[Scan]
initial_time=2015-12-18T20:28:05
final_time=2015-12-18T20:28:27
ip_count=19
run=1020
dataset=1
scan=131
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.78763E-1
ql1_imon=1.32052E-8
ql2_vset=
ql2_vmon=-8.96072E-1
ql2_imon=1.89869E-9
ql3_vset=
ql3_vmon=-9.04603E0
ql3_imon=2.82025E-10
ql4_vset=
ql4_vmon=-9.04083E0
ql4_imon=9.02295E-11
mult1=-8.67184E-9
mult2=-2.58999E-9
rf_tmon=-4.41509E-3
rf_agc=3.3433E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.69487E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20361E1
lens5a_imon=1.9636E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04988E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53488E1
cs_ef1b_imon=2.88834E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02006E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05373E1
cs_ea1_imon=2.41999E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34312E0
lens1_imon=2.54136E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.98287E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04069E1
cs_ea2_imon=1.55264E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=2.93908E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.39787E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=4.28956E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15023E1
os_ea1_imon=2.33203E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=1.21558E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93211E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02E1
cs_anode1_imon=3.04785E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.39269E-8
tplens_vset=1.4E-1
tplens_vmon=1.60478E0
tplens_imon=-2.20037E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26596E1
iondef3_imon=1.47225E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.57679E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98238E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.04893E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=1.82481E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74704E1
cs_ef2b_imon=3.11041E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49784E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.18582E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06325E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98389E-1
os_ef2bup_imon=-5.31308E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=3.4416E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01925E1
cs_anode2_imon=2.24055E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73139E1
iondef1_imon=1.07607E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.08468E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.33303E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=8.1563E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1174E0
cs_ionaccel_imon=-2.0672E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47198E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56365E1
einzel_imon=7.66351E-6
window_vset=0.0E0
window_vmon=1.51077E-1
window_imon=-9.79441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39074E-4
mask2_vset=0.0E0
mask2_vmon=-1.86408E1
mask2_imon=-7.70926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.70726E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.24725E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.06557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27224E0
defgridb_imon=5.93001E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33369E1
os_fil1_imon=9.44766E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07121E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65345E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30872E1
cs_fil1_imon=9.97509E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6265E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66855E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6223E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79327E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36269E-1
cs_fil2_imon=-2.72711E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06671E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22622E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33211E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.24657E-1
res40_imon=-2.54678E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.78739E-1	-8.95309E-1	-9.04636E0	-9.04107E0	5.126E-3	9.37462E-2	2.73137E1	-3.26676E1	-3.26334E1	2.68151E1	1.19238E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01347E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.7862E-1	-8.95429E-1	-9.04646E0	-9.04093E0	5.24521E-3	9.34839E-2	2.73087E1	-3.26729E1	-3.26392E1	2.6807E1	1.19238E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.78358E-1	-8.95405E-1	-9.04641E0	-9.04114E0	5.26905E-3	9.35555E-2	2.72964E1	-3.26341E1	-3.26179E1	2.67989E1	1.19186E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.78453E-1	-8.95619E-1	-9.04632E0	-9.04133E0	5.36442E-3	9.37462E-2	2.72829E1	-3.26488E1	-3.26458E1	2.67956E1	1.1929E-7	2.51954E-3	2.51954E-3	6.34518E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.78382E-1	-8.9581E-1	-9.04629E0	-9.04119E0	5.45979E-3	9.36031E-2	2.73309E1	-3.26428E1	-3.26338E1	2.68274E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.03027E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.78644E-1	-8.95977E-1	-9.04634E0	-9.04112E0	5.36442E-3	9.34362E-2	2.72871E1	-3.26675E1	-3.2626E1	2.68226E1	1.19237E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.01475E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09688E0	-8.78453E-1	-8.95977E-1	-9.04632E0	-9.04121E0	5.34058E-3	9.33886E-2	2.73351E1	-3.26753E1	-3.26386E1	2.68124E1	1.19238E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.78572E-1	-8.9581E-1	-9.0461E0	-9.04102E0	5.24521E-3	9.36508E-2	2.73135E1	-3.26416E1	-3.26272E1	2.67902E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.78358E-1	-8.96025E-1	-9.04634E0	-9.04078E0	5.34058E-3	9.35078E-2	2.72886E1	-3.26296E1	-3.26626E1	2.6843E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9841E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.78549E-1	-8.95953E-1	-9.04636E0	-9.0409E0	5.05447E-3	9.3627E-2	2.72871E1	-3.26699E1	-3.26512E1	2.67995E1	1.19238E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.78477E-1	-8.95739E-1	-9.04629E0	-9.04114E0	5.07832E-3	9.34124E-2	2.73147E1	-3.26741E1	-3.26332E1	2.67976E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.78501E-1	-8.95691E-1	-9.04615E0	-9.04124E0	5.24521E-3	9.32693E-2	2.72727E1	-3.26578E1	-3.26401E1	2.68322E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9926E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.78763E-1	-8.95834E-1	-9.04639E0	-9.04109E0	5.24521E-3	9.34839E-2	2.73576E1	-3.2711E1	-3.26148E1	2.68186E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.78453E-1	-8.95596E-1	-9.04627E0	-9.04088E0	5.45979E-3	9.36747E-2	2.72709E1	-3.26514E1	-3.26543E1	2.68022E1	1.19239E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9943E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.78453E-1	-8.95619E-1	-9.04617E0	-9.04109E0	5.43594E-3	9.34362E-2	2.72985E1	-3.26452E1	-3.26062E1	2.67938E1	1.19264E-7	2.51498E-3	2.51498E-3	6.32112E-3	3.00432E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.78429E-1	-8.95905E-1	-9.04648E0	-9.04107E0	5.53131E-3	9.38654E-2	2.73135E1	-3.26549E1	-3.26428E1	2.67812E1					
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.78668E-1	-8.96025E-1	-9.04613E0	-9.04095E0	5.45979E-3	9.3317E-2	2.73129E1	-3.26657E1	-3.26573E1	2.68136E1	1.1929E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.01738E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.78501E-1	-8.96239E-1	-9.04608E0	-9.04102E0	5.48363E-3	9.33409E-2	2.73299E1	-3.26809E1	-3.26354E1	2.68111E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.78572E-1	-8.95953E-1	-9.0462E0	-9.041E0	5.43594E-3	9.30786E-2	2.73387E1	-3.26951E1	-3.26404E1	2.67896E1	1.19188E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.04582E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.78763E-1	-8.96072E-1	-9.04603E0	-9.04083E0	5.24521E-3	9.3317E-2	2.73139E1	-3.26567E1	-3.26596E1	2.68106E1	1.1929E-7	2.51225E-3	2.51225E-3	6.33211E-3	3.02396E-1