[Scan]
initial_time=2015-12-18T20:23:32
final_time=2015-12-18T20:23:54
ip_count=19
run=1020
dataset=1
scan=122
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.78739E-1
ql1_imon=1.3293E-8
ql2_vset=
ql2_vmon=-8.96263E-1
ql2_imon=1.9118E-9
ql3_vset=
ql3_vmon=-9.04603E0
ql3_imon=3.44288E-10
ql4_vset=
ql4_vmon=-9.04095E0
ql4_imon=8.59261E-11
mult1=-9.32806E-9
mult2=-2.68532E-9
rf_tmon=-5.15213E-3
rf_agc=3.3108E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.70598E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20109E1
lens5a_imon=1.97009E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53472E1
cs_ef1b_imon=2.88611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.41999E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36775E0
lens1_imon=2.57741E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04201E1
cs_ea2_imon=1.54651E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=2.94017E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.40044E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.27797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=2.32013E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=1.20837E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93279E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.03892E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=3.39586E-8
tplens_vset=1.4E-1
tplens_vmon=1.60538E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26162E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2694E1
iondef2_imon=1.58112E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.03104E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26111E0
ionrepsh_imon=1.83527E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33928E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57835E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1244E-1
os_ef2bup_imon=-5.46303E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.44112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.25758E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.07188E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.34698E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=8.15797E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11152E0
cs_ionaccel_imon=-2.05368E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.4226E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39012E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-8.31936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.67121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.48157E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=6.81323E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=5.89757E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33391E1
os_fil1_imon=9.44583E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07011E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65426E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.96648E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61843E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66581E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.55781E-2
os_fil2_imon=-2.84016E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76234E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.39751E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22595E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.03804E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.25965E-1
res40_imon=-2.6159E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.78811E-1	-8.96263E-1	-9.04646E0	-9.04124E0	5.76973E-3	9.37939E-2	2.73022E1	-3.26776E1	-3.26729E1	2.68271E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.97704E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.78954E-1	-8.96025E-1	-9.04644E0	-9.04086E0	5.50747E-3	9.35078E-2	2.7329E1	-3.26897E1	-3.26083E1	2.68082E1	1.1929E-7	2.51287E-3	2.51287E-3	6.33388E-3	2.98342E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.78835E-1	-8.95953E-1	-9.04653E0	-9.04095E0	5.55515E-3	9.33409E-2	2.73187E1	-3.26779E1	-3.26413E1	2.68016E1	1.1929E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00942E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.79073E-1	-8.95953E-1	-9.04648E0	-9.04095E0	5.34058E-3	9.35316E-2	2.73333E1	-3.26777E1	-3.26476E1	2.68267E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02396E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.78763E-1	-8.95739E-1	-9.04663E0	-9.04098E0	5.60284E-3	9.35316E-2	2.73087E1	-3.26368E1	-3.26512E1	2.68202E1	1.19188E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.78811E-1	-8.95858E-1	-9.04653E0	-9.04112E0	5.6982E-3	9.37462E-2	2.73003E1	-3.26711E1	-3.2611E1	2.68112E1	1.1929E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.78692E-1	-8.95929E-1	-9.04617E0	-9.04129E0	5.50747E-3	9.34362E-2	2.72874E1	-3.26472E1	-3.26337E1	2.6816E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.78596E-1	-8.96049E-1	-9.04636E0	-9.04107E0	5.45979E-3	9.34601E-2	2.72898E1	-3.26554E1	-3.26089E1	2.6825E1	1.1929E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.78382E-1	-8.96096E-1	-9.04648E0	-9.04131E0	5.65052E-3	9.33647E-2	2.73529E1	-3.2659E1	-3.26195E1	2.68118E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.78549E-1	-8.95905E-1	-9.04627E0	-9.04083E0	5.29289E-3	9.33647E-2	2.73256E1	-3.26522E1	-3.26488E1	2.68343E1	1.1929E-7	2.50882E-3	2.50882E-3	6.29665E-3	2.99686E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.78835E-1	-8.95858E-1	-9.04608E0	-9.04121E0	5.76973E-3	9.30548E-2	2.73057E1	-3.27125E1	-3.2612E1	2.68088E1	1.1929E-7	2.51498E-3	2.51498E-3	6.29684E-3	3.00097E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.79073E-1	-8.95953E-1	-9.04615E0	-9.04121E0	5.22137E-3	9.32217E-2	2.72612E1	-3.2638E1	-3.26783E1	2.68046E1	1.1929E-7	2.52179E-3	2.52179E-3	6.29603E-3	3.01065E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.79002E-1	-8.95905E-1	-9.04593E0	-9.04057E0	5.14984E-3	9.3317E-2	2.73195E1	-3.26945E1	-3.26398E1	2.68238E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.78835E-1	-8.95977E-1	-9.0462E0	-9.04076E0	5.36442E-3	9.34124E-2	2.73428E1	-3.26826E1	-3.26225E1	2.68012E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02133E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.78906E-1	-8.95953E-1	-9.04598E0	-9.04074E0	5.55515E-3	9.32932E-2	2.72889E1	-3.26597E1	-3.26482E1	2.68136E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.78859E-1	-8.96096E-1	-9.04632E0	-9.04117E0	5.36442E-3	9.32932E-2	2.73135E1	-3.26777E1	-3.26476E1	2.68088E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9874E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.78787E-1	-8.96025E-1	-9.04629E0	-9.04119E0	5.65052E-3	9.3317E-2	2.72943E1	-3.26392E1	-3.26416E1	2.68235E1	1.19237E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.99348E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09279E0	-8.78668E-1	-8.95905E-1	-9.04644E0	-9.04117E0	5.74589E-3	9.35078E-2	2.72809E1	-3.26496E1	-3.2662E1	2.683E1	1.1929E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.78525E-1	-8.95882E-1	-9.04624E0	-9.04121E0	5.55515E-3	9.33647E-2	2.73163E1	-3.26738E1	-3.26071E1	2.67848E1	1.19186E-7	2.50898E-3	2.50898E-3	6.32386E-3	3.02396E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.78739E-1	-8.96263E-1	-9.04603E0	-9.04095E0	5.50747E-3	9.34124E-2	2.73075E1	-3.2694E1	-3.26162E1	2.68328E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.03804E-1