[Scan]
initial_time=2015-12-18T20:34:01
final_time=2015-12-18T20:34:22
ip_count=19
run=1020
dataset=2
scan=143
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.74411E-6
ql1_vset=
ql1_vmon=-8.79989E1
ql1_imon=-1.08591E-9
ql2_vset=
ql2_vmon=7.15256E-5
ql2_imon=1.43276E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-3.40387E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.57739E-8
mult1=-1.64711E-8
mult2=-2.57489E-9
rf_tmon=-6.92174E-3
rf_agc=3.15972E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=6.2449E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67524E0
bslens_imon=2.62754E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19878E1
lens5a_imon=1.97032E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05034E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53655E1
cs_ef1b_imon=2.90093E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02367E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05025E1
cs_ea1_imon=2.41144E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9986E0
lens1_imon=1.31261E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64702E1
os_ef1alow_imon=2.9698E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04162E1
cs_ea2_imon=1.55858E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=2.95894E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.40146E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11192E1
os_restr1_imon=4.28793E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15514E1
os_ea1_imon=2.33174E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63698E1
os_ef1bup_imon=3.07908E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23924E0
cs_ionrep_imon=1.19826E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.9353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01828E1
cs_anode1_imon=3.04502E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=4.04875E-8
tplens_vset=1.4E-1
tplens_vmon=1.62123E0
tplens_imon=-2.2269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2614E1
iondef3_imon=1.48695E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.55858E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98592E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=9.11355E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30107E0
ionrepsh_imon=1.8425E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33174E1
lens5b_imon=2.1716E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.11426E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54838E0
os_ea2_imon=-7.2956E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00498E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71495E1
cs_ef2a_imon=3.18761E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07764E0
os_ef2alow_imon=-2.67536E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0886E-1
os_ef2bup_imon=-5.39622E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.44735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29745E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01921E1
cs_anode2_imon=2.25683E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.08991E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.07568E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.46507E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=8.17618E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.85948E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47106E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56274E1
einzel_imon=7.66164E-6
window_vset=0.0E0
window_vmon=1.7331E-1
window_imon=-1.21202E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.3911E-4
mask2_vset=0.0E0
mask2_vmon=-1.86138E1
mask2_imon=-7.74134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.10122E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.5466E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.49422E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26872E0
defgridb_imon=6.2197E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33389E1
os_fil1_imon=9.43967E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07797E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65179E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30868E1
cs_fil1_imon=9.96014E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62353E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66613E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7795E-2
