[Scan]
initial_time=2015-12-18T20:32:11
final_time=2015-12-18T20:32:31
ip_count=19
run=1020
dataset=2
scan=139
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.53334E-2
qbias_imon=-3.80748E-6
ql1_vset=
ql1_vmon=-8.7997E1
ql1_imon=-1.80993E-9
ql2_vset=
ql2_vmon=2.6226E-4
ql2_imon=1.47165E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-5.5649E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.60654E-8
mult1=-2.57791E-8
mult2=-2.67515E-9
rf_tmon=-5.03582E-3
rf_agc=3.25326E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=6.55293E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63489E0
bslens_imon=2.75044E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=1.97118E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=2.89296E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05421E1
cs_ea1_imon=2.4254E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99569E0
lens1_imon=1.35172E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04393E1
cs_ea2_imon=1.54291E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.96504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.40016E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.28085E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.33455E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.2145E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=3.04433E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=4.04747E-8
tplens_vset=1.4E-1
tplens_vmon=1.55371E0
tplens_imon=-5.06042E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26334E1
iondef3_imon=1.49784E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.57643E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98494E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=9.68266E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24549E0
ionrepsh_imon=1.85834E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.16512E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48822E0
os_ea2_imon=-6.31002E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16645E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11027E1
os_restr2_imon=3.45374E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.25578E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72922E1
iondef1_imon=1.08075E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67795E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.45242E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=8.18225E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47114E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=1.96319E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.48014E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50165E3
multb_neg_imon=7.46933E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32637E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33367E1
os_fil1_imon=9.42823E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06759E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65274E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.97279E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62708E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66885E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.95763E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67082E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22584E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.97963E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92328E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.536E3	0.0E0	1.47E2	4.1E1	-7.37103E-2	-8.79968E1	6.91414E-4	-8.8001E1	6.19888E-4	5.26905E-3	9.34362E-2	2.73045E1	-3.26708E1	-3.26437E1	2.68076E1	1.19238E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00041E-1
2.0E0	1.0737E5	1.14E2	3.16E2	1.6E2	-7.25507E-2	-8.79966E1	4.76837E-4	-8.80011E1	2.86102E-4	5.29289E-3	9.35316E-2	2.73002E1	-3.2675E1	-3.26278E1	2.67914E1	1.1929E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.98156E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.79967E1	3.09944E-4	-8.80012E1	3.33786E-4	4.98295E-3	9.36031E-2	2.73287E1	-3.26543E1	-3.26254E1	2.6792E1	1.19237E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.00676E-1
4.0E0	2.3098E4	9.0E0	6.55E2	3.98E2	-7.37874E-2	-8.79966E1	4.05312E-4	-8.80013E1	1.19209E-4	5.19753E-3	9.36985E-2	2.73364E1	-3.26579E1	-3.26449E1	2.68154E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.79969E1	3.33786E-4	-8.80014E1	-9.53674E-5	5.45979E-3	9.33886E-2	2.73167E1	-3.26511E1	-3.2645E1	2.68034E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.79971E1	1.43051E-4	-8.80014E1	1.19209E-4	5.26905E-3	9.35555E-2	2.7324E1	-3.2659E1	-3.26431E1	2.6834E1	1.1929E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.79968E1	4.52995E-4	-8.80012E1	3.33786E-4	5.53131E-3	9.35078E-2	2.72867E1	-3.26689E1	-3.26211E1	2.6819E1	1.1929E-7	2.51847E-3	2.51847E-3	6.28592E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.79971E1	2.14577E-4	-8.80008E1	1.90735E-4	5.36442E-3	9.36508E-2	2.72859E1	-3.26891E1	-3.26038E1	2.68238E1	1.1929E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.03081E-1
1.2E1	1.28E2	0.0E0	4.85E2	3.23E2	-7.47923E-2	-8.79971E1	0.0E0	-8.8001E1	1.19209E-4	5.29289E-3	9.35793E-2	2.72886E1	-3.26443E1	-3.26183E1	2.67986E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.7997E1	2.38419E-5	-8.80012E1	2.38419E-4	5.17368E-3	9.36747E-2	2.73039E1	-3.26621E1	-3.26452E1	2.68214E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99686E-1
1.4E1	4.053E3	3.0E0	5.66E2	3.82E2	-7.34782E-2	-8.7997E1	2.14577E-4	-8.8001E1	1.66893E-4	4.86374E-3	9.35316E-2	2.73255E1	-3.26813E1	-3.26416E1	2.67956E1	1.19238E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01609E-1
1.5E1	1.12E2	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.79969E1	-7.15256E-5	-8.8001E1	1.43051E-4	5.17368E-3	9.3627E-2	2.73112E1	-3.26548E1	-3.26236E1	2.68052E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01085E-1
1.6E1	8.01E2	0.0E0	6.47E2	4.41E2	-7.44831E-2	-8.79973E1	-7.15256E-5	-8.8001E1	2.6226E-4	5.38826E-3	9.36985E-2	2.73315E1	-3.26837E1	-3.26212E1	2.68106E1	1.19238E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.02396E-1
1.7E1	1.442E3	0.0E0	6.87E2	4.7E2	-7.44831E-2	-8.79972E1	-4.76837E-5	-8.80009E1	2.6226E-4	5.07832E-3	9.34601E-2	2.73231E1	-3.26573E1	-3.2593E1	2.68292E1	1.1929E-7	2.52538E-3	2.52538E-3	6.29098E-3	3.01347E-1
1.8E1	5.944E3	2.0E0	7.27E2	5.0E2	-7.38649E-2	-8.79974E1	-4.76837E-5	-8.80011E1	2.38419E-4	5.05447E-3	9.37462E-2	2.72937E1	-3.26735E1	-3.26158E1	2.68262E1	1.1929E-7	2.51401E-3	2.51401E-3	6.32679E-3	3.02072E-1
1.9E1	2.3E3	2.0E0	7.68E2	5.29E2	-7.30146E-2	-8.79973E1	2.6226E-4	-8.80007E1	-9.53674E-5	5.10216E-3	9.37939E-2	2.73021E1	-3.26785E1	-3.26349E1	2.67752E1					
2.0E1	2.3949E4	9.0E0	8.08E2	5.58E2	-7.38649E-2	-8.7997E1	1.66893E-4	-8.80009E1	4.52995E-4	5.45979E-3	9.35316E-2	2.73015E1	-3.26609E1	-3.26284E1	2.68196E1	1.19239E-7	2.52026E-3	2.52026E-3	6.30469E-3	3.01674E-1
2.1E1	5.3E1	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.79969E1	1.43051E-4	-8.80008E1	5.72205E-4	5.72205E-3	9.38892E-2	2.72992E1	-3.26679E1	-3.26478E1	2.6818E1					
2.2E1	1.698E3	0.0E0	8.89E2	6.17E2	-7.47923E-2	-8.79969E1	3.09944E-4	-8.80009E1	4.29153E-4	5.36442E-3	9.36985E-2	2.73015E1	-3.26627E1	-3.26284E1	2.68196E1	1.19239E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00966E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.53334E-2	-8.7997E1	2.6226E-4	-8.8001E1	4.76837E-4	5.48363E-3	9.35555E-2	2.72922E1	-3.26744E1	-3.26334E1	2.67795E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.97963E-1