[Scan]
initial_time=2015-12-18T20:21:03
final_time=2015-12-18T20:21:32
ip_count=19
run=1020
dataset=1
scan=118
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.78716E-1
ql1_imon=1.33122E-8
ql2_vset=
ql2_vmon=-8.96215E-1
ql2_imon=1.87049E-9
ql3_vset=
ql3_vmon=-9.04665E0
ql3_imon=3.61264E-10
ql4_vset=
ql4_vmon=-9.04071E0
ql4_imon=7.32422E-11
mult1=-9.80672E-9
mult2=-2.77813E-9
rf_tmon=-4.9696E-3
rf_agc=3.20585E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=1.65874E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6532E0
bslens_imon=2.63488E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.99236E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05049E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=2.87638E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02154E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=2.4063E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39705E0
lens1_imon=2.45858E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.95891E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04143E1
cs_ea2_imon=1.54793E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84592E1
cs_ef1a_imon=2.95459E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.39962E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.27905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1541E1
os_ea1_imon=2.32256E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.09839E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26863E0
cs_ionrep_imon=1.2203E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93196E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=3.0346E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.39236E-8
tplens_vset=1.4E-1
tplens_vmon=1.57042E0
tplens_imon=-2.484E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.50128E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26762E1
iondef2_imon=1.56482E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98361E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.06243E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30046E0
ionrepsh_imon=1.84323E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3386E1
lens5b_imon=2.18629E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5441E0
os_ea2_imon=-6.89157E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00557E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.16939E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04014E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29259E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10601E1
os_restr2_imon=3.4368E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.2912E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.2529E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73151E1
iondef1_imon=1.07779E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.28979E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=8.17835E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15537E0
cs_ionaccel_imon=-1.96719E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86092E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.24079E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.5319E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=6.75596E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31775E0
defgridb_imon=6.07646E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33392E1
os_fil1_imon=9.4576E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07479E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65424E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.986E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62432E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66658E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76636E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75061E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.49681E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19239E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.27167E-1
res40_imon=-2.69879E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.78549E-1	-8.95786E-1	-9.04617E0	-9.04083E0	5.45979E-3	9.37223E-2	2.7288E1	-3.2652E1	-3.26697E1	2.68226E1	1.1929E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.01475E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.78525E-1	-8.96049E-1	-9.04617E0	-9.04078E0	5.45979E-3	9.33409E-2	2.73033E1	-3.26487E1	-3.26401E1	2.68406E1	1.19137E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.78716E-1	-8.95786E-1	-9.04624E0	-9.04071E0	5.67436E-3	9.36747E-2	2.73074E1	-3.26787E1	-3.26486E1	2.67944E1	1.1929E-7	2.52585E-3	2.52585E-3	6.3074E-3	3.00144E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.79073E-1	-8.95977E-1	-9.04636E0	-9.04086E0	5.67436E-3	9.34124E-2	2.73369E1	-3.26338E1	-3.2638E1	2.68065E1	1.19239E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.78882E-1	-8.96049E-1	-9.04644E0	-9.04114E0	5.67436E-3	9.33886E-2	2.72967E1	-3.26753E1	-3.26344E1	2.68032E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.78811E-1	-8.96001E-1	-9.04648E0	-9.04081E0	5.48363E-3	9.33886E-2	2.73189E1	-3.26753E1	-3.262E1	2.67943E1	1.1929E-7	2.51915E-3	2.51915E-3	6.30182E-3	2.99348E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.78668E-1	-8.96168E-1	-9.04651E0	-9.04114E0	5.74589E-3	9.32217E-2	2.73193E1	-3.26785E1	-3.26484E1	2.68334E1	1.1929E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.78692E-1	-8.96311E-1	-9.04593E0	-9.04102E0	5.79357E-3	9.34601E-2	2.73105E1	-3.26597E1	-3.26374E1	2.68304E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.79025E-1	-8.96215E-1	-9.04639E0	-9.04107E0	5.74589E-3	9.35555E-2	2.7321E1	-3.26634E1	-3.26058E1	2.68064E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02922E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.79145E-1	-8.96358E-1	-9.04646E0	-9.04102E0	5.76973E-3	9.32932E-2	2.73189E1	-3.26675E1	-3.26488E1	2.68118E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.03449E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.79145E-1	-8.96168E-1	-9.04603E0	-9.04105E0	5.8651E-3	9.34124E-2	2.73009E1	-3.2626E1	-3.26422E1	2.68028E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.79025E-1	-8.95977E-1	-9.04641E0	-9.04107E0	5.91278E-3	9.3174E-2	2.73027E1	-3.26482E1	-3.2644E1	2.68322E1	1.19238E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.7893E-1	-8.96287E-1	-9.04639E0	-9.0409E0	5.81741E-3	9.33409E-2	2.73234E1	-3.26649E1	-3.26526E1	2.68292E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9952E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.78978E-1	-8.95929E-1	-9.04622E0	-9.0409E0	5.34058E-3	9.34362E-2	2.72925E1	-3.26621E1	-3.26615E1	2.6786E1	1.19238E-7	2.52757E-3	2.52757E-3	6.3074E-3	3.01609E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.78835E-1	-8.96072E-1	-9.04603E0	-9.041E0	5.67436E-3	9.3317E-2	2.73135E1	-3.26524E1	-3.265E1	2.68118E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02396E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.78644E-1	-8.95929E-1	-9.04615E0	-9.04086E0	5.79357E-3	9.32455E-2	2.73171E1	-3.26669E1	-3.26044E1	2.67794E1	1.19238E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.78453E-1	-8.9581E-1	-9.04655E0	-9.04109E0	5.60284E-3	9.37223E-2	2.73111E1	-3.26591E1	-3.26579E1	2.68478E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.78716E-1	-8.9581E-1	-9.0462E0	-9.0409E0	6.05583E-3	9.377E-2	2.73363E1	-3.27029E1	-3.26392E1	2.6789E1	1.1929E-7	2.51826E-3	2.51826E-3	6.31837E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.78906E-1	-8.9581E-1	-9.04634E0	-9.04076E0	5.84126E-3	9.33409E-2	2.733E1	-3.26567E1	-3.26561E1	2.68209E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.78716E-1	-8.96215E-1	-9.04665E0	-9.04071E0	5.65052E-3	9.31263E-2	2.73151E1	-3.26762E1	-3.26266E1	2.68256E1	1.19239E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01738E-1