[Scan]
initial_time=2015-12-18T20:35:24
final_time=2015-12-18T20:35:44
ip_count=19
run=1020
dataset=2
scan=146
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.80641E-6
ql1_vset=
ql1_vmon=-8.79989E1
ql1_imon=-9.20308E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=1.337E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.77593E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.56992E-8
mult1=-1.6616E-8
mult2=-2.60567E-9
rf_tmon=-4.71004E-3
rf_agc=3.32914E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=5.70524E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70159E0
bslens_imon=2.56299E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20187E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=2.90053E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02034E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.40846E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00471E0
lens1_imon=1.42743E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04201E1
cs_ea2_imon=1.56057E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=2.95819E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.39978E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11556E1
os_restr1_imon=4.28193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1548E1
os_ea1_imon=2.31833E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63425E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=1.21702E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=3.02739E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=4.03949E-8
tplens_vset=1.4E-1
tplens_vmon=1.57234E0
tplens_imon=-4.07495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26313E1
iondef3_imon=1.48595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26531E1
iondef2_imon=1.59265E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=9.18913E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=1.83022E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34066E1
lens5b_imon=2.19757E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55972E0
os_ea2_imon=-4.43544E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.17695E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02229E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10655E1
os_restr2_imon=3.43788E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72703E1
iondef1_imon=1.08832E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68123E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.35905E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=8.17901E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56543E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.38969E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.37703E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=6.96824E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=6.16073E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.43579E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08669E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65448E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.96666E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62864E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66973E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69968E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81647E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.61694E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22649E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34661E-3
inlet_lpb_pmon=3.00144E-1
chamber_ion_pmon=1.19237E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.46388E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.512E3	1.0E0	1.47E2	4.1E1	-7.32464E-2	-8.79987E1	4.29153E-4	-8.80005E1	7.15256E-5	4.95911E-3	9.34839E-2	2.72933E1	-3.26703E1	-3.2639E1	2.67856E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.01871E-1
2.0E0	1.08439E5	9.2E1	3.16E2	1.6E2	-7.30918E-2	-8.79986E1	3.33786E-4	-8.80005E1	-9.53674E-5	5.38826E-3	9.36747E-2	2.73213E1	-3.26552E1	-3.26336E1	2.68179E1	1.1929E-7	2.5131E-3	2.5131E-3	6.28592E-3	3.0071E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.79985E1	1.43051E-4	-8.80003E1	0.0E0	5.17368E-3	9.40084E-2	2.72921E1	-3.26773E1	-3.26408E1	2.681E1	1.19243E-7	2.51596E-3	2.51596E-3	6.33706E-3	3.00667E-1
4.0E0	2.3089E4	1.2E1	6.55E2	3.98E2	-7.25507E-2	-8.79986E1	4.76837E-5	-8.80003E1	1.19209E-4	5.55515E-3	9.36031E-2	2.72901E1	-3.26549E1	-3.26488E1	2.6813E1	1.19238E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9978E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.79992E1	3.33786E-4	-8.80003E1	0.0E0	5.50747E-3	9.34601E-2	2.73039E1	-3.26561E1	-3.26685E1	2.6818E1	1.1929E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.06187E-2	-8.79989E1	2.14577E-4	-8.80004E1	1.19209E-4	5.43594E-3	9.32455E-2	2.7311E1	-3.26762E1	-3.2626E1	2.68112E1	1.1929E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.79992E1	4.52995E-4	-8.80002E1	2.14577E-4	5.24521E-3	9.33647E-2	2.73117E1	-3.26639E1	-3.26176E1	2.68136E1	1.1929E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.79989E1	2.14577E-4	-8.80003E1	1.66893E-4	5.26905E-3	9.34839E-2	2.73086E1	-3.26527E1	-3.26057E1	2.68343E1	1.1929E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.99879E-1
1.2E1	1.27E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.79989E1	3.57628E-4	-8.80007E1	2.14577E-4	5.10216E-3	9.3317E-2	2.72751E1	-3.26547E1	-3.26273E1	2.68076E1	1.19241E-7	2.50955E-3	2.50955E-3	6.323E-3	3.00494E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.7999E1	-4.76837E-5	-8.80005E1	1.43051E-4	5.6982E-3	9.35793E-2	2.73141E1	-3.26543E1	-3.26044E1	2.68316E1	1.19236E-7	2.51384E-3	2.51384E-3	6.33021E-3	2.99981E-1
1.4E1	3.997E3	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.79991E1	2.86102E-4	-8.80005E1	9.53674E-5	5.43594E-3	9.3627E-2	2.72921E1	-3.26691E1	-3.26301E1	2.6796E1	1.1929E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00041E-1
1.5E1	9.9E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.79988E1	-7.15256E-5	-8.80007E1	9.53674E-5	5.8651E-3	9.35316E-2	2.72922E1	-3.26865E1	-3.26398E1	2.68056E1	1.19239E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.02511E-1
1.6E1	7.73E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.79989E1	-4.05312E-4	-8.80003E1	2.86102E-4	5.38826E-3	9.34839E-2	2.72898E1	-3.26419E1	-3.26183E1	2.68064E1	1.1929E-7	2.52125E-3	2.52125E-3	6.33177E-3	3.02288E-1
1.7E1	1.419E3	2.0E0	6.87E2	4.7E2	-7.40192E-2	-8.79989E1	-3.09944E-4	-8.80003E1	2.38419E-5	5.31673E-3	9.3317E-2	2.73147E1	-3.26663E1	-3.25948E1	2.68028E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.99686E-1
1.8E1	6.03E3	4.0E0	7.27E2	5.0E2	-7.34782E-2	-8.79992E1	-3.33786E-4	-8.80004E1	7.15256E-5	5.19753E-3	9.33886E-2	2.72997E1	-3.26753E1	-3.26056E1	2.6819E1	1.19238E-7	2.50898E-3	2.50898E-3	6.32386E-3	2.9978E-1
1.9E1	2.36E3	1.0E0	7.68E2	5.29E2	-7.35556E-2	-8.79991E1	-3.09944E-4	-8.80007E1	1.66893E-4	5.38826E-3	9.32932E-2	2.72859E1	-3.26681E1	-3.26296E1	2.68238E1	1.19264E-7	2.51953E-3	2.51953E-3	6.31017E-3	3.00619E-1
2.0E1	2.4167E4	1.7E1	8.08E2	5.58E2	-7.32464E-2	-8.79992E1	-1.43051E-4	-8.80006E1	2.38419E-4	5.38826E-3	9.31025E-2	2.73106E1	-3.26597E1	-3.26125E1	2.6795E1					
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.47923E-2	-8.79991E1	-1.66893E-4	-8.80009E1	5.48363E-4	5.22137E-3	9.32693E-2	2.73075E1	-3.2652E1	-3.26211E1	2.68078E1	1.1929E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00041E-1
2.2E1	1.673E3	0.0E0	8.89E2	6.17E2	-7.39421E-2	-8.79989E1	-7.15256E-5	-8.80009E1	2.14577E-4	5.22137E-3	9.37223E-2	2.72877E1	-3.26639E1	-3.26308E1	2.68082E1	1.1922E-7	2.51867E-3	2.51867E-3	6.33335E-3	2.99845E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.79989E1	4.76837E-5	-8.8001E1	0.0E0	5.45979E-3	9.3317E-2	2.72703E1	-3.26531E1	-3.26313E1	2.68123E1	1.19237E-7	2.51693E-3	2.51693E-3	6.34661E-3	3.00144E-1