04589E0	-9.04076E0	5.34058E-3	9.377E-2	2.72871E1	-3.26338E1	-3.26621E1	2.67917E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9926E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.79192E-1	-8.96239E-1	-9.04629E0	-9.04109E0	5.14984E-3	9.35555E-2	2.73111E1	-3.26807E1	-3.26296E1	2.68088E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.79025E-1	-8.95834E-1	-9.04589E0	-9.04105E0	5.22137E-3	9.34362E-2	2.73111E1	-3.26777E1	-3.26549E1	2.68111E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01085E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.79216E-1	-8.96001E-1	-9.04598E0	-9.04069E0	5.31673E-3	9.35555E-2	2.73039E1	-3.26591E1	-3.26182E1	2.68352E1	1.1929E-7	2.51116E-3	2.51116E-3	6.35692E-3	2.9926E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.79049E-1	-8.95715E-1	-9.04605E0	-9.04107E0	4.93526E-3	9.35793E-2	2.73428E1	-3.26779E1	-3.26296E1	2.68208E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09665E0	-8.7893E-1	-8.96144E-1	-9.04627E0	-9.04124E0	5.36442E-3	9.33886E-2	2.73105E1	-3.26663E1	-3.26122E1	2.6798E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.78906E-1	-8.96168E-1	-9.04586E0	-9.04083E0	5.31673E-3	9.35078E-2	2.72588E1	-3.26296E1	-3.2626E1	2.67962E1	1.1929E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.01742E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.79049E-1	-8.96168E-1	-9.04624E0	-9.04078E0	5.29289E-3	9.34601E-2	2.73381E1	-3.26735E1	-3.26458E1	2.67986E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.79049E-1	-8.96192E-1	-9.0462E0	-9.04078E0	5.34058E-3	9.36031E-2	2.73291E1	-3.26591E1	-3.2638E1	2.67625E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.79121E-1	-8.96335E-1	-9.04641E0	-9.04083E0	5.31673E-3	9.34362E-2	2.73405E1	-3.26591E1	-3.26416E1	2.68298E1	1.1929E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.7893E-1	-8.95977E-1	-9.04608E0	-9.04083E0	5.26905E-3	9.32932E-2	2.73252E1	-3.26537E1	-3.26543E1	2.678E1	1.1929E-7	2.50789E-3	2.50789E-3	6.32386E-3	3.00302E-1