[Scan]
initial_time=2015-12-18T20:30:34
final_time=2015-12-18T20:30:57
ip_count=19
run=1020
dataset=1
scan=136
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.78453E-1
ql1_imon=1.31907E-8
ql2_vset=
ql2_vmon=-8.95762E-1
ql2_imon=1.9259E-9
ql3_vset=
ql3_vmon=-9.04651E0
ql3_imon=2.84016E-10
ql4_vset=
ql4_vmon=-9.04095E0
ql4_imon=7.74384E-11
mult1=-1.08842E-8
mult2=-3.22961E-9
rf_tmon=-1.24393E-3
rf_agc=3.6566E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=1.70016E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66208E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53565E1
cs_ef1b_imon=2.87451E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05236E1
cs_ea1_imon=2.42363E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35309E0
lens1_imon=2.55742E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64346E1
os_ef1alow_imon=2.98385E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03891E1
cs_ea2_imon=1.54055E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=2.94492E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.40596E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11477E1
os_restr1_imon=4.29448E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.32488E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63715E1
os_ef1bup_imon=3.07231E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.19829E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93261E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01933E1
cs_anode1_imon=3.03657E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.39435E-8
tplens_vset=1.4E-1
tplens_vmon=1.56888E0
tplens_imon=-7.2365E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26482E1
iondef3_imon=1.49312E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27666E1
iondef2_imon=1.58939E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98381E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=4.05746E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29693E0
ionrepsh_imon=1.85768E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33363E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7466E1
cs_ef2b_imon=3.11725E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53702E0
os_ea2_imon=-7.12998E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71328E1
cs_ef2a_imon=3.17775E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0696E0
os_ef2alow_imon=-2.81425E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25928E-1
os_ef2bup_imon=-5.42916E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11E1
os_restr2_imon=3.44597E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.29043E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.26377E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.07804E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.3383E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=8.19013E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1443E0
cs_ionaccel_imon=-1.72441E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47113E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56836E1
einzel_imon=7.54984E-6
window_vset=0.0E0
window_vmon=2.11915E-1
window_imon=-9.81337E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.38946E-4
mask2_vset=0.0E0
mask2_vmon=-1.86474E1
mask2_imon=-7.93799E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.26483E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.63481E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.22944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=6.14638E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33377E1
os_fil1_imon=9.44767E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06244E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65444E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30872E1
cs_fil1_imon=9.97089E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63309E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66186E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.68608E-2
os_fil2_imon=-2.83273E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86749E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72301E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36707E-1
cs_fil2_imon=-2.57325E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00058E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22514E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.38902E-1
res40_imon=-2.61963E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.78811E-1	-8.96025E-1	-9.04617E0	-9.04119E0	5.17368E-3	9.36747E-2	2.73171E1	-3.26753E1	-3.2623E1	2.67811E1	1.19239E-7	2.51525E-3	2.51525E-3	6.35059E-3	2.9892E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.78739E-1	-8.95882E-1	-9.04615E0	-9.04083E0	5.36442E-3	9.36985E-2	2.72901E1	-3.26443E1	-3.262E1	2.68219E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.78644E-1	-8.95858E-1	-9.04603E0	-9.04114E0	4.79221E-3	9.377E-2	2.73051E1	-3.2672E1	-3.26041E1	2.68281E1	1.19266E-7	2.51659E-3	2.51659E-3	6.29498E-3	3.02144E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.78382E-1	-8.96001E-1	-9.04598E0	-9.041E0	4.91142E-3	9.37462E-2	2.73292E1	-3.26478E1	-3.26217E1	2.6805E1	1.1929E-7	2.51669E-3	2.51669E-3	6.33499E-3	3.00459E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.78167E-1	-8.95905E-1	-9.04615E0	-9.04076E0	5.19753E-3	9.38177E-2	2.72928E1	-3.26859E1	-3.2621E1	2.68119E1	1.1929E-7	2.5211E-3	2.5211E-3	6.33634E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.78406E-1	-8.95929E-1	-9.04629E0	-9.04102E0	5.17368E-3	9.38177E-2	2.73177E1	-3.26416E1	-3.26314E1	2.68322E1	1.1929E-7	2.52121E-3	2.52121E-3	6.32716E-3	3.0366E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.78358E-1	-8.95834E-1	-9.04622E0	-9.04105E0	5.43594E-3	9.38416E-2	2.72978E1	-3.26793E1	-3.26327E1	2.67974E1	1.19238E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.78644E-1	-8.95715E-1	-9.04636E0	-9.04095E0	5.05447E-3	9.3627E-2	2.73267E1	-3.26657E1	-3.26266E1	2.68166E1	1.1929E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.00144E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.78525E-1	-8.95882E-1	-9.04622E0	-9.04074E0	5.05447E-3	9.37223E-2	2.73263E1	-3.26638E1	-3.26018E1	2.68226E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.7862E-1	-8.95786E-1	-9.04615E0	-9.04105E0	5.24521E-3	9.36985E-2	2.73219E1	-3.26615E1	-3.2614E1	2.67842E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.78406E-1	-8.95953E-1	-9.04622E0	-9.04109E0	5.34058E-3	9.37223E-2	2.73111E1	-3.26434E1	-3.2629E1	2.68418E1	1.19186E-7	2.51007E-3	2.51007E-3	6.29645E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.78811E-1	-8.95929E-1	-9.04636E0	-9.04109E0	5.48363E-3	9.34601E-2	2.73086E1	-3.26472E1	-3.26508E1	2.68214E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.03185E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.78572E-1	-8.96025E-1	-9.04627E0	-9.04129E0	5.43594E-3	9.38416E-2	2.73135E1	-3.26627E1	-3.26476E1	2.67956E1	1.19238E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.78549E-1	-8.95739E-1	-9.04632E0	-9.04088E0	5.50747E-3	9.36985E-2	2.73151E1	-3.26552E1	-3.26114E1	2.68004E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9978E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.78739E-1	-8.95715E-1	-9.04644E0	-9.04098E0	5.53131E-3	9.34839E-2	2.73051E1	-3.26747E1	-3.26434E1	2.68196E1	1.1929E-7	2.51754E-3	2.51754E-3	6.31062E-3	2.99922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.78572E-1	-8.95858E-1	-9.04684E0	-9.041E0	5.45979E-3	9.34124E-2	2.73087E1	-3.26554E1	-3.2653E1	2.67956E1	1.19238E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00824E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.78716E-1	-8.95643E-1	-9.04665E0	-9.04107E0	5.26905E-3	9.33647E-2	2.72889E1	-3.26729E1	-3.262E1	2.68154E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.78739E-1	-8.95715E-1	-9.04648E0	-9.04105E0	5.67436E-3	9.36031E-2	2.73039E1	-3.26467E1	-3.26366E1	2.68314E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.03712E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.78668E-1	-8.95691E-1	-9.04632E0	-9.0409E0	5.53131E-3	9.33647E-2	2.73027E1	-3.26884E1	-3.26321E1	2.68144E1	1.19083E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.78453E-1	-8.95762E-1	-9.04651E0	-9.04095E0	5.72205E-3	9.39131E-2	2.73351E1	-3.27666E1	-3.26482E1	2.68076E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.99E-1