os_fil2_imon=-2.69993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68232E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3503E-1
cs_fil2_imon=-3.1428E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.05424E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22621E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.45662E-1
res40_imon=-2.49572E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.604E3	2.0E0	1.47E2	4.1E1	-7.32464E-2	-8.79983E1	-1.19209E-4	-8.80009E1	2.86102E-4	5.53131E-3	9.35078E-2	2.73213E1	-3.26446E1	-3.26398E1	2.67908E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
2.0E0	1.07782E5	9.7E1	3.16E2	1.6E2	-7.37103E-2	-8.79984E1	7.15256E-5	-8.8001E1	1.66893E-4	5.50747E-3	9.34601E-2	2.72996E1	-3.2637E1	-3.26334E1	2.68046E1	1.1929E-7	2.51804E-3	2.51804E-3	6.34099E-3	2.98819E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.79988E1	2.38419E-5	-8.80007E1	4.76837E-4	5.126E-3	9.33409E-2	2.73346E1	-3.2695E1	-3.2639E1	2.6798E1	1.19238E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02659E-1
4.0E0	2.3159E4	9.0E0	6.55E2	3.98E2	-7.3401E-2	-8.79983E1	-7.15256E-5	-8.80009E1	4.05312E-4	5.4121E-3	9.35316E-2	2.73075E1	-3.2675E1	-3.26493E1	2.68106E1	1.19238E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.02133E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.79984E1	-4.76837E-5	-8.80007E1	2.6226E-4	5.22137E-3	9.35078E-2	2.72937E1	-3.26663E1	-3.26122E1	2.67992E1	1.19238E-7	2.51771E-3	2.51771E-3	6.3514E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.79984E1	-7.15256E-5	-8.80008E1	1.66893E-4	5.36442E-3	9.3174E-2	2.7361E1	-3.26843E1	-3.26116E1	2.68106E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.79984E1	1.90735E-4	-8.80009E1	3.33786E-4	5.29289E-3	9.3627E-2	2.73111E1	-3.26885E1	-3.26386E1	2.68052E1	1.19238E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.79985E1	2.38419E-5	-8.80005E1	3.57628E-4	5.19753E-3	9.37939E-2	2.72805E1	-3.26464E1	-3.26332E1	2.68196E1	1.19237E-7	2.51915E-3	2.51915E-3	6.29067E-3	2.98819E-1
1.2E1	1.47E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.79986E1	-7.15256E-5	-8.80009E1	3.33786E-4	5.38826E-3	9.34124E-2	2.72919E1	-3.26446E1	-3.2638E1	2.68142E1	1.19264E-7	2.51498E-3	2.51498E-3	6.31837E-3	3.00954E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.79987E1	2.38419E-5	-8.80004E1	3.57628E-4	5.10216E-3	9.3317E-2	2.72962E1	-3.27012E1	-3.26024E1	2.68048E1					
1.4E1	4.097E3	3.0E0	5.66E2	3.82E2	-7.35556E-2	-8.79989E1	2.38419E-5	-8.80009E1	3.57628E-4	5.14984E-3	9.37462E-2	2.73188E1	-3.26609E1	-3.26597E1	2.68232E1	1.19248E-7	2.51696E-3	2.51696E-3	6.31624E-3	3.02349E-1
1.5E1	1.27E2	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.79984E1	-2.6226E-4	-8.80005E1	5.00679E-4	5.43594E-3	9.33409E-2	2.73393E1	-3.2681E1	-3.26619E1	2.67897E1	1.1929E-7	2.51384E-3	2.51384E-3	6.3245E-3	3.0352E-1
1.6E1	7.81E2	2.0E0	6.47E2	4.41E2	-7.31692E-2	-8.79984E1	-4.76837E-4	-8.80006E1	7.15256E-5	5.03063E-3	9.35316E-2	2.72918E1	-3.26422E1	-3.26216E1	2.6803E1	1.1929E-7	2.51203E-3	2.51203E-3	6.31036E-3	3.02885E-1
1.7E1	1.404E3	1.0E0	6.87E2	4.7E2	-7.32464E-2	-8.79985E1	-1.43051E-4	-8.80007E1	4.52995E-4	5.48363E-3	9.36985E-2	2.73543E1	-3.27054E1	-3.26625E1	2.68265E1					
1.8E1	6.053E3	3.0E0	7.27E2	5.0E2	-7.29374E-2	-8.79986E1	1.19209E-4	-8.80007E1	4.76837E-4	5.43594E-3	9.34124E-2	2.72941E1	-3.26474E1	-3.26627E1	2.68002E1	1.19188E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00966E-1
1.9E1	2.375E3	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.79985E1	2.38419E-5	-8.80006E1	2.14577E-4	5.19753E-3	9.33409E-2	2.72315E1	-3.26393E1	-3.26938E1	2.68157E1	1.1929E-7	2.51136E-3	2.51136E-3	6.31299E-3	3.02545E-1
2.0E1	2.4204E4	1.5E1	8.08E2	5.58E2	-7.19325E-2	-8.79988E1	7.15256E-5	-8.80006E1	-2.38419E-5	5.05447E-3	9.32693E-2	2.7297E1	-3.26547E1	-3.2616E1	2.682E1	1.1929E-7	2.51162E-3	2.51162E-3	6.29703E-3	3.02479E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.79986E1	2.38419E-5	-8.80003E1	-2.38419E-5	5.07832E-3	9.33886E-2	2.73352E1	-3.26378E1	-3.26089E1	2.68024E1	1.1929E-7	2.51296E-3	2.51296E-3	6.29002E-3	3.01748E-1
2.2E1	1.699E3	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.79988E1	7.15256E-5	-8.80004E1	-2.38419E-5	5.24521E-3	9.32217E-2	2.73345E1	-3.26789E1	-3.26296E1	2.68364E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.79989E1	7.15256E-5	-8.80001E1	2.38419E-4	5.29289E-3	9.33409E-2	2.73375E1	-3.26536E1	-3.2614E1	2.68094E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00197E-1