[Scan]
initial_time=2015-12-18T20:15:27
final_time=2015-12-18T20:15:46
ip_count=19
run=1020
dataset=1
scan=109
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.7862E-1
ql1_imon=1.32778E-8
ql2_vset=
ql2_vmon=-8.95739E-1
ql2_imon=1.90814E-9
ql3_vset=
ql3_vmon=-9.04591E0
ql3_imon=5.11146E-10
ql4_vset=
ql4_vmon=-9.04076E0
ql4_imon=6.88434E-11
mult1=-9.74039E-9
mult2=-2.66272E-9
rf_tmon=-4.26609E-3
rf_agc=3.40185E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.6929E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=1.97081E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=2.8926E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0515E1
cs_ea1_imon=2.43009E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36655E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0381E1
cs_ea2_imon=1.53317E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.9499E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.40146E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.27977E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15396E1
os_ea1_imon=2.30355E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63864E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=1.19791E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=3.05118E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.39179E-8
tplens_vset=1.4E-1
tplens_vmon=1.59577E0
tplens_imon=-3.42605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.50289E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.5822E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98274E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.01748E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=1.83058E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.18098E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.11208E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5435E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04975E0
os_ef2alow_imon=-2.69519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13642E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.44797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.2583E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73219E1
iondef1_imon=1.10635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.06827E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.36612E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=8.16322E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-2.05728E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47064E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=1.47065E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-8.03104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.86948E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.45994E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.32153E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30532E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33385E1
os_fil1_imon=9.42468E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0778E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65277E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30919E1
cs_fil1_imon=9.97879E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61915E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66351E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.57071E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71851E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.23542E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22621E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.29569E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.78954E-1	-8.96025E-1	-9.0461E0	-9.04078E0	5.22137E-3	9.34839E-2	2.73123E1	-3.26717E1	-3.26386E1	2.68175E1	1.1929E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.01871E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.79216E-1	-8.95786E-1	-9.04613E0	-9.04095E0	5.29289E-3	9.36031E-2	2.73123E1	-3.26711E1	-3.2653E1	2.67801E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.03449E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.79097E-1	-8.96001E-1	-9.04574E0	-9.04083E0	5.17368E-3	9.36985E-2	2.73151E1	-3.26744E1	-3.26366E1	2.6818E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.03712E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.78716E-1	-8.95739E-1	-9.04577E0	-9.04112E0	5.19753E-3	9.35316E-2	2.7311E1	-3.26596E1	-3.26124E1	2.68334E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.78716E-1	-8.95834E-1	-9.04584E0	-9.04088E0	5.31673E-3	9.34839E-2	2.73165E1	-3.26699E1	-3.26284E1	2.67511E1	1.1929E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.78763E-1	-8.95786E-1	-9.0462E0	-9.04064E0	5.14984E-3	9.35316E-2	2.73051E1	-3.26756E1	-3.26537E1	2.68169E1	1.1929E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.78716E-1	-8.95715E-1	-9.04634E0	-9.0409E0	5.03063E-3	9.36985E-2	2.72715E1	-3.26518E1	-3.26398E1	2.67986E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.78787E-1	-8.95691E-1	-9.0462E0	-9.04076E0	5.17368E-3	9.38416E-2	2.73366E1	-3.26674E1	-3.26279E1	2.6802E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.78739E-1	-8.95619E-1	-9.04596E0	-9.04107E0	5.50747E-3	9.36031E-2	2.72999E1	-3.26452E1	-3.26467E1	2.67877E1	1.1929E-7	2.51733E-3	2.51733E-3	6.3375E-3	3.01917E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.78882E-1	-8.96072E-1	-9.04567E0	-9.04069E0	5.38826E-3	9.36508E-2	2.73682E1	-3.2675E1	-3.26195E1	2.68232E1	1.1929E-7	2.52035E-3	2.52035E-3	6.32087E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.78835E-1	-8.95834E-1	-9.04589E0	-9.04143E0	5.22137E-3	9.33886E-2	2.73015E1	-3.26693E1	-3.26194E1	2.67836E1	1.1929E-7	2.52318E-3	2.52318E-3	6.34588E-3	3.02922E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09673E0	-8.78692E-1	-8.95762E-1	-9.04591E0	-9.04114E0	5.34058E-3	9.36508E-2	2.73405E1	-3.26771E1	-3.26218E1	2.67427E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.78596E-1	-8.95643E-1	-9.04584E0	-9.04105E0	5.17368E-3	9.32932E-2	2.73063E1	-3.26632E1	-3.26207E1	2.68569E1	1.1929E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.0148E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.78739E-1	-8.95643E-1	-9.04605E0	-9.04102E0	5.05447E-3	9.34601E-2	2.72892E1	-3.26691E1	-3.26124E1	2.68007E1	1.1929E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01871E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.78811E-1	-8.95882E-1	-9.0461E0	-9.041E0	5.36442E-3	9.3627E-2	2.73051E1	-3.26789E1	-3.26164E1	2.68112E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.78787E-1	-8.95929E-1	-9.04622E0	-9.04109E0	5.43594E-3	9.35555E-2	2.73117E1	-3.265E1	-3.26819E1	2.67902E1	1.1929E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00197E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.78859E-1	-8.95953E-1	-9.04593E0	-9.04119E0	5.57899E-3	9.33409E-2	2.73069E1	-3.26879E1	-3.26338E1	2.68028E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01609E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.78572E-1	-8.96025E-1	-9.04582E0	-9.0409E0	5.14984E-3	9.34839E-2	2.72868E1	-3.2649E1	-3.26343E1	2.68325E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.78787E-1	-8.9581E-1	-9.04565E0	-9.04093E0	5.26905E-3	9.3317E-2	2.73321E1	-3.26621E1	-3.26536E1	2.6804E1	1.1929E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.7862E-1	-8.95739E-1	-9.04591E0	-9.04076E0	5.10216E-3	9.34362E-2	2.73219E1	-3.26554E1	-3.26296E1	2.68172E1	1.1929E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.9841E-1