[Scan]
initial_time=2015-12-18T20:32:39
final_time=2015-12-18T20:32:59
ip_count=19
run=1020
dataset=2
scan=140
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.8724E-6
ql1_vset=
ql1_vmon=-8.79978E1
ql1_imon=-1.37944E-9
ql2_vset=
ql2_vmon=3.09944E-4
ql2_imon=1.4274E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-4.53055E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.58863E-8
mult1=-2.1609E-8
mult2=-2.71041E-9
rf_tmon=-5.54949E-3
rf_agc=3.23991E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=6.4764E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.68195E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20205E1
lens5a_imon=1.9928E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53694E1
cs_ef1b_imon=2.89801E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.44667E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05157E0
lens1_imon=1.49953E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03648E1
cs_ea2_imon=1.53642E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.96144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.40348E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.28589E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.31437E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63876E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=1.22243E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=3.04144E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=4.03967E-8
tplens_vset=1.4E-1
tplens_vmon=1.58375E0
tplens_imon=-4.25519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26353E1
iondef3_imon=1.47297E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.59878E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=9.31668E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=1.81039E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.19324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53629E0
os_ea2_imon=-6.59841E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00796E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70975E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.44221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73254E1
iondef1_imon=1.07823E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.07404E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.4238E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=8.17312E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.7041E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47104E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=1.71092E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86122E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.8839E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.359E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.372E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44367E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33378E1
os_fil1_imon=9.45315E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07654E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64988E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.97759E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62264E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66597E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78996E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87061E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.67197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.3133E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22607E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.03741E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.489E3	0.0E0	1.47E2	4.1E1	-7.37103E-2	-8.79975E1	-2.86102E-4	-8.80012E1	4.52995E-4	5.19753E-3	9.377E-2	2.72943E1	-3.26759E1	-3.26002E1	2.68148E1	1.1929E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.99E-1
2.0E0	1.07834E5	8.5E1	3.16E2	1.6E2	-7.30146E-2	-8.79974E1	2.14577E-4	-8.80011E1	3.33786E-4	5.45979E-3	9.39131E-2	2.73273E1	-3.26636E1	-3.26442E1	2.68328E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.99E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.79973E1	1.66893E-4	-8.80008E1	2.14577E-4	5.65052E-3	9.33409E-2	2.7321E1	-3.26445E1	-3.26476E1	2.68082E1	1.1929E-7	2.51472E-3	2.51472E-3	6.31779E-3	3.0E-1
4.0E0	2.2956E4	1.1E1	6.55E2	3.98E2	-7.33239E-2	-8.79974E1	2.86102E-4	-8.80009E1	0.0E0	5.55515E-3	9.36985E-2	2.73464E1	-3.26319E1	-3.26337E1	2.67926E1	1.1929E-7	2.51838E-3	2.51838E-3	6.3131E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.79977E1	-1.43051E-4	-8.80009E1	7.15256E-5	5.6982E-3	9.35555E-2	2.72955E1	-3.26741E1	-3.26068E1	2.67896E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.79974E1	1.43051E-4	-8.80008E1	3.33786E-4	5.6982E-3	9.37462E-2	2.73171E1	-3.26627E1	-3.265E1	2.68058E1	1.1929E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.79977E1	2.6226E-4	-8.80008E1	2.14577E-4	5.29289E-3	9.36031E-2	2.73291E1	-3.26735E1	-3.26452E1	2.68028E1	1.19238E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.79974E1	2.14577E-4	-8.80009E1	2.38419E-4	5.60284E-3	9.34124E-2	2.73003E1	-3.26741E1	-3.26308E1	2.68148E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01871E-1
1.2E1	1.35E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.79977E1	2.14577E-4	-8.80008E1	9.53674E-5	5.4121E-3	9.35316E-2	2.73105E1	-3.26567E1	-3.26254E1	2.67998E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.79976E1	1.66893E-4	-8.80005E1	7.15256E-4	5.60284E-3	9.35793E-2	2.72809E1	-3.26378E1	-3.26343E1	2.67914E1	1.19239E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.01223E-1
1.4E1	4.096E3	3.0E0	5.66E2	3.82E2	-7.27828E-2	-8.79977E1	4.76837E-4	-8.80011E1	3.57628E-4	5.48363E-3	9.35793E-2	2.73375E1	-3.26774E1	-3.26389E1	2.6804E1	1.19238E-7	2.50898E-3	2.50898E-3	6.30192E-3	3.02396E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.79974E1	4.76837E-4	-8.80007E1	5.72205E-4	5.36442E-3	9.36508E-2	2.73069E1	-3.26681E1	-3.26278E1	2.68226E1	1.19238E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
1.6E1	7.89E2	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.79977E1	4.76837E-4	-8.80007E1	2.38419E-4	5.34058E-3	9.36985E-2	2.73087E1	-3.26591E1	-3.26272E1	2.67854E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.7E1	1.425E3	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.79976E1	3.8147E-4	-8.80008E1	3.33786E-4	5.43594E-3	9.37223E-2	2.73328E1	-3.26543E1	-3.2659E1	2.68124E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00302E-1
1.8E1	6.083E3	1.0E0	7.27E2	5.0E2	-7.36328E-2	-8.79975E1	4.52995E-4	-8.80009E1	2.38419E-4	5.4121E-3	9.35316E-2	2.73103E1	-3.26558E1	-3.26292E1	2.68192E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00563E-1
1.9E1	2.326E3	2.0E0	7.68E2	5.29E2	-7.23189E-2	-8.79977E1	5.24521E-4	-8.80009E1	1.90735E-4	5.50747E-3	9.36031E-2	2.72382E1	-3.26382E1	-3.27328E1	2.68075E1	1.1929E-7	2.51641E-3	2.51641E-3	6.32174E-3	3.01381E-1
2.0E1	2.4146E4	1.2E1	8.08E2	5.58E2	-7.20871E-2	-8.79977E1	4.76837E-4	-8.8001E1	1.19209E-4	5.29289E-3	9.3627E-2	2.73105E1	-3.2635E1	-3.26248E1	2.67974E1	1.1929E-7	2.5199E-3	2.5199E-3	6.28279E-3	3.01314E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.79979E1	4.52995E-4	-8.80009E1	1.19209E-4	5.65052E-3	9.34839E-2	2.73287E1	-3.26691E1	-3.26402E1	2.68001E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.99E-1
2.2E1	1.571E3	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.79975E1	6.67572E-4	-8.80009E1	2.14577E-4	5.50747E-3	9.34362E-2	2.73039E1	-3.26512E1	-3.26044E1	2.68052E1	1.19188E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.79978E1	3.09944E-4	-8.80008E1	3.33786E-4	5.36442E-3	9.34124E-2	2.73254E1	-3.26567E1	-3.26353E1	2.68196E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02396E-1