[Scan]
initial_time=2015-12-18T20:26:35
final_time=2015-12-18T20:26:57
ip_count=19
run=1020
dataset=1
scan=128
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.78906E-1
ql1_imon=1.31702E-8
ql2_vset=
ql2_vmon=-8.95762E-1
ql2_imon=1.97464E-9
ql3_vset=
ql3_vmon=-9.04598E0
ql3_imon=2.5574E-10
ql4_vset=
ql4_vmon=-9.041E0
ql4_imon=9.89318E-11
mult1=-9.04203E-9
mult2=-2.71861E-9
rf_tmon=-5.24543E-3
rf_agc=3.20658E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.67792E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6079E0
bslens_imon=2.48796E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=1.97473E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05192E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53977E1
cs_ef1b_imon=2.88611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.01849E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04872E1
cs_ea1_imon=2.41769E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3646E0
lens1_imon=2.36308E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.96684E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0399E1
cs_ea2_imon=1.55527E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.93909E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.40054E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.28553E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14945E1
os_ea1_imon=2.32549E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25271E0
cs_ionrep_imon=1.18687E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93457E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=3.04E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.39486E-8
tplens_vset=1.4E-1
tplens_vmon=1.62552E0
tplens_imon=-5.27546E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.51193E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.55858E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98515E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.0802E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23006E0
ionrepsh_imon=1.81495E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.18519E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52451E0
os_ea2_imon=-6.37735E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00355E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07979E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.37668E-1
os_ef2bup_imon=-5.50988E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.43644E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.31361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.24677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.07117E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67818E1
iondef4_imon=1.07332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.33701E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=8.14648E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.30247E-1
window_imon=-1.12746E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.86068E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.29221E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.44008E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.24813E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52919E0
defgridb_imon=6.13522E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33374E1
os_fil1_imon=9.42042E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07666E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65511E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30833E1
cs_fil1_imon=9.97525E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.629E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66378E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66123E-2
os_fil2_imon=-2.86419E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51159E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22545E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32661E-3
inlet_lpb_pmon=2.9939E-1
chamber_ion_pmon=1.19264E-7
chamber_cvt_pmon=2.51607E-3
foreline_cvt_pmon=2.51607E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.27167E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.78048E-1	-8.96072E-1	-9.04608E0	-9.04083E0	5.29289E-3	9.34839E-2	2.72483E1	-3.26712E1	-3.26393E1	2.67974E1	1.1929E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.9978E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.78191E-1	-8.96168E-1	-9.04617E0	-9.04083E0	5.17368E-3	9.33886E-2	2.73143E1	-3.26413E1	-3.26474E1	2.68376E1	1.1929E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.78143E-1	-8.9581E-1	-9.04596E0	-9.041E0	5.45979E-3	9.34362E-2	2.72673E1	-3.26042E1	-3.26661E1	2.67848E1	1.1929E-7	2.51136E-3	2.51136E-3	6.3074E-3	3.0041E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.78549E-1	-8.95762E-1	-9.04613E0	-9.04119E0	5.65052E-3	9.35555E-2	2.73069E1	-3.26461E1	-3.26183E1	2.68354E1	1.19239E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.78119E-1	-8.955E-1	-9.04639E0	-9.041E0	5.36442E-3	9.34601E-2	2.72985E1	-3.26681E1	-3.26645E1	2.68274E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.98156E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.78215E-1	-8.95667E-1	-9.04636E0	-9.04109E0	5.126E-3	9.35793E-2	2.73033E1	-3.26524E1	-3.26476E1	2.68022E1	1.1929E-7	2.52599E-3	2.52599E-3	6.31817E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.78382E-1	-8.95858E-1	-9.04605E0	-9.04076E0	5.22137E-3	9.35078E-2	2.72815E1	-3.2652E1	-3.26514E1	2.68227E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.98819E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.78048E-1	-8.95858E-1	-9.04584E0	-9.04095E0	5.36442E-3	9.33409E-2	2.72862E1	-3.2639E1	-3.26012E1	2.67944E1	1.1929E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.78358E-1	-8.95572E-1	-9.04589E0	-9.04086E0	5.62668E-3	9.3317E-2	2.73039E1	-3.2626E1	-3.26398E1	2.68094E1	1.1929E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.03804E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.78239E-1	-8.95953E-1	-9.04586E0	-9.04088E0	5.43594E-3	9.38177E-2	2.73027E1	-3.26602E1	-3.26649E1	2.68112E1	1.1929E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.03027E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.78644E-1	-8.95786E-1	-9.04593E0	-9.04119E0	5.74589E-3	9.38654E-2	2.72919E1	-3.2641E1	-3.26044E1	2.67752E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.78882E-1	-8.96263E-1	-9.04608E0	-9.04088E0	5.55515E-3	9.36747E-2	2.73141E1	-3.27306E1	-3.26134E1	2.68346E1	1.19238E-7	2.5188E-3	2.5188E-3	6.3514E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.78692E-1	-8.96168E-1	-9.04586E0	-9.04098E0	5.60284E-3	9.35555E-2	2.73063E1	-3.26446E1	-3.26603E1	2.68184E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.78763E-1	-8.96049E-1	-9.04591E0	-9.04064E0	5.45979E-3	9.34124E-2	2.72871E1	-3.26567E1	-3.2653E1	2.68125E1	1.19238E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01347E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.7893E-1	-8.95929E-1	-9.04591E0	-9.04081E0	5.38826E-3	9.32932E-2	2.72925E1	-3.26639E1	-3.26302E1	2.67982E1	1.1929E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.79073E-1	-8.95643E-1	-9.04603E0	-9.04098E0	5.55515E-3	9.34124E-2	2.73225E1	-3.26831E1	-3.26314E1	2.6816E1	1.19238E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00824E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.78978E-1	-8.95691E-1	-9.04601E0	-9.04107E0	5.36442E-3	9.34362E-2	2.72933E1	-3.26461E1	-3.26508E1	2.67836E1	1.19239E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.79121E-1	-8.95739E-1	-9.04582E0	-9.04114E0	5.22137E-3	9.33886E-2	2.73293E1	-3.26555E1	-3.26236E1	2.68112E1	1.19238E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01609E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.79097E-1	-8.95667E-1	-9.04593E0	-9.04107E0	5.48363E-3	9.33647E-2	2.73165E1	-3.26885E1	-3.26404E1	2.68274E1	1.1929E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.78906E-1	-8.95762E-1	-9.04598E0	-9.041E0	5.14984E-3	9.35555E-2	2.73153E1	-3.26518E1	-3.26224E1	2.67818E1	1.19264E-7	2.51607E-3	2.51607E-3	6.32661E-3	2.9939E-1