[Scan]
initial_time=2015-12-18T20:31:04
final_time=2015-12-18T20:31:25
ip_count=19
run=1020
dataset=1
scan=137
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.78429E-1
ql1_imon=1.32327E-8
ql2_vset=
ql2_vmon=-8.95882E-1
ql2_imon=1.93741E-9
ql3_vset=
ql3_vmon=-9.04627E0
ql3_imon=2.65372E-10
ql4_vset=
ql4_vmon=-9.04145E0
ql4_imon=7.92027E-11
mult1=-9.63202E-9
mult2=-2.83239E-9
rf_tmon=-5.5098E-3
rf_agc=3.27988E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.6775E-9
bslens_vset=-6.2E0
bslens_vmon=-6.7136E0
bslens_imon=2.54496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19821E1
lens5a_imon=1.97478E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04768E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=2.86377E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=2.43045E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43925E0
lens1_imon=2.68195E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64416E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04201E1
cs_ea2_imon=1.54723E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=2.94198E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.3948E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.29022E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15444E1
os_ea1_imon=2.3497E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=1.20981E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=3.04397E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=3.38856E-8
tplens_vset=1.4E-1
tplens_vmon=1.59938E0
tplens_imon=-4.68779E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25912E1
iondef3_imon=1.51911E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27143E1
iondef2_imon=1.58761E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.05636E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=1.83599E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.19108E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55672E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00464E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23252E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=3.45122E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29712E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02127E1
cs_anode2_imon=2.26443E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.07246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68647E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.36368E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=8.17309E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-2.01404E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=2.07732E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.38994E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=6.89254E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93752E3
defgrida_imon=6.63298E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.99347E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33397E1
os_fil1_imon=9.43039E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07143E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65181E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=9.96041E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63087E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66506E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.86735E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.02529E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22579E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19186E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.98335E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.78549E-1	-8.95858E-1	-9.04641E0	-9.04102E0	5.24521E-3	9.35078E-2	2.73411E1	-3.26488E1	-3.26176E1	2.68166E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.03976E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.78477E-1	-8.96215E-1	-9.04648E0	-9.04102E0	5.38826E-3	9.36508E-2	2.72811E1	-3.26627E1	-3.26549E1	2.68076E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02922E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.78358E-1	-8.95953E-1	-9.04629E0	-9.04107E0	5.22137E-3	9.33647E-2	2.73157E1	-3.26826E1	-3.26207E1	2.68117E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.78119E-1	-8.95834E-1	-9.04622E0	-9.041E0	5.53131E-3	9.3317E-2	2.73079E1	-3.26903E1	-3.2622E1	2.68082E1	1.19239E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.78406E-1	-8.95691E-1	-9.04632E0	-9.04086E0	5.55515E-3	9.35555E-2	2.72795E1	-3.26585E1	-3.26603E1	2.68001E1	1.1929E-7	2.52405E-3	2.52405E-3	6.2815E-3	3.00989E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.78453E-1	-8.95786E-1	-9.04641E0	-9.04086E0	5.38826E-3	9.34839E-2	2.73131E1	-3.26334E1	-3.26003E1	2.67932E1	1.19236E-7	2.51271E-3	2.51271E-3	6.34737E-3	3.01337E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.78286E-1	-8.95643E-1	-9.04608E0	-9.04086E0	5.26905E-3	9.36031E-2	2.73257E1	-3.26744E1	-3.2636E1	2.68304E1	1.1929E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.02545E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.7831E-1	-8.9581E-1	-9.04608E0	-9.04133E0	5.53131E-3	9.38177E-2	2.72823E1	-3.26356E1	-3.26236E1	2.68563E1	1.1929E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.7831E-1	-8.95882E-1	-9.04603E0	-9.04121E0	5.17368E-3	9.36031E-2	2.72961E1	-3.26657E1	-3.2632E1	2.68082E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.78096E-1	-8.95977E-1	-9.0462E0	-9.04129E0	5.36442E-3	9.38416E-2	2.73069E1	-3.26963E1	-3.259E1	2.67595E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.78048E-1	-8.955E-1	-9.04596E0	-9.041E0	5.50747E-3	9.34362E-2	2.72865E1	-3.26891E1	-3.26152E1	2.68286E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3514E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.78477E-1	-8.95548E-1	-9.04586E0	-9.04086E0	5.36442E-3	9.35793E-2	2.73193E1	-3.26526E1	-3.26455E1	2.6796E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.78453E-1	-8.95905E-1	-9.04646E0	-9.04102E0	5.55515E-3	9.39131E-2	2.72861E1	-3.26248E1	-3.26095E1	2.682E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.78334E-1	-8.95619E-1	-9.04617E0	-9.04102E0	5.55515E-3	9.37939E-2	2.7298E1	-3.26691E1	-3.26384E1	2.68593E1	1.1929E-7	2.51248E-3	2.51248E-3	6.33538E-3	2.99879E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.78263E-1	-8.9581E-1	-9.04617E0	-9.04102E0	5.07832E-3	9.35078E-2	2.72991E1	-3.26675E1	-3.26422E1	2.68024E1	1.1929E-7	2.51647E-3	2.51647E-3	6.3428E-3	3.00766E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.78668E-1	-8.95929E-1	-9.04622E0	-9.04114E0	5.126E-3	9.33647E-2	2.72892E1	-3.26543E1	-3.26154E1	2.6804E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.01995E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.78477E-1	-8.95882E-1	-9.04634E0	-9.04131E0	4.95911E-3	9.33886E-2	2.73231E1	-3.26597E1	-3.26152E1	2.68196E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.78692E-1	-8.95882E-1	-9.04603E0	-9.04124E0	5.29289E-3	9.36031E-2	2.73428E1	-3.26685E1	-3.26201E1	2.68412E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.7862E-1	-8.9581E-1	-9.04605E0	-9.04131E0	5.29289E-3	9.34839E-2	2.73045E1	-3.26801E1	-3.26651E1	2.67637E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.78429E-1	-8.95882E-1	-9.04627E0	-9.04145E0	5.22137E-3	9.32455E-2	2.73069E1	-3.27143E1	-3.25912E1	2.68647E1	1.19186E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00824E-1