[Scan]
initial_time=2015-12-18T20:24:34
final_time=2015-12-18T20:24:56
ip_count=19
run=1020
dataset=1
scan=124
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.78739E-1
ql1_imon=1.32275E-8
ql2_vset=
ql2_vmon=-8.95929E-1
ql2_imon=1.91929E-9
ql3_vset=
ql3_vmon=-9.04586E0
ql3_imon=3.00252E-10
ql4_vset=
ql4_vmon=-9.04081E0
ql4_imon=6.92487E-11
mult1=-9.49958E-9
mult2=-2.57689E-9
rf_tmon=-5.10123E-3
rf_agc=3.32134E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.69781E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63851E0
bslens_imon=2.47327E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19829E1
lens5a_imon=1.98611E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.04784E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.88467E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02191E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05184E1
cs_ea1_imon=2.41585E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37562E0
lens1_imon=2.54673E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03886E1
cs_ea2_imon=1.54389E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84652E1
cs_ef1a_imon=2.96468E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.39745E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=4.27076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15232E1
os_ea1_imon=2.30676E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25455E0
cs_ionrep_imon=1.21736E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93361E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=3.03676E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.40356E-8
tplens_vset=1.4E-1
tplens_vmon=1.59185E0
tplens_imon=-3.76954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2608E1
iondef3_imon=1.49834E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.58906E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98287E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.02744E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29923E0
ionrepsh_imon=1.83111E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.16939E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53675E0
os_ea2_imon=-8.32403E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00568E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71534E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.73843E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=3.43788E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.28973E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.26263E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.0855E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68209E1
iondef4_imon=1.0726E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.35789E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=8.1854E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.52927E-6
window_vset=0.0E0
window_vmon=1.53072E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.38969E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.28486E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.29683E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.08652E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38823E0
defgridb_imon=6.03973E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3341E1
os_fil1_imon=9.44895E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07575E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65093E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.97567E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61891E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66443E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7138E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78739E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22692E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.64698E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.78763E-1	-8.95643E-1	-9.04608E0	-9.04086E0	5.62668E-3	9.35078E-2	2.73033E1	-3.26779E1	-3.26213E1	2.68292E1	1.19184E-7	2.5147E-3	2.5147E-3	6.29067E-3	3.00676E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.78692E-1	-8.9581E-1	-9.0462E0	-9.04093E0	5.26905E-3	9.34362E-2	2.72818E1	-3.26719E1	-3.2626E1	2.67974E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.78787E-1	-8.95977E-1	-9.04622E0	-9.04057E0	5.65052E-3	9.34124E-2	2.73165E1	-3.26597E1	-3.26146E1	2.68028E1	1.19238E-7	2.52538E-3	2.52538E-3	6.28552E-3	2.9978E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.78906E-1	-8.96239E-1	-9.04617E0	-9.04083E0	5.48363E-3	9.33647E-2	2.73175E1	-3.26602E1	-3.26207E1	2.6801E1	1.19238E-7	2.52538E-3	2.52538E-3	6.29645E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.78644E-1	-8.9581E-1	-9.04605E0	-9.04081E0	5.45979E-3	9.32217E-2	2.72823E1	-3.2653E1	-3.26266E1	2.6807E1	1.19239E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.78859E-1	-8.96144E-1	-9.04615E0	-9.04076E0	5.29289E-3	9.33647E-2	2.72579E1	-3.26714E1	-3.26343E1	2.68209E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.79002E-1	-8.95905E-1	-9.04608E0	-9.04105E0	5.26905E-3	9.34839E-2	2.73352E1	-3.2659E1	-3.26396E1	2.67914E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.78906E-1	-8.95882E-1	-9.0461E0	-9.04081E0	5.45979E-3	9.35555E-2	2.72895E1	-3.26759E1	-3.26254E1	2.68106E1	1.19239E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.78692E-1	-8.95834E-1	-9.04601E0	-9.04088E0	5.48363E-3	9.34601E-2	2.73261E1	-3.26789E1	-3.26615E1	2.68274E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.78859E-1	-8.96406E-1	-9.04577E0	-9.041E0	5.14984E-3	9.34124E-2	2.73417E1	-3.26561E1	-3.26615E1	2.67836E1	1.1929E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09696E0	-8.79145E-1	-8.9612E-1	-9.04562E0	-9.04114E0	5.17368E-3	9.34124E-2	2.73183E1	-3.26338E1	-3.26621E1	2.68118E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01609E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.78739E-1	-8.95834E-1	-9.04589E0	-9.0409E0	5.45979E-3	9.3174E-2	2.73502E1	-3.2638E1	-3.26194E1	2.68166E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3514E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.78763E-1	-8.95977E-1	-9.04608E0	-9.04102E0	5.43594E-3	9.32455E-2	2.73129E1	-3.26633E1	-3.26386E1	2.6804E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9978E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.7893E-1	-8.95882E-1	-9.04582E0	-9.04112E0	5.34058E-3	9.32455E-2	2.73334E1	-3.2649E1	-3.26366E1	2.68285E1	1.1929E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.78668E-1	-8.95739E-1	-9.04608E0	-9.04107E0	5.36442E-3	9.35316E-2	2.73087E1	-3.26705E1	-3.26134E1	2.68106E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.78859E-1	-8.95977E-1	-9.04608E0	-9.04112E0	5.57899E-3	9.34839E-2	2.73075E1	-3.26759E1	-3.26224E1	2.68138E1	1.1929E-7	2.52428E-3	2.52428E-3	6.3514E-3	3.01085E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.78763E-1	-8.9612E-1	-9.04579E0	-9.04093E0	5.48363E-3	9.37223E-2	2.72809E1	-3.26484E1	-3.26449E1	2.67984E1	1.1929E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.78763E-1	-8.9581E-1	-9.04577E0	-9.04107E0	5.24521E-3	9.3627E-2	2.73057E1	-3.26826E1	-3.26396E1	2.68146E1	1.19188E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.7862E-1	-8.95953E-1	-9.04577E0	-9.04095E0	5.14984E-3	9.3627E-2	2.73165E1	-3.265E1	-3.26392E1	2.68013E1	1.19239E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.78739E-1	-8.95929E-1	-9.04586E0	-9.04081E0	5.10216E-3	9.3627E-2	2.73093E1	-3.26591E1	-3.2608E1	2.68209E1	1.1929E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.00041E-1