[Scan]
initial_time=2015-12-18T20:25:35
final_time=2015-12-18T20:25:57
ip_count=19
run=1020
dataset=1
scan=126
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.78882E-1
ql1_imon=1.32063E-8
ql2_vset=
ql2_vmon=-8.95882E-1
ql2_imon=1.97586E-9
ql3_vset=
ql3_vmon=-9.04598E0
ql3_imon=2.78866E-10
ql4_vset=
ql4_vmon=-9.04088E0
ql4_imon=9.79662E-11
mult1=-9.69223E-9
mult2=-2.71661E-9
rf_tmon=-5.13127E-3
rf_agc=3.32555E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.66866E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66794E0
bslens_imon=2.56659E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20145E1
lens5a_imon=1.97081E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53431E1
cs_ef1b_imon=2.85602E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.01926E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=2.4081E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36835E0
lens1_imon=2.35029E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64109E1
os_ef1alow_imon=2.96643E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.53966E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.845E1
cs_ef1a_imon=2.97129E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.39524E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11753E1
os_restr1_imon=4.28606E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15414E1
os_ea1_imon=2.30319E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6313E1
os_ef1bup_imon=3.05438E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26472E0
cs_ionrep_imon=1.21774E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=3.06486E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.39205E-8
tplens_vset=1.4E-1
tplens_vmon=1.58736E0
tplens_imon=-2.30852E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26374E1
iondef3_imon=1.48919E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.06926E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=1.82842E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.18531E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74994E1
cs_ef2b_imon=3.13372E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5465E0
os_ea2_imon=-6.16582E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00403E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.1558E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01526E0
os_ef2alow_imon=-2.76144E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.45662E-1
os_ef2bup_imon=-5.23903E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11466E1
os_restr2_imon=3.46644E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0237E1
cs_anode2_imon=2.27517E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.08544E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.05472E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.3916E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=8.14975E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07463E0
cs_ionaccel_imon=-2.06907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02124E2
cs_ionfocb_imon=1.47499E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56636E1
einzel_imon=7.5793E-6
window_vset=0.0E0
window_vmon=1.84537E-1
window_imon=-1.32429E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39301E-4
mask2_vset=0.0E0
mask2_vmon=-1.8665E1
mask2_imon=-6.69342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.29269E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.55007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.19896E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.04537E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33385E1
os_fil1_imon=9.42713E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0645E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65382E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30907E1
cs_fil1_imon=9.97087E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61411E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66388E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.63519E-2
os_fil2_imon=-2.74359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.62899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74687E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37719E-1
cs_fil2_imon=-2.5128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22611E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31902E-3
inlet_lpb_pmon=2.99535E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=1.21731E-1
res40_imon=-2.32356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.78501E-1	-8.95905E-1	-9.04579E0	-9.0409E0	5.14984E-3	9.3627E-2	2.72786E1	-3.26632E1	-3.26001E1	2.68343E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00302E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.78596E-1	-8.96215E-1	-9.04617E0	-9.04105E0	5.31673E-3	9.32693E-2	2.72935E1	-3.26621E1	-3.26291E1	2.68124E1	1.1929E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.78692E-1	-8.96049E-1	-9.04613E0	-9.041E0	5.36442E-3	9.32932E-2	2.73181E1	-3.26862E1	-3.2629E1	2.67962E1	1.1929E-7	2.51359E-3	2.51359E-3	6.29624E-3	3.01475E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.78429E-1	-8.96025E-1	-9.04613E0	-9.04107E0	5.50747E-3	9.36031E-2	2.72919E1	-3.26861E1	-3.26086E1	2.68454E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.78477E-1	-8.96049E-1	-9.04584E0	-9.04098E0	5.36442E-3	9.36508E-2	2.73141E1	-3.265E1	-3.26206E1	2.6822E1	1.1929E-7	2.51279E-3	2.51279E-3	6.31014E-3	2.98092E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.78596E-1	-8.95929E-1	-9.04591E0	-9.04098E0	5.53131E-3	9.35555E-2	2.72871E1	-3.26873E1	-3.26374E1	2.67812E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.78716E-1	-8.95452E-1	-9.04624E0	-9.04093E0	5.55515E-3	9.34601E-2	2.72877E1	-3.26651E1	-3.26242E1	2.684E1	1.1929E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.9926E-1
8.0E0	0.0E0	1.0E0	1.332E3	8.73E2	-2.09518E0	-8.78882E-1	-8.95715E-1	-9.0461E0	-9.04088E0	5.03063E-3	9.33886E-2	2.72951E1	-3.2682E1	-3.2613E1	2.68346E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.03185E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.78835E-1	-8.95929E-1	-9.04593E0	-9.04107E0	5.43594E-3	9.34362E-2	2.72943E1	-3.26849E1	-3.26212E1	2.6819E1	1.1929E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.01738E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.78549E-1	-8.95739E-1	-9.0461E0	-9.04076E0	5.17368E-3	9.34124E-2	2.73461E1	-3.26744E1	-3.26425E1	2.6804E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9978E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.78882E-1	-8.95905E-1	-9.0461E0	-9.04093E0	5.03063E-3	9.36508E-2	2.73267E1	-3.26801E1	-3.26464E1	2.6786E1	1.1929E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.78835E-1	-8.96144E-1	-9.04591E0	-9.04083E0	5.45979E-3	9.35078E-2	2.7311E1	-3.26543E1	-3.26396E1	2.68418E1	1.1929E-7	2.5188E-3	2.5188E-3	6.28006E-3	3.01085E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.78954E-1	-8.96168E-1	-9.04598E0	-9.04093E0	5.22137E-3	9.36031E-2	2.73157E1	-3.26579E1	-3.2649E1	2.68151E1	1.19341E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.78835E-1	-8.96215E-1	-9.04586E0	-9.04098E0	5.26905E-3	9.35316E-2	2.72959E1	-3.2686E1	-3.26364E1	2.68298E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.02253E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.79049E-1	-8.9581E-1	-9.0461E0	-9.04086E0	5.4121E-3	9.34839E-2	2.73051E1	-3.26543E1	-3.26443E1	2.68214E1	1.19237E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00144E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.79025E-1	-8.95858E-1	-9.04622E0	-9.04083E0	5.62668E-3	9.37462E-2	2.72865E1	-3.26524E1	-3.26218E1	2.68034E1	1.19188E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.98665E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.78978E-1	-8.95905E-1	-9.04591E0	-9.04102E0	5.48363E-3	9.34124E-2	2.73009E1	-3.26723E1	-3.26476E1	2.68136E1	1.19239E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.78572E-1	-8.95953E-1	-9.04584E0	-9.0409E0	5.17368E-3	9.34839E-2	2.73023E1	-3.26439E1	-3.25924E1	2.68177E1	1.19237E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.02277E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.78644E-1	-8.95882E-1	-9.04584E0	-9.04093E0	5.26905E-3	9.36747E-2	2.74177E1	-3.27342E1	-3.24911E1	2.68194E1	1.1929E-7	2.51142E-3	2.51142E-3	6.3074E-3	3.01853E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.78882E-1	-8.95882E-1	-9.04598E0	-9.04088E0	5.36442E-3	9.34601E-2	2.73003E1	-3.26783E1	-3.26374E1	2.6804E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31902E-3	2.99535E-1