[Scan]
initial_time=2015-12-18T20:33:34
final_time=2015-12-18T20:33:54
ip_count=19
run=1020
dataset=2
scan=142
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.81487E-6
ql1_vset=
ql1_vmon=-8.79985E1
ql1_imon=-1.16285E-9
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.44402E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-3.58655E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.58048E-8
mult1=-1.75617E-8
mult2=-2.72326E-9
rf_tmon=-3.06422E-3
rf_agc=3.38518E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=6.27327E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64524E0
bslens_imon=2.46593E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.203E1
lens5a_imon=1.98207E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.04894E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54298E1
cs_ef1b_imon=2.87885E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.44266E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02737E0
lens1_imon=1.49626E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64558E1
os_ef1alow_imon=2.98926E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03751E1
cs_ea2_imon=1.52699E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84357E1
cs_ef1a_imon=2.93649E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.40124E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11155E1
os_restr1_imon=4.29167E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14926E1
os_ea1_imon=2.33578E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63891E1
os_ef1bup_imon=3.08058E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26985E0
cs_ionrep_imon=1.19606E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.93089E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02221E1
cs_anode1_imon=3.03903E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=4.03608E-8
tplens_vset=1.4E-1
tplens_vmon=1.59552E0
tplens_imon=-2.55746E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.48402E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.57511E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98449E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=9.31597E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26495E0
ionrepsh_imon=1.8223E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33493E1
lens5b_imon=2.19033E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7457E1
cs_ef2b_imon=3.12736E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5037E0
os_ea2_imon=-8.21384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71251E1
cs_ef2a_imon=3.17901E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09822E0
os_ef2alow_imon=-2.64168E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.20711E-1
os_ef2bup_imon=-5.4823E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10812E1
os_restr2_imon=3.44885E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.28606E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.25609E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72915E1
iondef1_imon=1.09321E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68337E1
iondef4_imon=1.08204E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.4889E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=8.18615E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11018E0
cs_ionaccel_imon=-2.0017E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.65416E-6
window_vset=0.0E0
window_vmon=1.9826E-1
window_imon=-8.86411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86394E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.52361E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.46946E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=6.92491E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43113E0
defgridb_imon=6.19399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.44167E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05994E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65371E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30818E1
cs_fil1_imon=9.97081E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62983E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66664E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7138E-2
os_fil2_imon=-2.80597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83483E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82022E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36509E-1
