[Scan]
initial_time=2015-12-18T20:22:59
final_time=2015-12-18T20:23:24
ip_count=19
run=1020
dataset=1
scan=121
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08721E-4
ql1_vset=
ql1_vmon=-8.78668E-1
ql1_imon=1.32017E-8
ql2_vset=
ql2_vmon=-8.95858E-1
ql2_imon=1.85896E-9
ql3_vset=
ql3_vmon=-9.04646E0
ql3_imon=3.12936E-10
ql4_vset=
ql4_vmon=-9.04126E0
ql4_imon=8.27551E-11
mult1=-9.22264E-9
mult2=-2.63677E-9
rf_tmon=-4.19399E-3
rf_agc=3.41086E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.6746E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68442E0
bslens_imon=2.53571E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2016E1
lens5a_imon=1.98317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=2.86737E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02235E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05123E1
cs_ea1_imon=2.42724E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40562E0
lens1_imon=2.60917E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65035E1
os_ef1alow_imon=2.99748E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03862E1
cs_ea2_imon=1.54132E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=2.93873E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.39495E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.29382E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15036E1
os_ea1_imon=2.31998E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25822E0
cs_ionrep_imon=1.21883E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=3.03424E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.39289E-8
tplens_vset=1.4E-1
tplens_vmon=1.62858E0
tplens_imon=-3.62263E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26554E1
iondef3_imon=1.48108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.56703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.05484E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29128E0
ionrepsh_imon=1.83736E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.16903E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.10704E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54838E0
os_ea2_imon=-7.44252E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00516E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70921E1
cs_ef2a_imon=3.17155E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11703E0
os_ef2alow_imon=-2.78529E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56579E-1
os_ef2bup_imon=-5.48105E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=3.43248E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29745E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02272E1
cs_anode2_imon=2.28029E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73177E1
iondef1_imon=1.0877E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.33338E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=8.16393E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-2.11134E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.38756E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=6.84043E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.66413E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.06449E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18598E0
defgridb_imon=6.003E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33385E1
os_fil1_imon=9.44661E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05864E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65267E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=9.99093E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63909E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66839E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.59553E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79264E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.09534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17826E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22591E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33538E-3
inlet_lpb_pmon=3.0201E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.01338E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.78429E-1	-8.9643E-1	-9.04615E0	-9.04098E0	5.43594E-3	9.3317E-2	2.73057E1	-3.26762E1	-3.26278E1	2.67998E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.98222E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.78739E-1	-8.96358E-1	-9.04622E0	-9.04095E0	5.26905E-3	9.37462E-2	2.734E1	-3.26695E1	-3.2648E1	2.68322E1	1.1929E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.98156E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.78763E-1	-8.96263E-1	-9.04629E0	-9.04102E0	5.38826E-3	9.35555E-2	2.73215E1	-3.26415E1	-3.26379E1	2.68175E1	1.1929E-7	2.51359E-3	2.51359E-3	6.29624E-3	3.00676E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.78763E-1	-8.96382E-1	-9.0462E0	-9.04086E0	5.14984E-3	9.34124E-2	2.73148E1	-3.26422E1	-3.26143E1	2.67874E1	1.1929E-7	2.52101E-3	2.52101E-3	6.29907E-3	3.01111E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.78978E-1	-8.96049E-1	-9.04605E0	-9.04112E0	5.07832E-3	9.34601E-2	2.72962E1	-3.26726E1	-3.26207E1	2.67752E1	1.19263E-7	2.5154E-3	2.5154E-3	6.30177E-3	3.01811E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.78596E-1	-8.96168E-1	-9.04605E0	-9.04088E0	5.43594E-3	9.31501E-2	2.73094E1	-3.26657E1	-3.26375E1	2.67883E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.78739E-1	-8.96287E-1	-9.0462E0	-9.0409E0	5.34058E-3	9.35555E-2	2.73135E1	-3.26524E1	-3.26428E1	2.68244E1	1.19228E-7	2.51859E-3	2.51859E-3	6.32057E-3	3.0051E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.78787E-1	-8.96144E-1	-9.04627E0	-9.04124E0	5.45979E-3	9.3317E-2	2.72945E1	-3.26608E1	-3.26349E1	2.68178E1	1.19238E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.7893E-1	-8.95905E-1	-9.04636E0	-9.04114E0	5.34058E-3	9.34124E-2	2.73261E1	-3.26585E1	-3.26302E1	2.68597E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.78763E-1	-8.96358E-1	-9.04622E0	-9.04109E0	5.53131E-3	9.33647E-2	2.72901E1	-3.26837E1	-3.26723E1	2.68188E1	1.1929E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.02511E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.78906E-1	-8.96263E-1	-9.04591E0	-9.041E0	5.60284E-3	9.35555E-2	2.72997E1	-3.26591E1	-3.2644E1	2.67864E1	1.1929E-7	2.50692E-3	2.50692E-3	6.3074E-3	3.03349E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.78739E-1	-8.96192E-1	-9.04613E0	-9.041E0	5.65052E-3	9.3317E-2	2.73195E1	-3.26663E1	-3.26627E1	2.68389E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.78716E-1	-8.96096E-1	-9.04593E0	-9.04102E0	5.6982E-3	9.34362E-2	2.72961E1	-3.26657E1	-3.26326E1	2.6813E1	1.19342E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.78763E-1	-8.96001E-1	-9.04555E0	-9.04121E0	5.62668E-3	9.33886E-2	2.73104E1	-3.26667E1	-3.26408E1	2.67902E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.7862E-1	-8.95715E-1	-9.04565E0	-9.04117E0	5.53131E-3	9.35793E-2	2.73081E1	-3.27131E1	-3.2614E1	2.68232E1	1.1929E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.78406E-1	-8.95929E-1	-9.04605E0	-9.04098E0	5.60284E-3	9.36031E-2	2.72794E1	-3.26236E1	-3.26425E1	2.67505E1	1.1929E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.0201E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.78716E-1	-8.9581E-1	-9.04582E0	-9.04119E0	5.55515E-3	9.33647E-2	2.72898E1	-3.26655E1	-3.26531E1	2.67962E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.78739E-1	-8.95834E-1	-9.04593E0	-9.04126E0	5.57899E-3	9.30071E-2	2.73387E1	-3.26897E1	-3.26207E1	2.68262E1	1.19238E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.78549E-1	-8.95905E-1	-9.0461E0	-9.04105E0	5.55515E-3	9.35316E-2	2.73369E1	-3.26789E1	-3.26278E1	2.68094E1	1.1924E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.78668E-1	-8.95858E-1	-9.04646E0	-9.04126E0	5.6982E-3	9.32217E-2	2.73177E1	-3.26699E1	-3.26554E1	2.6819E1	1.1929E-7	2.51804E-3	2.51804E-3	6.33538E-3	3.0201E-1