[Scan]
initial_time=2015-12-18T20:15:54
final_time=2015-12-18T20:16:23
ip_count=19
run=1020
dataset=1
scan=110
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.78954E-1
ql1_imon=1.32562E-8
ql2_vset=
ql2_vmon=-8.95739E-1
ql2_imon=1.84354E-9
ql3_vset=
ql3_vmon=-9.04589E0
ql3_imon=5.34463E-10
ql4_vset=
ql4_vmon=-9.04074E0
ql4_imon=6.34193E-11
mult1=-9.42733E-9
mult2=-2.65074E-9
rf_tmon=-4.68666E-3
rf_agc=3.34598E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.70394E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66313E0
bslens_imon=2.38274E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20277E1
lens5a_imon=1.97694E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.88972E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.42396E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43505E0
lens1_imon=2.58462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.54831E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=2.94125E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.39629E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.29022E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15516E1
os_ea1_imon=2.31797E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63888E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24489E0
cs_ionrep_imon=1.21522E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93326E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=3.03676E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.38313E-8
tplens_vset=1.4E-1
tplens_vmon=1.56693E0
tplens_imon=-2.20037E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.265E1
iondef3_imon=1.47513E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.06448E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=1.84356E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.17053E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55071E0
os_ea2_imon=-5.19248E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00511E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.17119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2145E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.43716E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67978E1
iondef4_imon=1.07764E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.31589E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=8.17996E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.96719E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56015E1
einzel_imon=7.50764E-6
window_vset=0.0E0
window_vmon=1.75897E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.8611E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.24943E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.46355E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.11965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26322E0
defgridb_imon=5.80023E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33413E1
os_fil1_imon=9.41339E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05467E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65405E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=9.96576E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6242E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66814E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.71258E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74042E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38456E-1
cs_fil2_imon=-2.47376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2272E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.86922E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.79121E-1	-8.95977E-1	-9.0462E0	-9.04086E0	5.76973E-3	9.35316E-2	2.73139E1	-3.26514E1	-3.26124E1	2.68004E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.98481E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.79192E-1	-8.95882E-1	-9.0462E0	-9.04074E0	5.67436E-3	9.31978E-2	2.73082E1	-3.26266E1	-3.26272E1	2.67872E1	1.1929E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.79169E-1	-8.96263E-1	-9.04598E0	-9.04083E0	5.53131E-3	9.3317E-2	2.73694E1	-3.26446E1	-3.26422E1	2.67902E1	1.1929E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.01209E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.79025E-1	-8.96049E-1	-9.04624E0	-9.04112E0	5.22137E-3	9.35316E-2	2.72957E1	-3.26844E1	-3.26343E1	2.68209E1	1.1929E-7	2.52448E-3	2.52448E-3	6.31798E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.79145E-1	-8.96215E-1	-9.04646E0	-9.04102E0	5.24521E-3	9.32455E-2	2.73093E1	-3.26561E1	-3.25864E1	2.68238E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.79025E-1	-8.96096E-1	-9.04644E0	-9.04095E0	5.24521E-3	9.37462E-2	2.72937E1	-3.265E1	-3.26008E1	2.68184E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31014E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.78859E-1	-8.95858E-1	-9.04601E0	-9.04102E0	5.07832E-3	9.36508E-2	2.73051E1	-3.26494E1	-3.2623E1	2.67896E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09704E0	-8.78978E-1	-8.95882E-1	-9.04601E0	-9.04102E0	5.00679E-3	9.37223E-2	2.73045E1	-3.26404E1	-3.26116E1	2.67914E1	1.19341E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.78954E-1	-8.95691E-1	-9.04639E0	-9.041E0	4.91142E-3	9.35555E-2	2.73111E1	-3.26332E1	-3.26561E1	2.68424E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.79002E-1	-8.96072E-1	-9.04617E0	-9.04098E0	5.26905E-3	9.36031E-2	2.72835E1	-3.26729E1	-3.26272E1	2.67992E1	1.1929E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.79169E-1	-8.95834E-1	-9.04577E0	-9.04074E0	5.17368E-3	9.34362E-2	2.73039E1	-3.26675E1	-3.2614E1	2.68322E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.79049E-1	-8.96049E-1	-9.0457E0	-9.04107E0	5.26905E-3	9.36985E-2	2.73291E1	-3.26446E1	-3.26368E1	2.68076E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.7924E-1	-8.96072E-1	-9.04593E0	-9.041E0	5.10216E-3	9.38892E-2	2.72769E1	-3.26939E1	-3.26362E1	2.6777E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.78978E-1	-8.96025E-1	-9.04603E0	-9.04117E0	5.26905E-3	9.37462E-2	2.72971E1	-3.26334E1	-3.26278E1	2.68004E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.79121E-1	-8.96072E-1	-9.04608E0	-9.04086E0	5.14984E-3	9.36985E-2	2.73108E1	-3.26602E1	-3.26414E1	2.68186E1	1.1929E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.97499E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.79002E-1	-8.96287E-1	-9.04601E0	-9.04086E0	5.29289E-3	9.33647E-2	2.73219E1	-3.26429E1	-3.26117E1	2.6797E1	1.19264E-7	2.51809E-3	2.51809E-3	6.31555E-3	3.00896E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.78954E-1	-8.96001E-1	-9.04598E0	-9.04052E0	5.34058E-3	9.30071E-2	2.72266E1	-3.25776E1	-3.26579E1	2.68142E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.79002E-1	-8.96025E-1	-9.04598E0	-9.04098E0	5.22137E-3	9.34601E-2	2.73039E1	-3.26783E1	-3.2614E1	2.68268E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.78835E-1	-8.9612E-1	-9.04582E0	-9.04078E0	5.65052E-3	9.35316E-2	2.73075E1	-3.26879E1	-3.26458E1	2.68268E1	1.1929E-7	2.51755E-3	2.51755E-3	6.32916E-3	2.98959E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.78954E-1	-8.95739E-1	-9.04589E0	-9.04074E0	5.53131E-3	9.33647E-2	2.73267E1	-3.26717E1	-3.265E1	2.67978E1