[Scan]
initial_time=2015-12-18T20:27:05
final_time=2015-12-18T20:27:27
ip_count=19
run=1020
dataset=1
scan=129
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.79073E-1
ql1_imon=1.31827E-8
ql2_vset=
ql2_vmon=-8.9643E-1
ql2_imon=1.92839E-9
ql3_vset=
ql3_vmon=-9.04617E0
ql3_imon=2.86782E-10
ql4_vset=
ql4_vmon=-9.04126E0
ql4_imon=6.45638E-11
mult1=-9.71215E-9
mult2=-2.79185E-9
rf_tmon=-3.66002E-3
rf_agc=3.38046E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.69051E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66149E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20066E1
lens5a_imon=1.96705E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53829E1
cs_ef1b_imon=2.88139E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05295E1
cs_ea1_imon=2.43106E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36607E0
lens1_imon=2.59989E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.95889E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03873E1
cs_ea2_imon=1.55081E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84186E1
cs_ef1a_imon=2.95819E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.39634E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11546E1
os_restr1_imon=4.28018E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=2.33621E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63572E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26567E0
cs_ionrep_imon=1.2082E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=3.04195E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=3.40172E-8
tplens_vset=1.4E-1
tplens_vmon=1.57477E0
tplens_imon=-4.26306E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26838E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98272E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=4.03759E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=1.8368E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74594E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53525E0
os_ea2_imon=-8.15641E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71153E1
cs_ef2a_imon=3.17852E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05514E0
os_ef2alow_imon=-2.70317E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07077E-1
os_ef2bup_imon=-5.42777E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.45307E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.26801E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73086E1
iondef1_imon=1.0783E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.07113E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.29544E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=8.19225E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11045E0
cs_ionaccel_imon=-1.94209E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47198E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.66351E-6
window_vset=0.0E0
window_vmon=1.71349E-1
window_imon=-1.19491E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39126E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-7.11847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.36039E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.54633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50163E3
multb_neg_imon=7.17988E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=6.1039E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33388E1
os_fil1_imon=9.4414E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0675E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65318E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30842E1
cs_fil1_imon=9.95783E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62134E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66673E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.72407E-2
os_fil2_imon=-2.76186E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.68067E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65847E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37892E-1
cs_fil2_imon=-2.66339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0783E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.51676E-1
res40_imon=-2.49813E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.78787E-1	-8.95786E-1	-9.04598E0	-9.04074E0	5.31673E-3	9.35555E-2	2.73207E1	-3.26831E1	-3.26663E1	2.68244E1	1.19238E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09673E0	-8.78763E-1	-8.95762E-1	-9.04636E0	-9.04093E0	5.14984E-3	9.33886E-2	2.73147E1	-3.26374E1	-3.26458E1	2.68178E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.78882E-1	-8.95691E-1	-9.04627E0	-9.04114E0	5.31673E-3	9.33886E-2	2.73175E1	-3.2649E1	-3.2626E1	2.67908E1	1.1929E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.00942E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.78716E-1	-8.95786E-1	-9.04601E0	-9.04109E0	5.34058E-3	9.3317E-2	2.72781E1	-3.26561E1	-3.26597E1	2.68202E1	1.19239E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.78596E-1	-8.96049E-1	-9.04596E0	-9.04136E0	5.29289E-3	9.36508E-2	2.73039E1	-3.26627E1	-3.26044E1	2.67836E1	1.19238E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.78787E-1	-8.96072E-1	-9.04567E0	-9.04095E0	5.14984E-3	9.3627E-2	2.7285E1	-3.26366E1	-3.26331E1	2.68574E1	1.19238E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.78716E-1	-8.95834E-1	-9.04548E0	-9.04093E0	5.03063E-3	9.33886E-2	2.73448E1	-3.26891E1	-3.25972E1	2.68013E1	1.1924E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.02368E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09673E0	-8.78906E-1	-8.96215E-1	-9.04582E0	-9.04093E0	5.14984E-3	9.3317E-2	2.73105E1	-3.26693E1	-3.26332E1	2.6804E1	1.1929E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.02813E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.78572E-1	-8.96263E-1	-9.04584E0	-9.04088E0	5.34058E-3	9.35078E-2	2.73333E1	-3.26645E1	-3.26266E1	2.68418E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.7893E-1	-8.96072E-1	-9.04624E0	-9.041E0	5.34058E-3	9.36031E-2	2.73263E1	-3.26803E1	-3.26555E1	2.68346E1	1.19239E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09673E0	-8.78644E-1	-8.96168E-1	-9.04603E0	-9.04098E0	5.126E-3	9.34839E-2	2.72925E1	-3.26326E1	-3.26452E1	2.68232E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.78739E-1	-8.96168E-1	-9.04601E0	-9.04093E0	4.98295E-3	9.32932E-2	2.73388E1	-3.26731E1	-3.26168E1	2.68214E1	1.19238E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.78787E-1	-8.95953E-1	-9.04596E0	-9.04093E0	5.17368E-3	9.3627E-2	2.72921E1	-3.26856E1	-3.26579E1	2.68184E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.78859E-1	-8.96025E-1	-9.04627E0	-9.0405E0	5.31673E-3	9.35793E-2	2.73057E1	-3.26488E1	-3.2599E1	2.68124E1	1.1929E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.78692E-1	-8.96072E-1	-9.04624E0	-9.041E0	5.26905E-3	9.36031E-2	2.72756E1	-3.26455E1	-3.26708E1	2.68273E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-8.78763E-1	-8.96335E-1	-9.04584E0	-9.04102E0	4.98295E-3	9.36508E-2	2.73147E1	-3.26609E1	-3.26182E1	2.68007E1	1.19239E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.99941E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09704E0	-8.78739E-1	-8.96263E-1	-9.04598E0	-9.04109E0	5.126E-3	9.36508E-2	2.73003E1	-3.26494E1	-3.26663E1	2.67543E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09696E0	-8.7893E-1	-8.96239E-1	-9.04644E0	-9.04093E0	5.07832E-3	9.35555E-2	2.73165E1	-3.26699E1	-3.26176E1	2.68466E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9926E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09711E0	-8.79002E-1	-8.96239E-1	-9.04629E0	-9.04062E0	5.34058E-3	9.36508E-2	2.73063E1	-3.26386E1	-3.26014E1	2.68076E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.98156E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.79073E-1	-8.9643E-1	-9.04617E0	-9.04126E0	5.14984E-3	9.37462E-2	2.73086E1	-3.26838E1	-3.26396E1	2.6807E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00302E-1