cs_fil2_imon=-2.67498E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12374E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.40671E-1
res40_imon=-2.56309E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.601E3	4.0E0	1.47E2	4.1E1	-7.29374E-2	-8.79983E1	2.14577E-4	-8.80007E1	1.90735E-4	5.17368E-3	9.37223E-2	2.73345E1	-3.26603E1	-3.26506E1	2.67824E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.99E-1
2.0E0	1.08392E5	1.04E2	3.16E2	1.6E2	-7.29374E-2	-8.7998E1	1.19209E-4	-8.80006E1	7.15256E-5	5.34058E-3	9.37462E-2	2.73285E1	-3.26705E1	-3.26278E1	2.67854E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.02396E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.79981E1	3.33786E-4	-8.80007E1	-9.53674E-5	5.24521E-3	9.37223E-2	2.73399E1	-3.26874E1	-3.26413E1	2.68238E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
4.0E0	2.3074E4	1.4E1	6.55E2	3.98E2	-7.20871E-2	-8.7998E1	0.0E0	-8.80009E1	3.09944E-4	5.50747E-3	9.36031E-2	2.73255E1	-3.26645E1	-3.26609E1	2.68124E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.79981E1	3.09944E-4	-8.80006E1	2.38419E-4	5.43594E-3	9.37462E-2	2.72859E1	-3.26711E1	-3.26422E1	2.68454E1	1.19238E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.03185E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.79981E1	7.15256E-5	-8.80008E1	3.09944E-4	5.45979E-3	9.377E-2	2.72904E1	-3.26487E1	-3.26223E1	2.67745E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.7998E1	-2.38419E-5	-8.80005E1	2.14577E-4	5.60284E-3	9.35555E-2	2.73181E1	-3.26178E1	-3.26472E1	2.68209E1	1.19186E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.7998E1	-2.38419E-5	-8.80005E1	3.33786E-4	5.4121E-3	9.34124E-2	2.734E1	-3.26566E1	-3.2604E1	2.68225E1	1.1929E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
1.2E1	1.42E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.79981E1	-7.15256E-5	-8.80007E1	2.14577E-4	5.07832E-3	9.34839E-2	2.72967E1	-3.26404E1	-3.2653E1	2.68106E1	1.19237E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.00676E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.79982E1	2.38419E-4	-8.80009E1	1.43051E-4	5.14984E-3	9.34362E-2	2.73523E1	-3.26697E1	-3.26337E1	2.68076E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
1.4E1	4.098E3	3.0E0	5.66E2	3.82E2	-7.34782E-2	-8.79982E1	1.43051E-4	-8.80008E1	2.6226E-4	5.38826E-3	9.34839E-2	2.73039E1	-3.26783E1	-3.26254E1	2.67992E1	1.19238E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00041E-1
1.5E1	1.07E2	0.0E0	6.06E2	4.11E2	-7.43285E-2	-8.7998E1	-3.09944E-4	-8.80008E1	2.38419E-4	5.19753E-3	9.33886E-2	2.72812E1	-3.26487E1	-3.26462E1	2.68063E1	1.1929E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9978E-1
1.6E1	7.82E2	1.0E0	6.47E2	4.41E2	-7.37103E-2	-8.7998E1	-7.15256E-5	-8.8001E1	3.09944E-4	5.22137E-3	9.3627E-2	2.73234E1	-3.26815E1	-3.26313E1	2.6818E1	1.1929E-7	2.51498E-3	2.51498E-3	6.31014E-3	2.99E-1
1.7E1	1.489E3	2.0E0	6.87E2	4.7E2	-7.33239E-2	-8.79982E1	-4.76837E-5	-8.80008E1	1.90735E-4	4.74453E-3	9.38177E-2	2.73273E1	-3.26717E1	-3.2626E1	2.68274E1					
1.8E1	6.054E3	3.0E0	7.27E2	5.0E2	-7.25507E-2	-8.79984E1	2.38419E-5	-8.80006E1	1.66893E-4	5.24521E-3	9.31978E-2	2.73063E1	-3.26585E1	-3.26278E1	2.68436E1	1.1929E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.0148E-1
1.9E1	2.354E3	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.79982E1	2.38419E-5	-8.80008E1	2.14577E-4	4.88758E-3	9.35555E-2	2.72937E1	-3.26212E1	-3.26476E1	2.68388E1	1.1929E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.02511E-1
2.0E1	2.4188E4	1.1E1	8.08E2	5.58E2	-7.20871E-2	-8.79982E1	2.14577E-4	-8.80007E1	3.09944E-4	5.38826E-3	9.35555E-2	2.73051E1	-3.26419E1	-3.26484E1	2.68221E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02922E-1
2.1E1	4.7E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.79983E1	5.48363E-4	-8.8001E1	2.38419E-5	5.4121E-3	9.36985E-2	2.72915E1	-3.26803E1	-3.26502E1	2.68196E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
2.2E1	1.742E3	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.79984E1	3.8147E-4	-8.8001E1	1.19209E-4	5.43594E-3	9.34601E-2	2.73213E1	-3.26693E1	-3.26026E1	2.67866E1	1.19264E-7	2.51106E-3	2.51106E-3	6.31827E-3	3.00378E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.79985E1	-1.43051E-4	-8.80005E1	1.43051E-4	5.36442E-3	9.35078E-2	2.72915E1	-3.2662E1	-3.26266E1	2.68337E1