[Scan]
initial_time=2015-12-18T20:16:33
final_time=2015-12-18T20:17:02
ip_count=19
run=1020
dataset=1
scan=111
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08855E-4
ql1_vset=
ql1_vmon=-8.78882E-1
ql1_imon=1.32652E-8
ql2_vset=
ql2_vmon=-8.95762E-1
ql2_imon=1.95577E-9
ql3_vset=
ql3_vmon=-9.04593E0
ql3_imon=5.32615E-10
ql4_vset=
ql4_vmon=-9.04098E0
ql4_imon=7.08818E-11
mult1=-9.25877E-9
mult2=-2.6208E-9
rf_tmon=-5.02313E-3
rf_agc=3.30332E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.71424E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19959E1
lens5a_imon=1.9719E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53018E1
cs_ef1b_imon=2.87513E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=2.4117E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38398E0
lens1_imon=2.78289E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.96931E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04087E1
cs_ea2_imon=1.54363E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=2.95611E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.39048E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.29443E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1542E1
os_ea1_imon=2.31761E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6374E1
os_ef1bup_imon=3.07635E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.20116E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.05307E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=3.39088E-8
tplens_vset=1.4E-1
tplens_vmon=1.58496E0
tplens_imon=-3.9668E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26494E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.06675E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2503E0
ionrepsh_imon=1.82193E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.19865E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74866E1
cs_ef2b_imon=3.11597E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5471E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00388E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71235E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07367E0
os_ef2alow_imon=-2.82828E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.33721E-1
os_ef2bup_imon=-5.42429E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10857E1
os_restr2_imon=3.435E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.24472E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73309E1
iondef1_imon=1.10274E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.05653E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.36144E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=8.17003E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12782E0
cs_ionaccel_imon=-1.82393E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47171E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56353E1
einzel_imon=7.61486E-6
window_vset=0.0E0
window_vmon=1.84671E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.38921E-4
mask2_vset=0.0E0
mask2_vmon=-1.85956E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=7.09081E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.55007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50169E3
multb_neg_imon=7.18093E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=6.04898E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33398E1
os_fil1_imon=9.43828E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06437E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65242E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.99304E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62129E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66526E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81576E-2
os_fil2_imon=-2.79661E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.75018E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60895E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37767E-1
cs_fil2_imon=-2.76186E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.5275E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22633E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.97445E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5068E-3
foreline_cvt_pmon=2.5068E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.30449E-1
res40_imon=-2.52245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.78978E-1	-8.96287E-1	-9.04565E0	-9.04102E0	5.10216E-3	9.32932E-2	2.73165E1	-3.26855E1	-3.2599E1	2.68082E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.97963E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.79049E-1	-8.96335E-1	-9.04572E0	-9.04105E0	5.19753E-3	9.34124E-2	2.73538E1	-3.26621E1	-3.265E1	2.67896E1	1.19264E-7	2.51716E-3	2.51716E-3	6.31288E-3	3.02527E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.7893E-1	-8.95953E-1	-9.04572E0	-9.04109E0	5.36442E-3	9.36508E-2	2.73027E1	-3.26649E1	-3.2629E1	2.6837E1					
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.78763E-1	-8.96144E-1	-9.0461E0	-9.04086E0	4.98295E-3	9.35078E-2	2.73116E1	-3.26431E1	-3.2639E1	2.68082E1	1.19264E-7	2.51471E-3	2.51471E-3	6.31278E-3	3.00582E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.78453E-1	-8.95953E-1	-9.04598E0	-9.04093E0	5.29289E-3	9.3627E-2	2.73027E1	-3.26531E1	-3.26337E1	2.68331E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.78668E-1	-8.95977E-1	-9.04555E0	-9.04107E0	5.36442E-3	9.34839E-2	2.73129E1	-3.26915E1	-3.26314E1	2.6825E1	1.1929E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.78954E-1	-8.96001E-1	-9.04574E0	-9.04121E0	5.48363E-3	9.35316E-2	2.72849E1	-3.27001E1	-3.26168E1	2.6795E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.78906E-1	-8.96144E-1	-9.04579E0	-9.04124E0	5.76973E-3	9.36747E-2	2.73454E1	-3.26651E1	-3.26296E1	2.68304E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.78692E-1	-8.96144E-1	-9.04577E0	-9.04093E0	5.55515E-3	9.33886E-2	2.73135E1	-3.26645E1	-3.262E1	2.67962E1	1.1929E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.78882E-1	-8.96096E-1	-9.04584E0	-9.04112E0	5.45979E-3	9.34124E-2	2.73086E1	-3.26508E1	-3.26148E1	2.67956E1	1.1929E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.78859E-1	-8.96263E-1	-9.0456E0	-9.04095E0	5.31673E-3	9.31978E-2	2.73099E1	-3.26765E1	-3.26086E1	2.68364E1	1.1929E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.99175E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.78882E-1	-8.96192E-1	-9.04565E0	-9.04112E0	5.24521E-3	9.35555E-2	2.73482E1	-3.26691E1	-3.26573E1	2.67962E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.78716E-1	-8.95953E-1	-9.04615E0	-9.04071E0	4.98295E-3	9.35555E-2	2.72739E1	-3.26657E1	-3.26536E1	2.67962E1	1.1929E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00453E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.78739E-1	-8.96192E-1	-9.04591E0	-9.04086E0	5.10216E-3	9.34839E-2	2.73325E1	-3.27048E1	-3.26639E1	2.68166E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9978E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.78668E-1	-8.95882E-1	-9.04651E0	-9.04083E0	5.45979E-3	9.34601E-2	2.73034E1	-3.26387E1	-3.26189E1	2.68179E1	1.1929E-7	2.51682E-3	2.51682E-3	6.3074E-3	3.00726E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.78906E-1	-8.96001E-1	-9.04608E0	-9.04105E0	5.19753E-3	9.37223E-2	2.72559E1	-3.26753E1	-3.26295E1	2.68215E1	1.1929E-7	2.52023E-3	2.52023E-3	6.33253E-3	3.0101E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.78882E-1	-8.96144E-1	-9.04596E0	-9.04098E0	5.31673E-3	9.36508E-2	2.72696E1	-3.26415E1	-3.25905E1	2.68377E1	1.1929E-7	2.51498E-3	2.51498E-3	6.33919E-3	3.006E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.78906E-1	-8.96168E-1	-9.04627E0	-9.04098E0	5.45979E-3	9.36508E-2	2.73393E1	-3.2675E1	-3.26201E1	2.68436E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33565E-3	2.9926E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.7893E-1	-8.96025E-1	-9.04608E0	-9.04078E0	5.36442E-3	9.37462E-2	2.73201E1	-3.26597E1	-3.2647E1	2.67818E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.78882E-1	-8.95762E-1	-9.04593E0	-9.04098E0	5.6982E-3	9.34601E-2	2.73309E1	-3.26494E1	-3.26164E1	2.67788E1	1.1929E-7	2.5068E-3	2.5068E-3	6.32386E-3	2.97445E-1