[Scan]
initial_time=2015-12-18T20:24:03
final_time=2015-12-18T20:24:25
ip_count=19
run=1020
dataset=1
scan=123
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.78954E-1
ql1_imon=1.31759E-8
ql2_vset=
ql2_vmon=-8.95858E-1
ql2_imon=1.88546E-9
ql3_vset=
ql3_vmon=-9.04617E0
ql3_imon=3.04747E-10
ql4_vset=
ql4_vmon=-9.041E0
ql4_imon=6.90103E-11
mult1=-9.77126E-9
mult2=-2.6919E-9
rf_tmon=-3.47715E-3
rf_agc=3.47485E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.62623E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65668E0
bslens_imon=2.66639E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20122E1
lens5a_imon=1.95888E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=2.87934E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02145E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0488E1
cs_ea1_imon=2.42745E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40728E0
lens1_imon=2.43757E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64642E1
os_ef1alow_imon=2.9696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03315E1
cs_ea2_imon=1.56271E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84299E1
cs_ef1a_imon=2.95115E-5
olens2_vset=9.7E-1
olens2_vmon=9.70697E-1
olens2_imon=1.40071E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.29935E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.32328E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25551E0
cs_ionrep_imon=1.20241E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93191E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01871E1
cs_anode1_imon=3.04577E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.40257E-8
tplens_vset=1.4E-1
tplens_vmon=1.57142E0
tplens_imon=-2.09222E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26449E1
iondef3_imon=1.47597E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26437E1
iondef2_imon=1.58218E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98284E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=4.04439E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26064E0
ionrepsh_imon=1.82671E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33953E1
lens5b_imon=2.1976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.11187E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53044E0
os_ea2_imon=-5.78066E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71319E1
cs_ef2a_imon=3.18905E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.72066E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25572E-1
os_ef2bup_imon=-5.44526E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10788E1
os_restr2_imon=3.44741E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.2945E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01854E1
cs_anode2_imon=2.25691E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72827E1
iondef1_imon=1.09039E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68186E1
iondef4_imon=1.08889E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.2969E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=8.17353E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12343E0
cs_ionaccel_imon=-1.94221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47216E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.60731E-6
window_vset=0.0E0
window_vmon=1.42509E-1
window_imon=-1.07315E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86053E1
mask2_imon=-7.27545E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.54674E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.43338E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=6.96957E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38748E0
defgridb_imon=6.03721E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33396E1
os_fil1_imon=9.44987E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06032E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65141E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.98953E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62428E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66342E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88025E-2
os_fil2_imon=-2.6554E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96389E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82556E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37849E-1
cs_fil2_imon=-2.28631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1474E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2264E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30171E-3
inlet_lpb_pmon=3.01065E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51384E-3
foreline_cvt_pmon=2.51384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32945E-1
res40_imon=-2.55625E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.78906E-1	-8.96144E-1	-9.04608E0	-9.04109E0	5.57899E-3	9.35555E-2	2.73334E1	-3.26897E1	-3.26484E1	2.68118E1	1.1929E-7	2.52093E-3	2.52093E-3	6.31779E-3	2.99014E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.79002E-1	-8.96049E-1	-9.04608E0	-9.04102E0	5.34058E-3	9.36747E-2	2.734E1	-3.26541E1	-3.26347E1	2.68244E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.78906E-1	-8.96144E-1	-9.04624E0	-9.04071E0	5.43594E-3	9.34601E-2	2.72889E1	-3.26783E1	-3.26705E1	2.68094E1	1.1929E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00942E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.78787E-1	-8.96287E-1	-9.04584E0	-9.04102E0	5.26905E-3	9.36747E-2	2.73111E1	-3.265E1	-3.26254E1	2.68016E1	1.1929E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.01085E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.78954E-1	-8.96263E-1	-9.04589E0	-9.04109E0	5.43594E-3	9.34839E-2	2.72987E1	-3.26619E1	-3.26347E1	2.6836E1	1.1929E-7	2.52428E-3	2.52428E-3	6.28006E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.78978E-1	-8.96168E-1	-9.04596E0	-9.04093E0	5.45979E-3	9.38177E-2	2.73131E1	-3.26676E1	-3.26731E1	2.67914E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.78859E-1	-8.96049E-1	-9.04596E0	-9.04117E0	5.03063E-3	9.33886E-2	2.73249E1	-3.26512E1	-3.26446E1	2.6813E1	1.1929E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.78978E-1	-8.96358E-1	-9.04601E0	-9.04129E0	5.14984E-3	9.32217E-2	2.72797E1	-3.26254E1	-3.26543E1	2.68352E1	1.1929E-7	2.51116E-3	2.51116E-3	6.34588E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.78882E-1	-8.96001E-1	-9.0461E0	-9.04131E0	5.43594E-3	9.34839E-2	2.7346E1	-3.26591E1	-3.2635E1	2.67986E1	1.1929E-7	2.52923E-3	2.52923E-3	6.33436E-3	3.00453E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.78835E-1	-8.96239E-1	-9.04593E0	-9.04102E0	5.38826E-3	9.3174E-2	2.73167E1	-3.26389E1	-3.26468E1	2.68406E1	1.1929E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.01475E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.78739E-1	-8.96502E-1	-9.04603E0	-9.04093E0	5.45979E-3	9.34124E-2	2.72638E1	-3.26496E1	-3.26313E1	2.67878E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.78978E-1	-8.96192E-1	-9.0462E0	-9.04098E0	5.22137E-3	9.32217E-2	2.72648E1	-3.26729E1	-3.26026E1	2.68154E1	1.1929E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.78906E-1	-8.96358E-1	-9.0462E0	-9.04121E0	5.34058E-3	9.35316E-2	2.72925E1	-3.26723E1	-3.2614E1	2.68076E1	1.19238E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.78859E-1	-8.96144E-1	-9.04598E0	-9.04148E0	5.19753E-3	9.38177E-2	2.73363E1	-3.26741E1	-3.26164E1	2.67956E1	1.19238E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.01609E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.78763E-1	-8.95929E-1	-9.04617E0	-9.04145E0	5.22137E-3	9.36508E-2	2.7349E1	-3.26536E1	-3.26693E1	2.67704E1	1.1929E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.01475E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.78644E-1	-8.9612E-1	-9.04596E0	-9.04136E0	5.17368E-3	9.35555E-2	2.72745E1	-3.26639E1	-3.26098E1	2.68346E1	1.19188E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.7862E-1	-8.96192E-1	-9.04632E0	-9.04102E0	5.00679E-3	9.32693E-2	2.73165E1	-3.26549E1	-3.26585E1	2.68106E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.78859E-1	-8.96096E-1	-9.04593E0	-9.04143E0	5.19753E-3	9.35316E-2	2.73231E1	-3.26863E1	-3.26028E1	2.68186E1	1.19238E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.79025E-1	-8.96072E-1	-9.0461E0	-9.04107E0	5.22137E-3	9.36508E-2	2.73088E1	-3.26768E1	-3.26346E1	2.67926E1	1.1929E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.78954E-1	-8.95858E-1	-9.04617E0	-9.041E0	5.17368E-3	9.36747E-2	2.72827E1	-3.26437E1	-3.26449E1	2.68186E1	1.1929E-7	2.51384E-3	2.51384E-3	6.30171E-3	3.01065E-1