[Scan]
initial_time=2015-12-18T20:29:35
final_time=2015-12-18T20:29:56
ip_count=19
run=1020
dataset=1
scan=134
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.7831E-1
ql1_imon=1.32226E-8
ql2_vset=
ql2_vmon=-8.95667E-1
ql2_imon=1.90648E-9
ql3_vset=
ql3_vmon=-9.0462E0
ql3_imon=2.63667E-10
ql4_vset=
ql4_vmon=-9.04129E0
ql4_imon=7.64847E-11
mult1=-1.16548E-8
mult2=-3.5929E-9
rf_tmon=-2.94629E-4
rf_agc=3.78999E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.69215E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.31674E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=2.00492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53615E1
cs_ef1b_imon=2.89216E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.0222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=2.41301E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35427E0
lens1_imon=2.49371E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64655E1
os_ef1alow_imon=2.9707E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.52957E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=2.95159E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.39823E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11378E1
os_restr1_imon=4.28574E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.32665E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63427E1
os_ef1bup_imon=3.07044E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25446E0
cs_ionrep_imon=1.19085E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=3.04334E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.38498E-8
tplens_vset=1.4E-1
tplens_vmon=1.6025E0
tplens_imon=-3.27202E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25659E1
iondef3_imon=1.48993E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.279E1
iondef2_imon=1.57453E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.0489E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29516E0
ionrepsh_imon=1.83715E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56298E0
os_ea2_imon=-7.0238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71159E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07599E0
os_ef2alow_imon=-2.69274E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02444E-1
os_ef2bup_imon=-5.39649E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=3.45481E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01879E1
cs_anode2_imon=2.26731E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74169E1
iondef1_imon=1.0875E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67649E1
iondef4_imon=1.08503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.33273E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=8.1731E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1145E0
cs_ionaccel_imon=-1.90038E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47257E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56197E1
einzel_imon=7.58706E-6
window_vset=0.0E0
window_vmon=1.49339E-1
window_imon=-1.22618E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.38952E-4
mask2_vset=0.0E0
mask2_vmon=-1.8628E1
mask2_imon=-6.9447E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.15865E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.29857E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.09494E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35831E0
defgridb_imon=6.02604E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3339E1
os_fil1_imon=9.43399E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06814E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6526E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30859E1
cs_fil1_imon=9.97068E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62366E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6696E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67342E-2
os_fil2_imon=-2.70394E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82547E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65088E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-2.40854E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.6978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28006E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.99172E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.78453E-1	-8.95905E-1	-9.04644E0	-9.04114E0	5.26905E-3	9.36985E-2	2.73253E1	-3.26554E1	-3.26132E1	2.68107E1	1.1929E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0148E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.78572E-1	-8.96144E-1	-9.04629E0	-9.04124E0	5.29289E-3	9.39846E-2	2.73075E1	-3.26726E1	-3.26183E1	2.68117E1	1.19264E-7	2.51456E-3	2.51456E-3	6.32402E-3	3.00882E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.78453E-1	-8.96049E-1	-9.04624E0	-9.04124E0	4.95911E-3	9.37223E-2	2.73303E1	-3.26416E1	-3.26188E1	2.67986E1	1.19188E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01223E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-8.78572E-1	-8.96072E-1	-9.04632E0	-9.04107E0	5.05447E-3	9.35078E-2	2.72835E1	-3.26825E1	-3.26392E1	2.68208E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09673E0	-8.78477E-1	-8.95953E-1	-9.04641E0	-9.04086E0	5.36442E-3	9.37939E-2	2.72697E1	-3.26785E1	-3.26502E1	2.6786E1	1.19238E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.78644E-1	-8.95786E-1	-9.04634E0	-9.04098E0	5.26905E-3	9.36747E-2	2.73086E1	-3.26785E1	-3.26549E1	2.68247E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.78429E-1	-8.96025E-1	-9.04634E0	-9.04105E0	5.126E-3	9.35555E-2	2.72696E1	-3.2664E1	-3.26548E1	2.681E1	1.19238E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09642E0	-8.78239E-1	-8.95858E-1	-9.04644E0	-9.0409E0	5.07832E-3	9.3317E-2	2.72702E1	-3.26687E1	-3.26302E1	2.68124E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.78501E-1	-8.95977E-1	-9.04634E0	-9.04055E0	5.22137E-3	9.32455E-2	2.72624E1	-3.26849E1	-3.26356E1	2.68232E1	1.19184E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.0201E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09657E0	-8.78572E-1	-8.95715E-1	-9.0462E0	-9.04074E0	5.34058E-3	9.33886E-2	2.7337E1	-3.26614E1	-3.25989E1	2.68238E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.03027E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.7831E-1	-8.95643E-1	-9.0461E0	-9.04088E0	5.26905E-3	9.32217E-2	2.73259E1	-3.26725E1	-3.26223E1	2.68334E1	1.19083E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.78382E-1	-8.95548E-1	-9.04613E0	-9.04107E0	5.24521E-3	9.35316E-2	2.73021E1	-3.26554E1	-3.2632E1	2.67944E1	1.19238E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.7831E-1	-8.95715E-1	-9.04639E0	-9.04098E0	5.17368E-3	9.35078E-2	2.73922E1	-3.27372E1	-3.25167E1	2.67968E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.78692E-1	-8.95905E-1	-9.04613E0	-9.04102E0	5.36442E-3	9.37223E-2	2.73057E1	-3.2644E1	-3.26879E1	2.68184E1	1.19238E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.78429E-1	-8.95905E-1	-9.04603E0	-9.04107E0	5.55515E-3	9.36508E-2	2.73237E1	-3.26543E1	-3.26266E1	2.6801E1	1.19186E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.78286E-1	-8.9612E-1	-9.0462E0	-9.04124E0	5.19753E-3	9.35078E-2	2.73488E1	-3.26531E1	-3.26555E1	2.68383E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98481E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.78358E-1	-8.95762E-1	-9.0461E0	-9.04095E0	5.29289E-3	9.34839E-2	2.72859E1	-3.26236E1	-3.26488E1	2.68118E1	1.19239E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.78429E-1	-8.95524E-1	-9.04622E0	-9.04102E0	4.98295E-3	9.32217E-2	2.73039E1	-3.26987E1	-3.26266E1	2.6816E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01347E-1
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.78525E-1	-8.95858E-1	-9.0461E0	-9.04093E0	5.24521E-3	9.34124E-2	2.73502E1	-3.26735E1	-3.25936E1	2.6789E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02922E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.7831E-1	-8.95667E-1	-9.0462E0	-9.04129E0	5.07832E-3	9.34124E-2	2.74169E1	-3.279E1	-3.25659E1	2.67649E1	1.1929E-7	2.51552E-3	2.51552E-3	6.28006E-3	3.00824E-1