[Scan]
initial_time=2015-12-18T20:34:56
final_time=2015-12-18T20:35:17
ip_count=19
run=1020
dataset=2
scan=145
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.84031E-6
ql1_vset=
ql1_vmon=-8.79989E1
ql1_imon=-1.0376E-9
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.40743E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.96707E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.57106E-8
mult1=-1.85661E-8
mult2=-2.83039E-9
rf_tmon=-4.06181E-3
rf_agc=3.34778E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=5.80645E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63606E0
bslens_imon=2.63121E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.04986E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=2.87134E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02044E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05227E1
cs_ea1_imon=2.4265E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98146E0
lens1_imon=1.40444E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.99567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03482E1
cs_ea2_imon=1.54462E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.94125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.40131E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11117E1
os_restr1_imon=4.30572E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15526E1
os_ea1_imon=2.34239E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63948E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24414E0
cs_ionrep_imon=1.2012E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01545E1
cs_anode1_imon=3.0346E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=4.05002E-8
tplens_vset=1.4E-1
tplens_vmon=1.59124E0
tplens_imon=-1.89633E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.49467E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26981E1
iondef2_imon=1.58208E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98482E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=9.25481E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27965E0
ionrepsh_imon=1.82156E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33639E1
lens5b_imon=2.18188E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52818E0
os_ea2_imon=-5.49584E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.24454E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11081E1
os_restr2_imon=3.44329E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.28349E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02085E1
cs_anode2_imon=2.2583E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.1057E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.07548E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.38768E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=8.1812E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47143E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=1.48867E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.4107E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.11223E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36065E0
defgridb_imon=6.17563E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33382E1
os_fil1_imon=9.44468E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06398E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65384E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=9.97495E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66867E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.74008E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79001E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22626E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.62896E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.572E3	1.0E0	1.47E2	4.1E1	-7.22418E-2	-8.79985E1	4.76837E-5	-8.80005E1	3.09944E-4	5.55515E-3	9.35555E-2	2.73175E1	-3.26944E1	-3.26437E1	2.68046E1	1.1929E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.0041E-1
2.0E0	1.08429E5	1.0E2	3.16E2	1.6E2	-7.21643E-2	-8.79988E1	1.66893E-4	-8.80005E1	3.8147E-4	5.4121E-3	9.35078E-2	2.7294E1	-3.26474E1	-3.26419E1	2.67905E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.7999E1	4.05312E-4	-8.80005E1	2.38419E-5	5.57899E-3	9.31263E-2	2.73149E1	-3.26805E1	-3.25982E1	2.68169E1	1.1929E-7	2.51813E-3	2.51813E-3	6.31739E-3	3.01212E-1
4.0E0	2.2812E4	1.5E1	6.55E2	3.98E2	-7.29374E-2	-8.79986E1	2.38419E-4	-8.80005E1	3.8147E-4	5.45979E-3	9.35078E-2	2.73111E1	-3.26885E1	-3.26338E1	2.67824E1	1.1924E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.79987E1	2.38419E-5	-8.80005E1	1.43051E-4	5.60284E-3	9.3627E-2	2.72991E1	-3.26705E1	-3.2653E1	2.68124E1	1.1929E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.79988E1	-1.43051E-4	-8.80003E1	1.90735E-4	5.57899E-3	9.34839E-2	2.72974E1	-3.26826E1	-3.26142E1	2.67833E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.7999E1	2.14577E-4	-8.80004E1	1.66893E-4	5.60284E-3	9.35555E-2	2.73088E1	-3.26695E1	-3.26242E1	2.68229E1	1.1929E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.79988E1	-1.43051E-4	-8.80004E1	7.15256E-5	5.45979E-3	9.35316E-2	2.72821E1	-3.26431E1	-3.26325E1	2.6787E1	1.1929E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.01209E-1
1.2E1	1.46E2	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.7999E1	-4.76837E-5	-8.80005E1	3.09944E-4	5.48363E-3	9.34839E-2	2.72841E1	-3.26404E1	-3.26302E1	2.6816E1	1.19238E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00302E-1
1.3E1	2.7E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.79986E1	-2.38419E-5	-8.80004E1	7.15256E-5	5.34058E-3	9.34362E-2	2.73098E1	-3.26791E1	-3.26136E1	2.68106E1	1.1929E-7	2.52276E-3	2.52276E-3	6.34518E-3	3.0071E-1
1.4E1	4.089E3	2.0E0	5.66E2	3.82E2	-7.31692E-2	-8.79986E1	4.05312E-4	-8.80005E1	2.14577E-4	5.53131E-3	9.32932E-2	2.73207E1	-3.26615E1	-3.262E1	2.68064E1	1.19188E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.97901E-1
1.5E1	1.15E2	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.79987E1	1.43051E-4	-8.80005E1	-1.90735E-4	5.05447E-3	9.34362E-2	2.73193E1	-3.26779E1	-3.26549E1	2.68198E1	1.1929E-7	2.52809E-3	2.52809E-3	6.32978E-3	3.00144E-1
1.6E1	7.76E2	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.79989E1	2.38419E-4	-8.80008E1	1.43051E-4	5.43594E-3	9.34839E-2	2.73333E1	-3.26669E1	-3.25978E1	2.68076E1	1.1919E-7	2.51603E-3	2.51603E-3	6.33388E-3	3.006E-1
1.7E1	1.433E3	1.0E0	6.87E2	4.7E2	-7.30918E-2	-8.79984E1	0.0E0	-8.80004E1	2.6226E-4	5.55515E-3	9.33886E-2	2.73092E1	-3.26461E1	-3.26732E1	2.67824E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01609E-1
1.8E1	6.019E3	6.0E0	7.27E2	5.0E2	-7.32464E-2	-8.79988E1	1.19209E-4	-8.80006E1	3.09944E-4	5.14984E-3	9.34362E-2	2.7358E1	-3.26729E1	-3.2626E1	2.68028E1	1.19239E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0071E-1
1.9E1	2.362E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.79988E1	2.38419E-4	-8.80005E1	3.09944E-4	5.48363E-3	9.32455E-2	2.73159E1	-3.26362E1	-3.26368E1	2.68172E1	1.19264E-7	2.51677E-3	2.51677E-3	6.31294E-3	2.99172E-1
2.0E1	2.401E4	1.1E1	8.08E2	5.58E2	-7.30918E-2	-8.79987E1	3.8147E-4	-8.80005E1	3.8147E-4	5.07832E-3	9.3174E-2	2.73141E1	-3.26999E1	-3.26182E1	2.67854E1					
2.1E1	6.1E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.79988E1	3.8147E-4	-8.80005E1	1.66893E-4	5.26905E-3	9.3174E-2	2.73187E1	-3.26885E1	-3.26272E1	2.68204E1	1.19188E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9943E-1
2.2E1	1.825E3	1.0E0	8.89E2	6.17E2	-7.37103E-2	-8.79986E1	3.57628E-4	-8.80003E1	9.53674E-5	5.22137E-3	9.32455E-2	2.73333E1	-3.26735E1	-3.26615E1	2.68154E1	1.19239E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.79989E1	1.19209E-4	-8.80004E1	-7.15256E-5	5.17368E-3	9.32455E-2	2.73021E1	-3.26981E1	-3.25996E1	2.68178E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01871E-1