[Scan]
initial_time=2015-12-18T20:26:05
final_time=2015-12-18T20:26:27
ip_count=19
run=1020
dataset=1
scan=127
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.78549E-1
ql1_imon=1.32037E-8
ql2_vset=
ql2_vmon=-8.96168E-1
ql2_imon=1.86828E-9
ql3_vset=
ql3_vmon=-9.04624E0
ql3_imon=2.9757E-10
ql4_vset=
ql4_vmon=-9.04083E0
ql4_imon=8.53777E-11
mult1=-9.49484E-9
mult2=-2.69677E-9
rf_tmon=-6.30781E-3
rf_agc=3.23924E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.66906E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6409E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19935E1
lens5a_imon=1.97622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05172E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=2.88936E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.41026E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38398E0
lens1_imon=2.58462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03822E1
cs_ea2_imon=1.55733E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84148E1
cs_ef1a_imon=2.94738E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.39828E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1158E1
os_restr1_imon=4.29635E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.32554E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=1.20945E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93316E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02169E1
cs_anode1_imon=3.03135E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=3.39315E-8
tplens_vset=1.4E-1
tplens_vmon=1.55071E0
tplens_imon=-5.91347E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26235E1
iondef3_imon=1.51154E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26646E1
iondef2_imon=1.57824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98108E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.04952E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27493E0
ionrepsh_imon=1.82878E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.11677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55251E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11239E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=3.44653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.24929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73324E1
iondef1_imon=1.08111E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68207E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.30803E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=8.16387E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02037E2
cs_ionfocb_imon=1.47096E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.71692E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-8.13916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.46933E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.1391E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.98626E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27525E0
defgridb_imon=6.20759E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33398E1
os_fil1_imon=9.44258E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06278E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6541E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.97825E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62792E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66491E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80286E-2
os_fil2_imon=-2.81013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.64678E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8139E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37938E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22673E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.61094E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.78549E-1	-8.95834E-1	-9.04627E0	-9.04052E0	5.17368E-3	9.35078E-2	2.72907E1	-3.26536E1	-3.26434E1	2.68268E1	1.1929E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.01475E-1
2.0E0	1.9E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.7862E-1	-8.9581E-1	-9.04617E0	-9.04076E0	5.43594E-3	9.32455E-2	2.73081E1	-3.26422E1	-3.26434E1	2.68238E1	1.19188E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.78453E-1	-8.96096E-1	-9.04596E0	-9.04107E0	5.17368E-3	9.32217E-2	2.72919E1	-3.26512E1	-3.2629E1	2.6789E1	1.19237E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00942E-1
4.0E0	1.2E1	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.78644E-1	-8.96025E-1	-9.04589E0	-9.04098E0	5.17368E-3	9.33409E-2	2.72909E1	-3.26555E1	-3.26632E1	2.67949E1	1.19239E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.78572E-1	-8.96239E-1	-9.04565E0	-9.04107E0	5.53131E-3	9.3317E-2	2.73311E1	-3.26638E1	-3.26431E1	2.68004E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.03449E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09688E0	-8.78406E-1	-8.96001E-1	-9.04586E0	-9.04083E0	5.72205E-3	9.34839E-2	2.73057E1	-3.2648E1	-3.26309E1	2.68028E1	1.19239E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09742E0	-8.78406E-1	-8.96072E-1	-9.04572E0	-9.0409E0	5.74589E-3	9.33409E-2	2.73081E1	-3.26567E1	-3.2626E1	2.68136E1	1.1929E-7	2.50898E-3	2.50898E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09727E0	-8.78334E-1	-8.96025E-1	-9.04577E0	-9.04093E0	5.57899E-3	9.36031E-2	2.73201E1	-3.26867E1	-3.26194E1	2.684E1	1.1929E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.01209E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09734E0	-8.78215E-1	-8.95739E-1	-9.04589E0	-9.04069E0	5.19753E-3	9.3627E-2	2.73393E1	-3.26831E1	-3.25785E1	2.68418E1	1.19186E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09665E0	-8.78239E-1	-8.96215E-1	-9.04589E0	-9.0409E0	5.31673E-3	9.33647E-2	2.72678E1	-3.26506E1	-3.26903E1	2.68112E1	1.19239E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09688E0	-8.78429E-1	-8.96692E-1	-9.04596E0	-9.04095E0	5.19753E-3	9.33886E-2	2.72979E1	-3.26494E1	-3.26897E1	2.68004E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.0041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.78429E-1	-8.96573E-1	-9.04582E0	-9.04088E0	5.4121E-3	9.33647E-2	2.73099E1	-3.26464E1	-3.26591E1	2.68119E1	1.19238E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01085E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.78429E-1	-8.96168E-1	-9.04582E0	-9.04081E0	5.17368E-3	9.32932E-2	2.73369E1	-3.26843E1	-3.2635E1	2.68325E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.78382E-1	-8.96263E-1	-9.04593E0	-9.04071E0	5.43594E-3	9.33886E-2	2.73051E1	-3.26765E1	-3.26176E1	2.67836E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.78334E-1	-8.96335E-1	-9.04603E0	-9.04074E0	5.24521E-3	9.35793E-2	2.73105E1	-3.26969E1	-3.26236E1	2.68562E1	1.19238E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.78501E-1	-8.9612E-1	-9.04613E0	-9.04071E0	5.03063E-3	9.36031E-2	2.7346E1	-3.26573E1	-3.26488E1	2.68163E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.78716E-1	-8.96096E-1	-9.04608E0	-9.04081E0	5.36442E-3	9.3627E-2	2.73128E1	-3.26785E1	-3.2613E1	2.67818E1	1.19238E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.78859E-1	-8.96335E-1	-9.04565E0	-9.04083E0	5.36442E-3	9.33886E-2	2.73123E1	-3.26603E1	-3.26128E1	2.68214E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02769E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.78525E-1	-8.96192E-1	-9.04601E0	-9.04076E0	5.29289E-3	9.33647E-2	2.73375E1	-3.26791E1	-3.25717E1	2.68146E1	1.1929E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.78549E-1	-8.96168E-1	-9.04624E0	-9.04083E0	5.22137E-3	9.33886E-2	2.73324E1	-3.26646E1	-3.26235E1	2.68207E1	1.19238E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.02133E-1