[Scan]
initial_time=2015-12-18T20:21:42
final_time=2015-12-18T20:22:10
ip_count=19
run=1020
dataset=1
scan=119
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.78334E-1
ql1_imon=1.31118E-8
ql2_vset=
ql2_vmon=-8.95905E-1
ql2_imon=1.93092E-9
ql3_vset=
ql3_vmon=-9.04603E0
ql3_imon=2.60949E-10
ql4_vset=
ql4_vmon=-9.04107E0
ql4_imon=7.56264E-11
mult1=-9.36713E-9
mult2=-2.67669E-9
rf_tmon=-5.41366E-3
rf_agc=3.3616E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=1.66655E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66236E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19637E1
lens5a_imon=1.98947E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.04883E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53633E1
cs_ef1b_imon=2.88066E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02198E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=2.42189E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35926E0
lens1_imon=2.67462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6442E1
os_ef1alow_imon=2.96353E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.53823E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.95129E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.4023E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11259E1
os_restr1_imon=4.28628E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14895E1
os_ea1_imon=2.32615E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63954E1
os_ef1bup_imon=3.09128E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2872E0
cs_ionrep_imon=1.2057E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93363E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01925E1
cs_anode1_imon=3.03698E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.39853E-8
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-2.9645E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.47759E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.56248E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98276E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.12626E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28082E0
ionrepsh_imon=1.83438E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33497E1
lens5b_imon=2.18222E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.11608E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55367E0
os_ea2_imon=-8.93218E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71409E1
cs_ef2a_imon=3.18137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05717E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1556E-1
os_ef2bup_imon=-5.45489E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10836E1
os_restr2_imon=3.43374E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.30184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01873E1
cs_anode2_imon=2.25915E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73466E1
iondef1_imon=1.07039E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.07263E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.28792E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=8.16508E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12648E0
cs_ionaccel_imon=-1.95184E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47182E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56337E1
einzel_imon=7.58425E-6
window_vset=0.0E0
window_vmon=1.73591E-1
window_imon=-1.07921E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.8626E1
mask2_imon=-8.18683E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.41366E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.17225E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.24133E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33357E0
defgridb_imon=6.17225E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33391E1
os_fil1_imon=9.45423E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06811E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65207E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30881E1
cs_fil1_imon=9.97859E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61446E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66753E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69376E-2
os_fil2_imon=-2.845E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80062E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78457E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.47879E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.70607E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22638E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.91941E-1
res40_imon=-2.50743E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.78477E-1	-8.95667E-1	-9.04634E0	-9.04112E0	5.31673E-3	9.32693E-2	2.73296E1	-3.26664E1	-3.26707E1	2.68208E1	1.1929E-7	2.52117E-3	2.52117E-3	6.32174E-3	3.00925E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.78453E-1	-8.95715E-1	-9.04667E0	-9.04112E0	5.45979E-3	9.33647E-2	2.72971E1	-3.26897E1	-3.26346E1	2.68101E1	1.1929E-7	2.51136E-3	2.51136E-3	6.29067E-3	3.01475E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.78477E-1	-8.9581E-1	-9.0461E0	-9.04117E0	5.36442E-3	9.36508E-2	2.73358E1	-3.2652E1	-3.26178E1	2.67891E1	1.19237E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00942E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.78453E-1	-8.95834E-1	-9.04624E0	-9.04117E0	5.29289E-3	9.34362E-2	2.73128E1	-3.2639E1	-3.2626E1	2.68178E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.78668E-1	-8.95691E-1	-9.04648E0	-9.04119E0	5.31673E-3	9.34362E-2	2.73405E1	-3.27047E1	-3.26164E1	2.68292E1	1.1929E-7	2.5143E-3	2.5143E-3	6.30469E-3	3.00249E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.78572E-1	-8.95858E-1	-9.04634E0	-9.04083E0	5.43594E-3	9.35555E-2	2.73015E1	-3.26696E1	-3.26553E1	2.68012E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.78477E-1	-8.95834E-1	-9.04615E0	-9.04083E0	5.67436E-3	9.35555E-2	2.72943E1	-3.2632E1	-3.26242E1	2.6795E1	1.19213E-7	2.51235E-3	2.51235E-3	6.33177E-3	3.02677E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.78692E-1	-8.95667E-1	-9.04603E0	-9.04078E0	5.65052E-3	9.34839E-2	2.73135E1	-3.26549E1	-3.26326E1	2.67843E1	1.19186E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.78549E-1	-8.95786E-1	-9.04632E0	-9.04093E0	5.45979E-3	9.33409E-2	2.73106E1	-3.26358E1	-3.26187E1	2.68235E1	1.19184E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.01209E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.78882E-1	-8.95715E-1	-9.04632E0	-9.04083E0	5.36442E-3	9.34362E-2	2.73187E1	-3.26661E1	-3.26307E1	2.6795E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.78763E-1	-8.95786E-1	-9.04644E0	-9.04076E0	5.19753E-3	9.34839E-2	2.73111E1	-3.26909E1	-3.26434E1	2.67926E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9978E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.78596E-1	-8.96025E-1	-9.04634E0	-9.0409E0	5.31673E-3	9.3317E-2	2.73092E1	-3.26803E1	-3.26124E1	2.68064E1	1.19137E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.03286E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.78501E-1	-8.96072E-1	-9.04627E0	-9.04078E0	5.26905E-3	9.3627E-2	2.73297E1	-3.26687E1	-3.2611E1	2.68148E1	1.1929E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01223E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.78453E-1	-8.96144E-1	-9.04639E0	-9.04098E0	5.38826E-3	9.32455E-2	2.73016E1	-3.26697E1	-3.26425E1	2.68128E1	1.19132E-7	2.52027E-3	2.52027E-3	6.29067E-3	2.9829E-1
1.8E1	6.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.78358E-1	-8.95929E-1	-9.04622E0	-9.04083E0	5.4121E-3	9.3627E-2	2.73003E1	-3.26657E1	-3.26128E1	2.68525E1	1.19264E-7	2.51972E-3	2.51972E-3	6.32099E-3	2.98317E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.78644E-1	-8.96072E-1	-9.04622E0	-9.04083E0	5.60284E-3	9.3317E-2	2.73291E1	-3.26837E1	-3.26428E1	2.68134E1					
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.78429E-1	-8.95572E-1	-9.04603E0	-9.04102E0	5.26905E-3	9.35078E-2	2.7324E1	-3.26791E1	-3.26154E1	2.68106E1	1.19239E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.78739E-1	-8.95834E-1	-9.04615E0	-9.041E0	5.67436E-3	9.377E-2	2.73093E1	-3.26398E1	-3.26675E1	2.6813E1	1.19238E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.78572E-1	-8.96144E-1	-9.04603E0	-9.04105E0	5.67436E-3	9.32932E-2	2.73327E1	-3.26621E1	-3.26212E1	2.6801E1	1.1929E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.78334E-1	-8.95905E-1	-9.04603E0	-9.04107E0	5.81741E-3	9.34362E-2	2.73466E1	-3.26615E1	-3.26302E1	2.68022E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00824E-1