[Scan]
initial_time=2015-12-18T20:17:51
final_time=2015-12-18T20:18:19
ip_count=19
run=1020
dataset=1
scan=113
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08841E-4
ql1_vset=
ql1_vmon=-8.7924E-1
ql1_imon=1.32423E-8
ql2_vset=
ql2_vmon=-8.95762E-1
ql2_imon=1.90445E-9
ql3_vset=
ql3_vmon=-9.04636E0
ql3_imon=4.14622E-10
ql4_vset=
ql4_vmon=-9.04095E0
ql4_imon=5.42521E-11
mult1=-9.53482E-9
mult2=-2.71934E-9
rf_tmon=-4.78083E-3
rf_agc=3.33268E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.67522E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62047E0
bslens_imon=2.67474E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20277E1
lens5a_imon=1.98019E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=2.89188E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.01998E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=2.44306E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42063E0
lens1_imon=2.47286E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.56418E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.94342E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.39868E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.28337E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15047E1
os_ea1_imon=2.32049E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27793E0
cs_ionrep_imon=1.20548E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93261E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.05478E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.38953E-8
tplens_vset=1.4E-1
tplens_vmon=1.59637E0
tplens_imon=-3.7505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.48775E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26773E1
iondef2_imon=1.56309E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.9845E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.02962E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=1.81869E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5441E0
os_ea2_imon=-7.4636E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.19029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19048E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.44833E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.25254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.07246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68209E1
iondef4_imon=1.07404E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.38418E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=8.16385E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56513E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.68088E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.38994E-4
mask2_vset=0.0E0
mask2_vmon=-1.8626E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=6.89975E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93635E3
defgrida_imon=7.56306E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50062E3
multb_neg_imon=7.57387E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33372E1
os_fil1_imon=9.44438E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06308E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65005E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.96029E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61777E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66445E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90604E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79456E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.03449E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.40071E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.78978E-1	-8.96072E-1	-9.04629E0	-9.04064E0	5.4121E-3	9.37462E-2	2.73204E1	-3.26885E1	-3.26343E1	2.68214E1	1.1929E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.00302E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.78954E-1	-8.96025E-1	-9.0461E0	-9.04086E0	5.10216E-3	9.35793E-2	2.72829E1	-3.26831E1	-3.26494E1	2.68106E1	1.1929E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.03804E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.78954E-1	-8.96049E-1	-9.04605E0	-9.04095E0	5.4121E-3	9.36985E-2	2.73334E1	-3.26762E1	-3.26349E1	2.67873E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.01085E-1
4.0E0	1.2E1	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.78906E-1	-8.96096E-1	-9.04596E0	-9.04114E0	5.17368E-3	9.33409E-2	2.72829E1	-3.26332E1	-3.26254E1	2.68004E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.7893E-1	-8.96239E-1	-9.04603E0	-9.04105E0	5.4121E-3	9.35078E-2	2.72919E1	-3.26368E1	-3.2614E1	2.68088E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.7893E-1	-8.96287E-1	-9.04629E0	-9.04102E0	5.126E-3	9.32217E-2	2.73075E1	-3.26632E1	-3.26101E1	2.68134E1	1.1929E-7	2.51334E-3	2.51334E-3	6.35692E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.79002E-1	-8.96358E-1	-9.04622E0	-9.04088E0	5.55515E-3	9.34839E-2	2.72997E1	-3.26554E1	-3.26314E1	2.67974E1	1.1929E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09642E0	-8.78692E-1	-8.96168E-1	-9.04641E0	-9.04105E0	5.34058E-3	9.35555E-2	2.73057E1	-3.27098E1	-3.25894E1	2.68304E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.78835E-1	-8.96049E-1	-9.0461E0	-9.04121E0	5.38826E-3	9.34839E-2	2.73297E1	-3.26819E1	-3.26434E1	2.68184E1	1.1929E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.00197E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.79049E-1	-8.96072E-1	-9.04586E0	-9.04102E0	5.26905E-3	9.36508E-2	2.73195E1	-3.26579E1	-3.26597E1	2.68208E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.79073E-1	-8.96049E-1	-9.04601E0	-9.04121E0	5.29289E-3	9.34124E-2	2.73279E1	-3.26681E1	-3.26464E1	2.6813E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.79216E-1	-8.95882E-1	-9.04598E0	-9.04088E0	5.43594E-3	9.35555E-2	2.73594E1	-3.2741E1	-3.27174E1	2.68148E1	1.1929E-7	2.51809E-3	2.51809E-3	6.33188E-3	3.01934E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.7893E-1	-8.95882E-1	-9.04608E0	-9.04129E0	5.24521E-3	9.35316E-2	2.72799E1	-3.26326E1	-3.26825E1	2.6803E1	1.1929E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.78859E-1	-8.95905E-1	-9.04603E0	-9.04136E0	5.29289E-3	9.34601E-2	2.73051E1	-3.26488E1	-3.26356E1	2.6837E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.78763E-1	-8.96192E-1	-9.04617E0	-9.04129E0	5.48363E-3	9.3317E-2	2.73476E1	-3.26708E1	-3.26113E1	2.68148E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.98481E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.79002E-1	-8.96049E-1	-9.04629E0	-9.04107E0	5.22137E-3	9.34839E-2	2.73057E1	-3.26747E1	-3.26591E1	2.68202E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.98156E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.78906E-1	-8.96168E-1	-9.04624E0	-9.0409E0	5.34058E-3	9.3627E-2	2.72986E1	-3.26431E1	-3.26596E1	2.68298E1	1.19264E-7	2.51052E-3	2.51052E-3	6.33461E-3	3.02324E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.79073E-1	-8.96049E-1	-9.0462E0	-9.04112E0	5.38826E-3	9.34124E-2	2.72744E1	-3.26467E1	-3.26172E1	2.67931E1					
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.79192E-1	-8.96072E-1	-9.04624E0	-9.04102E0	5.34058E-3	9.35793E-2	2.73111E1	-3.26693E1	-3.26783E1	2.67824E1	1.1929E-7	2.50989E-3	2.50989E-3	6.31817E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.7924E-1	-8.95762E-1	-9.04636E0	-9.04095E0	5.50747E-3	9.33409E-2	2.73063E1	-3.26773E1	-3.26236E1	2.68209E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.03449E-1