[Scan]
initial_time=2015-12-18T20:19:46
final_time=2015-12-18T20:20:15
ip_count=19
run=1020
dataset=1
scan=116
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.78501E-1
ql1_imon=1.32229E-8
ql2_vset=
ql2_vmon=-8.95977E-1
ql2_imon=1.91846E-9
ql3_vset=
ql3_vmon=-9.04615E0
ql3_imon=3.63314E-10
ql4_vset=
ql4_vmon=-9.04102E0
ql4_imon=6.44803E-11
mult1=-9.32499E-9
mult2=-2.67769E-9
rf_tmon=-5.47417E-3
rf_agc=3.24223E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=1.70475E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6361E0
bslens_imon=2.56299E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20205E1
lens5a_imon=1.97118E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=2.88467E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05042E1
cs_ea1_imon=2.41494E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37136E0
lens1_imon=2.32867E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04195E1
cs_ea2_imon=1.52849E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.94594E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.4008E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.28445E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14681E1
os_ea1_imon=2.32662E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.06956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26231E0
cs_ionrep_imon=1.19935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=3.03532E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=3.38888E-8
tplens_vset=1.4E-1
tplens_vmon=1.56873E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26544E1
iondef3_imon=1.48919E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.56994E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98187E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.04745E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=1.84572E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.11425E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55852E0
os_ea2_imon=-8.61719E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06044E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71486E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07798E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05833E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11003E1
os_restr2_imon=3.43356E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.31911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.2511E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72616E1
iondef1_imon=1.06741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68036E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.31244E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=8.14531E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.93475E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.5653E-6
window_vset=0.0E0
window_vmon=1.48267E-1
window_imon=-1.23198E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-8.96807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9261E3
multa_neg_imon=7.11965E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93786E3
defgrida_imon=7.12686E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50168E3
multb_neg_imon=8.18311E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29329E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33393E1
os_fil1_imon=9.43802E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06578E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65572E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30844E1
cs_fil1_imon=9.97465E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62582E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66658E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69968E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74288E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59993E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22613E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.95332E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.78954E-1	-8.95309E-1	-9.04605E0	-9.04067E0	5.45979E-3	9.34124E-2	2.73098E1	-3.26691E1	-3.2626E1	2.68166E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.78811E-1	-8.95619E-1	-9.04605E0	-9.04074E0	5.65052E-3	9.34839E-2	2.73216E1	-3.26572E1	-3.26205E1	2.68364E1	1.19186E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.78906E-1	-8.95715E-1	-9.04605E0	-9.04069E0	5.14984E-3	9.34601E-2	2.73204E1	-3.26579E1	-3.26413E1	2.67938E1	1.1929E-7	2.52139E-3	2.52139E-3	6.34661E-3	3.0041E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.78692E-1	-8.95905E-1	-9.04615E0	-9.04062E0	5.34058E-3	9.36747E-2	2.72797E1	-3.26396E1	-3.26148E1	2.68052E1	1.1929E-7	2.51525E-3	2.51525E-3	6.28592E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09688E0	-8.78787E-1	-8.96072E-1	-9.04615E0	-9.041E0	5.29289E-3	9.35555E-2	2.73177E1	-3.26561E1	-3.26627E1	2.68046E1	1.1929E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.78787E-1	-8.95548E-1	-9.04622E0	-9.04083E0	5.48363E-3	9.34362E-2	2.72945E1	-3.26561E1	-3.26301E1	2.68372E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.79383E-1	-8.95953E-1	-9.04584E0	-9.04069E0	5.4121E-3	9.35078E-2	2.72933E1	-3.2659E1	-3.26526E1	2.68238E1	1.1929E-7	2.51686E-3	2.51686E-3	6.31548E-3	3.00069E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.79097E-1	-8.95905E-1	-9.04593E0	-9.04078E0	5.29289E-3	9.3627E-2	2.73135E1	-3.26536E1	-3.26326E1	2.68425E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.79216E-1	-8.95882E-1	-9.04601E0	-9.04102E0	5.126E-3	9.377E-2	2.72594E1	-3.26633E1	-3.26248E1	2.68082E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.03712E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.79097E-1	-8.96072E-1	-9.04605E0	-9.0409E0	5.10216E-3	9.3627E-2	2.72871E1	-3.26446E1	-3.26206E1	2.67992E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.78644E-1	-8.96049E-1	-9.04596E0	-9.04102E0	5.38826E-3	9.36747E-2	2.7301E1	-3.26642E1	-3.26486E1	2.68106E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00966E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.78596E-1	-8.96192E-1	-9.04613E0	-9.04117E0	5.36442E-3	9.35316E-2	2.73577E1	-3.2656E1	-3.26058E1	2.68028E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.01347E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.78429E-1	-8.96049E-1	-9.04591E0	-9.04109E0	5.07832E-3	9.35555E-2	2.73442E1	-3.26561E1	-3.26428E1	2.68154E1	1.1929E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.78501E-1	-8.96072E-1	-9.04596E0	-9.04098E0	5.67436E-3	9.3627E-2	2.73111E1	-3.26597E1	-3.2623E1	2.68394E1	1.1929E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.0201E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.78406E-1	-8.96001E-1	-9.04593E0	-9.04098E0	5.65052E-3	9.38654E-2	2.72797E1	-3.26714E1	-3.26266E1	2.6777E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.78692E-1	-8.96025E-1	-9.04591E0	-9.04069E0	5.45979E-3	9.35793E-2	2.73153E1	-3.26543E1	-3.26146E1	2.68064E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.78668E-1	-8.95572E-1	-9.04596E0	-9.04114E0	5.76973E-3	9.35555E-2	2.72925E1	-3.2644E1	-3.2653E1	2.6818E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.78811E-1	-8.955E-1	-9.04603E0	-9.04119E0	5.55515E-3	9.34839E-2	2.73252E1	-3.26856E1	-3.26337E1	2.68376E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.78406E-1	-8.9581E-1	-9.04605E0	-9.04105E0	5.22137E-3	9.37939E-2	2.73171E1	-3.26777E1	-3.2632E1	2.68202E1	1.1929E-7	2.51498E-3	2.51498E-3	6.29684E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.78501E-1	-8.95977E-1	-9.04615E0	-9.04102E0	5.55515E-3	9.35555E-2	2.72616E1	-3.26614E1	-3.26544E1	2.68036E1	1.1929E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00041E-1